• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.3 no.3
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• pp.206-214
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• 1991

Flow field in a hard disk drive has been predicted numerically. Theoretical model was constructed based on a commercially available hard disk drive with 40 Mega byte capacity. Since the gap between disk tip and shroud is not homogeneous in real hard disk drive, three kinds of gap size have been tested as computational model. The discussion has been made on the circumferential velocity, radial velocity, and pressure fields. As a result, the average shear stress on the disk surface was reduced as the gap size decreased. This means that the shroud should be designed compactly to reduce power consumption of the spindle motor.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.4 no.3
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• pp.233-241
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• 1992

Temperature distributions in a 3.5 inch hard disk drive including disk surface and internal air have been simulated numerically. Solutions were obtained from fifteen cases regarding three power consumption rates and five ambient conditions. As a result, the velocity of cooling air should be maintained greater than ㏐/s when the power consumption reached 3W in the disk drive. A correlation equation was proposed to predict the temperature field of disk surface and caseing surface.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.2
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• pp.260-269
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• 2000

Oil-film flow visualizations and three-dimensional flow measurements have been conducted in the downstream region of a butterfly-type valve used in air-conditioning systems, with the variation of a disk open angle. The flow visualizations in the flow symmetry plane show that there are a pair of counter-rotating separation/recirculation zones as wall as two jet-like near-wall flows. These flow disturbances are strongly depends on the disk open angle. Based on the flow visualization, a qualitative flow model is suggested in the near-field and downstream region of the valve disk. For a small disk open angle, the mean velocities and turbulent intensities have relatively small values in the near-field of the valve disk, but they do not show uniform distributions even in some downstream region. With an increment of the disk open angle, mean velocity variations and turbulent intensities are greatly increased in the immediate downstream region, but uniform distributions are quickly resumed as departing from the valve disk. The mass flow rate remains nearly constant for the disk open angles less than 30 degrees, meanwhile it strongly depends on the disk open angles between 45 and 75 degrees. The pressure loss is found to be about zero for the disk open angles less than 45 degrees, but is substantially increased for those larger than 75 degrees.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.05a
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• pp.270-273
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• 2002

Conditioning은 CMP(Chemical Mechanical Planarization)에 필수적인 공정중의 하나이다. Conditioning의 목적은 removal rate와 uniformity를 CMP 공정 중에서 일정하게 유지시키는데 목적이 있다. 예전의 conditioning disks는 stainless steel substrate 위에 diamond 입자를 올리고 Ni전기도금을 결합시켜서 사용하였다. 그러나, CMP 공정 중에 Ni의분해로 인한 금속의 오염과 diamond abrasive의 분리로 인하여 scratch 문제가 발생하였다. 이 문제를 해결하기 위해서 ceramic substrate와 그것을 정밀 가공하는 기술을 응용함으로써 본래의 conditioning disks가 가지고 있는 diamond 입자의 분리와 metals 분해의 문제를 해결할 수 있게 되었다.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.14 no.5
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• pp.424-432
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• 2002

Numerical analysis has been conducted to characterize deposition rates of aerosol particles onto a heated, rotating disk with electrostatic effect under the laminar flow field. The particle transport mechanisms considered were convection, Brownian diffusion, gravitational settling, thermophoresis and electrophoresis. The aerosol particles were assumed to have a Boltzmann charge distribution. The electric potential distribution needed to calculate local electric fields around the disk was calculated from the Laplace equation. The Coulomb, the image, the dielectrophoretic and the dipole-dipole forces acting on a charged particle near the conducting rotating disk were included in the analysis. The averaged particle deposition vetocities and their radial distributions on the upper surface of the disk were calculated from the particle concentration equation in a Eulerian frame of reference, along with a rotation speed of 0∼1,000rpm, a temperature difference of 0∼5K and a charged disk voltage of 0∼1000V.Finally, an approximate deposition velocity model for the rotating disk was suggested. The present numerical results showed relatively good agreement with the results of the present approximate model and the available experimental data.

• Tribology and Lubricants
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• v.38 no.1
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• pp.1-7
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• 2022

Chemical-mechanical polishing (CMP) process is a semiconductor process that planarizes a wafer surface using mechanical friction between a polishing pad and a substrate surface during a specific chemical reaction. During the CMP process, polishing pad conditioning is applied to prevent the rapid degradation of the polishing quality caused by polishing pad glazing through repeated material removal processes. However, during the conditioning process, uneven wear on the polishing pad is inevitable because the disk on which diamond particles are electrodeposited is used. Therefore, the abrasion of the polishing pad should be considered not only for the variables during the conditioning process but also when designing the CMP conditioning system. In this study, three design variables of the conditioning system were analyzed, and the effect on the pad wear profile during conditioning was investigated. The three design variables considered in this study were the length of the conditioner arm, diameter of the conditioner disk, and distance between centers. The Taguchi method was used for the experimental design. The effect of the three design variables on pad wear and uniformity was assessed, and new variables used in conditioning system design were proposed.

• Tribology and Lubricants
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• v.25 no.4
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• pp.243-249
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• 2009

A magnetic clutch consists of pulley and disk. It delivers and isolates the power needed for the operation of the compressor used in automotive air conditioning system. To improve the performance, efficiency and durability of automotive air conditioning system, appropriate design of pulley, disk and system working parameters(the magnitude of magnetic force, and so on) is necessary. For that goal, it is required to understand the friction characteristics of magnetic clutch for the initial operating time. In this study, friction tests were carried out in order to investigate the effect of sliding velocity on the friction characteristics of magnetic clutch using pin-on-disk type friction and wear tester. For experiments, pulley and disk used in real automotive air conditioning system were considered. Friction experiments were conducted under various sliding velocities, and coefficients of kinetic friction were obtained. Under the experimental conditions considered in this study, the coefficients of kinetic friction increased with the increase of test number(sliding distance) and decreased with the increase of sliding velocity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.563-564
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• 2006

Recently, CMP (Chemical Mechanical Polishing) is one of very important processing in semiconductor technology because of large integration and application of design role. CMP is a planarization process of wafer surface using the chemical and mechanical reactions. One of the most important components of the CMP system is the polishing pad. During the CMP process, the pad itself becomes smoother and glazing. Therefore it is necessary to have a pad conditioning process to refresh the pad surface, to remove slurry debris and to supply the fresh slurry on the surface. A diamond disk use during the pad conditioning. There are diamonds on the surface of diamond disk to remove slurry debris and to polish pad surface slightly, so density, shape and size of diamond are very important factors. In. this study, we characterized diamond disk with 9 kinds of sample.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.7 no.1
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• pp.13-19
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• 1995

An experimental investigation has been made for flow in a circular cylinder with a rotating bottom disk. Flow system considered in this paper is a characteristic model of interior flows of an electric washing machine. Flows in a tub of an electric washing machine are driven by a rotating bottom disk called a pulsator. The simple and characteristic model was composed of a circular cylinder with impulsively rotating endwall disk and a viscous fluid in it. Rotational motion of the pulsator is periodic and alternative in rotation direction. The flow field in the interior region is governed by a horizontal boundary layer forms on the impulsively rotating disk. Experimental approach was accomplished by adopting an image processing technique for velocity measurements. Comprehensive details of the flow structure are presented. Also a meridional circulation is obtained by tracking image particles suspended in the fluid. Flow structure and data are successfully procured for this complex rotating flow field.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.8
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• pp.707-713
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• 2004

A numerical analysis has been conducted for flow characteristics of piezoelectric micropumps. In the present study, FSI (Fluid-Structure Interaction) model and grid deform model have been employed for each of two different geometries of the micropumps with two different frequencies in the piezoelectric diffuser/nozzle based micropumps. The displacement of piezo disk and flow rates have been closely examined at the inlet and outlet. It has been found that the motion of the piezo disk investigated with FSI model is not in accordance with that with grid deform model. The results show that the time averaged flow rate calculated with FSI model is larger than that with grid deform model. This study presents the performance analysis of piezoelectric micropumps with two different numerical models for different types of pumps.