• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.169-178
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• 2014

Fluid model based numerical analysis is done to simulate a low damage etch back system for 20 nm scale semiconductor fabrication. Etch back should be done conformally with very high material selectivity. One possible mechanism is three steps: reactive radical generation, adsorption and thermal desorption. In this study, plasma generation and transport steps are analyzed by a commercial plasma modeling software package, CFD-ACE+. Ar + $CF_4$ ICP was used as a model and the effect of reactive gas inlet position was investigated in 2D and 3D. At 200~300 mTorr of gas pressure, separated gas inlet scheme is analyzed to work well and generated higher density of F and $F_2$ radicals in the lower chamber region while suppressing ions reach to the wafer by a double layer conducting barrier.

• Polymer(Korea)
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• v.38 no.2
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• pp.180-187
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• 2014

Nanocomposites including graphene oxide (GO) and conducting polymers (PPy, PANI and PEDOT) were prepared via an in-situ chemical polymerization process, and their characteristic properties depending upon the change of conducting polymer (CP) content were analyzed. A confirmation was made on not only the functional groups formed in GO but also the presence of CP existent in the nanocomposites. The molecular interaction between GO and poly(4-styrene sulfonic acid) (PSSA) or CP in the nanocomposites was proposed. With the increase of PEDOT content in the GOPSS/PEDOT nanocomposite, the estimated value of $I_D/I_G$ regarding the Raman analysis of them was decreased and a major change of their Raman spectra characteristic peaks was observed. In the GO-PSS/PEDOT nanocomposite, PEDOT molecules made an exfoliation of GO-PSSA layers and thus they were intercalated among layers. Such a unique molecular morphology induced the highest electrical conductivity for the GO-PSS/PEDOT nanocomposite among three kinds of nanocomposites prepared in this study. It is also noted that the uniform morphology confirmed in this study helped a thermal stability improvement in the nanocomposite due to the presence of GO or GO-PSSA acting as a thermal barrier.

• Tunnel and Underground Space
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• v.21 no.4
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• pp.264-273
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• 2011

Bentonite buffer is one of the major components of an engineered barrier for an HLW (High-Level Waste) repository. The bentonite buffer is significantly exposed to the decay heat from radioactive wastes, the inflow of groundwater from the surrounding rock of the repository, and the high swelling pressure of densely-compacted bentonite that comes in contact with the groundwater. Therefore, it is essential to understand the THM (Thermal-Hydro-Mechanical) behavior of the bentonite buffer and to acquire the input data of its related constitutive models for the performance and safety assessment of an HLW repository. This paper analyzed the THM properties which have been obtained by conducting laboratory tests with a candidate buffer material for a Korean HLW repository. Moreover the formulation recipe of the reference bentonite buffer was defined on the basis of functional criteria, thus suggesting the THM properties which correspond to the formulation recipe of the reference bentonite buffer.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.2
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• pp.226-233
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• 1999

An experimental study has been performed on natural convection heat transfer with a rapid crust formation in the molten metal pool of a low Prandtl number fluid. Two types of steady state tests, a low and high geometric aspect ratio cases in the molten metal pool, were performed. The crust thickness by solidification was measured 88 a function of boundary surface temperatures. The experimental results on the relationship between the Nusselt number and Rayleigh number In the molten metal pool with a crust formation were compared with existing correlations. The experimental study has shown that the bottom surface temperature of the molten metal layer, in all experiments. is the major influential parameter in the crust formation, duo to the natural convection flow. The Nusselt number of the case without a crust formation in the molten metal pool is greater than that of the case with the crust formation at the same Rayleigh number. The present experimental results on the relationship between the Nusselt number and Rayleigh number In the molten metal pool match well with Globe and Dropkin's correlation. From the experimental results, a now correlation between the Nusslet number and Rayleigh number in the molten metal pool with the crust formation was developed as $Nu=0.0923(Ra)^{0.302}$ ($2{\times}10^4< Ra<2{\times}10^7$).