• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.387-394
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• 2013

As the feature size of integrated circuits continues to decrease, the challenge of achieving an oxidation-free exposed layer after photoresist (PR) stripping is becoming a critical issue for semiconductor device fabrication. In this article, the hydrogen plasma characteristics in direct plasma and the PR stripping rate in remote plasma were studied using a $120{\Phi}$ cylindrical inductively coupled plasma source. E mode, H mode and E-H mode transitions were observed, which were defined by matching the $V_{rms}$ and total impedance. In addition, the dependence of the E-H mode transition on pressure was examined and the corresponding plasma instability regions were identified. The plasma density and electron temperature increased gradually under the same process conditions. In contrast, the PR stripping rate decreased with increasing proportion of $H_2$ gas in mixed $H_2/N_2$ plasma. The decrease in concentration of reactive radicals for the removal of PR with increasing $H_2$ gas flow rate suggests that NH radicals have a dominant effect as the main volatile product.

• 대한기계학회논문집B
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• 제26권1호
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• pp.125-132
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• 2002

An experimental study on the characteristics of stability of propane turbulent nonpremixed jet flames discharged normal to air free-streams with uniform velocity profile is conducted. Experimental observations are focused on the flame shape, the stability considering two kinds of flame, lift-off distance, and the flame length according to velocity ratio. In order to investigate the mixing structure of the flame base at the lower limit, we employ the RMS technique and measure the species concentration by a gas chromatography. In the results of the stability curve and lifted flame, it is fecund that the dependency of nozzle diameter is closely related to the large-scale vortical structure representing counter-rotating vortices pair. Also, the detailed discussion on the phenomenon of blowout due to this large vortical motion, is provided.

• 한국자동차공학회논문집
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• 제15권4호
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• pp.54-60
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• 2007

A new method that optimizes a control of hydrocarbon (HC) addition to diesel exhaust gas for HC type DeNOx catalyst system has been developed. These catalysts are called as the HC-DeNOx catalyst in this paper. The system using HC-DeNOx catalyst requires a resonable quantity of hydrocarbons addition in the inlet gas of the catalyst, because the HC concentration in a diesel engine is so low that the HC is not sufficient for NOx conversion. Generally ambient temperature in the exhaust manifold is $250{\sim}350^{\circ}C$, so spray behavior in this case is different from that of any other condions. This research shows spray behavior of injected hydrocarbons in the transparent exhaust manifold.

• 대한금속재료학회지
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• 제46권4호
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• pp.217-222
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• 2008

Characteristics of etching and induced surface morphology variation by wet-etching of n-face n-type GaN were investigated using KOH solutions. It was observed that hexagonal pyramids were formed on the etched surface regardless of etching conditions. However, the size of the hexagonal pyramids was changed as the etching time and temperature increased, respectively. Initially, as the etching time and concentration of KOH solution increased, the hexagonal pyramid was observed to be dissociated into smaller pyramids. However, as the etching time increased further, the size of the hexagonal pyramids increased again, indicating that the etching of N-face n-type GaN by KOH solutions proceeded through the evolution of hexagonal pyramids, such as formation, dissociation and enlargement of pyramids. Furthermore, it was also observed that there is a correlation between the photoluminescence intensity of the etched surface and the value of root-mean-square roughness. The intensity of PL increased as the roughness value increased due to the enhancement of the extraction efficiency of the generated photons.

• 대한금속재료학회지
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• 제47권1호
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• pp.38-43
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• 2009

To investigate the effect of RF power on the structural, optical and electrical properties of amorphous InGaZnO (a-IGZO), its thin films and TFTs were prepared by RF magnetron sputtering method with different RF power conditions of 40, 80 and 120 W at room temperature. In this study, as RF power during the deposition process increases, the RMS roughness of a-IGZO films increased from 0.26 nm to 1.09 nm, while the optical band-gap decreased from 3.28 eV to 3.04 eV. In the case of the electrical characteristics of a-IGZO TFTs, the saturation mobility increased from $7.3cm^2/Vs$ to $17.0cm^2/Vs$, but the threshold voltage decreased from 5.9 V to 3.9 V with increasing RF power. It is regarded that the increment of RF power increases the carrier concentration of the a-IGZO semiconductor layer due to the higher generation of oxygen vacancies.

• 대한원격탐사학회지
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• 제27권6호
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• pp.677-692
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• 2011

Suspended sediment is an important oceanic variable for monitoring changes in coastal environment related to physical and biogeochemical processes. In order to estimate suspended sediment concentration (SSC) from satellite data, we derived SSC coefficients by fitting satellite remote sensing reflectances to in-situ suspended sediment measurements. To collect in-situ suspended sediment, we conducted ship cruises at 16 different locations three times for the periods of Sep.-November 2009 and Jul. 2010 at the passing time of Landsat $ETM_+$. Satellite data and in-situ data measured by spectroradiometers were converted to remote sensing reflectances ($R_{rs}$). Statistical approaches proved that the exponential formula using a single band of $R_{rs}$(565) was the most appropriate equation for the estimation of SSC in this study. Satellite suspended sediment using the newly-derived coefficients showed a good agreement with insitu suspended sediment with an Root Mean Square (RMS) error of 1-3 g/$m^3$. Satellite-observed SSCs tended to be overestimated at shallow depths due to bottom reflection presumably. This implies that the satellite-based SSCs should be carefully understood at the shallow coastal regions. Nevertheless, the satellite-derived SSCs based on the derived SSC coefficients, for the most cases, reasonably coincided with the pattern of in-situ suspended sediment measurements in the study region.

• 대한임베디드공학회논문지
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• 제17권1호
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• pp.9-17
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• 2022

As the COVID-19 pandemic situation worsens, the time spent indoors increases, and the exposure to indoor environmental pollution such as indoor air pollution and noise also increases, causing problems such as deterioration of human health, stress, and discord between neighbors. This paper designs and implements a system that measures and monitors indoor air quality and noise, which are representative evaluation criteria of the indoor environment. The system proposed in this paper consists of a particulate matter measurement subsystem that measures and corrects the concentration of particulate matters to monitor indoor air quality, and a noise measurement subsystem that detects changes in sound and converts it to a sound pressure level. The concentration of indoor particulate matters is measured using a laser-based light scattering method, and an error caused by temperature and humidity is compensated in this paper. For indoor noise measurement, the voltage measured through a microphone is basically measured, Fourier transform is performed to classify it by frequency, and then A-weighting is performed to correct loudness equality. Then, the RMS value is obtained, high-frequency noise is removed by performing time-weighting, and then SPL is obtained. Finally, the equivalent noise level for 1 minute and 5 minutes are calculated to show the indoor noise level. In order to classify noise into direct impact sound and air transmission noise, a piezo vibration sensors is mounted to determine the presence or absence of direct impact transmitted through the wall. For performance evaluation, the error of particulate matter measurement is analyzed through TSI's AM510 instrument. and compare the noise error with CEM's noise measurement system.

• 한국지반환경공학회 논문집
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• 제14권11호
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• pp.5-12
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• 2013

본 연구의 목적은 토석류 발생 가능성이 높은 산지에 소단을 설치하였을 경우 산지 하류에서의 토석류의 거동과 메카니즘을 측정하는 것이다. 수치모델은 질량보존 및 운동량 보존에 관한 방정식에 기초하여 유한차분법을 이용하여 수행되었다. 토석류 거동을 측정하기 위하여 3가지 형태의 소단을 갖는 사면과 직선 사면에서의 토석류 변화를 비교하였다. 우선 하류단에서 소단폭의 길이 변화에 따른 직선 사면과 소단을 갖는 사면에 대한 유량과 토사체적 농도를 조사하였고, 공급유량 변화에 따른 소단을 갖는 사면에서의 유량과 토사체적 농도를 조사하였다. 소단을 갖는 수로에서는 소단폭의 길이가 길어질수록 소단으로 인해 토석류가 저유량 형태로 나타났으며, 고유량의 요동분포의 지속시간이 줄어들었다. 이는 소단이 토석류를 지연시키는 데 효과적인 것을 발견하였다. RMS비 비교 결과 소단을 갖는 사면이 직선 사면보다 유량이 적게 나타난 것을 확인하였다. 토사체적농도의 경우 소단폭의 길이가 길어질수록 변곡점이 나타나지 않고 완만한 형태의 그래프를 나타냈으다. 또한, 저농도의 토사와 물이 혼합되어 하류부로 유하하기 때문에 하류부에서의 토석류에 의한 피해를 저감시키는 데 효과가 있었다. 본 연구의 결과는 토석류 재해 예측 및 다양한 대책을 세우는 데 좋은 정보를 제공할 것이다.

• 폴리머
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• 제37권3호
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• pp.316-322
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• 2013

본 연구에서는 고분자 소재 중 하나인 폴리(에틸렌 테레프탈레이트)(poly(ethylene terephthalate), PET) 필름의 표면을 친수성으로 개질하기 위하여 기상 불소화 및 초음파 수세를 실시하였다. 표면 처리된 PET 필름의 표면 특성은 접촉각, 표면 자유에너지, 주사전자 현미경(FE-SEM), 원자간력 현미경(AFM), X선 광전자분석법(XPS)을 통하여 분석하였다. 직접 불소화 및 초음파 수세 처리된 PET 필름의 물 접촉각은 $10.8^{\circ}$으로 미처리된 PET에 비하여 85% 감소하였고, 총 표면 자유에너지는 $42.25mNm^{-1}$으로 미처리된 PET에 비하여 650% 증가하였다. 또한 RMS(root mean square) 거칠기는 1.965 nm로 미처리된 PET 필름에 비하여 348% 증가하였으며, 친수성 관능기인 C-OH 결합의 농도는 약 3배 가까이 증가하였다. 이는 직접 불소화 및 초음파 수세 처리된 PET 필름 표면에 형성된 친수성 관능기와 공동화 현상에 의한 화학적 식각 반응에서 기인한 것으로 생각된다. 이 결과로부터, 기상 불소화 및 초음파 수세 처리법은 PET 필름 표면을 친수성으로 쉽게 개질할 수 있는 효과적인 방법으로 기대된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.355-356
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• 2008

In this work, ZnO films doped with different contents of Indium (0.1at.%, 0.3at.%, 0.6at.%, respectively) were deposited on Si (111) substrate that has 1~20 $\Omega$cm by pulsed laser deposition (PLD) at $600^{\circ}C$ for 30min. The thickness of the films are about 250 nm. The structural, optical and electrical properties of the films were investigated using X-ray Diffraction (XRD), Atomic force microscope (AFM), Photoluminescence (PL) and Hall measurement. It has been found that RMS of the films is decreased and grain size is increased with increasing the contents of doped Indium. The results of the Photoluminescence properties were indicated that the films have UV emission about 380nm and shows a little red shitf with increasing contents of doped indium. The result of the Hall measurement shows that the concentration and resisitivity in doped ZnO are as changing as one order, respectively ${\sim}10^{18}/cm^2$, ${\sim}10^{-2}cm{\Omega}cm$.