• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.387-394
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• 2013

As the feature size of integrated circuits continues to decrease, the challenge of achieving an oxidation-free exposed layer after photoresist (PR) stripping is becoming a critical issue for semiconductor device fabrication. In this article, the hydrogen plasma characteristics in direct plasma and the PR stripping rate in remote plasma were studied using a $120{\Phi}$ cylindrical inductively coupled plasma source. E mode, H mode and E-H mode transitions were observed, which were defined by matching the $V_{rms}$ and total impedance. In addition, the dependence of the E-H mode transition on pressure was examined and the corresponding plasma instability regions were identified. The plasma density and electron temperature increased gradually under the same process conditions. In contrast, the PR stripping rate decreased with increasing proportion of $H_2$ gas in mixed $H_2/N_2$ plasma. The decrease in concentration of reactive radicals for the removal of PR with increasing $H_2$ gas flow rate suggests that NH radicals have a dominant effect as the main volatile product.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.1
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• pp.125-132
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• 2002

An experimental study on the characteristics of stability of propane turbulent nonpremixed jet flames discharged normal to air free-streams with uniform velocity profile is conducted. Experimental observations are focused on the flame shape, the stability considering two kinds of flame, lift-off distance, and the flame length according to velocity ratio. In order to investigate the mixing structure of the flame base at the lower limit, we employ the RMS technique and measure the species concentration by a gas chromatography. In the results of the stability curve and lifted flame, it is fecund that the dependency of nozzle diameter is closely related to the large-scale vortical structure representing counter-rotating vortices pair. Also, the detailed discussion on the phenomenon of blowout due to this large vortical motion, is provided.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.4
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• pp.54-60
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• 2007

A new method that optimizes a control of hydrocarbon (HC) addition to diesel exhaust gas for HC type DeNOx catalyst system has been developed. These catalysts are called as the HC-DeNOx catalyst in this paper. The system using HC-DeNOx catalyst requires a resonable quantity of hydrocarbons addition in the inlet gas of the catalyst, because the HC concentration in a diesel engine is so low that the HC is not sufficient for NOx conversion. Generally ambient temperature in the exhaust manifold is $250{\sim}350^{\circ}C$, so spray behavior in this case is different from that of any other condions. This research shows spray behavior of injected hydrocarbons in the transparent exhaust manifold.

• Korean Journal of Metals and Materials
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• v.46 no.4
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• pp.217-222
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• 2008

Characteristics of etching and induced surface morphology variation by wet-etching of n-face n-type GaN were investigated using KOH solutions. It was observed that hexagonal pyramids were formed on the etched surface regardless of etching conditions. However, the size of the hexagonal pyramids was changed as the etching time and temperature increased, respectively. Initially, as the etching time and concentration of KOH solution increased, the hexagonal pyramid was observed to be dissociated into smaller pyramids. However, as the etching time increased further, the size of the hexagonal pyramids increased again, indicating that the etching of N-face n-type GaN by KOH solutions proceeded through the evolution of hexagonal pyramids, such as formation, dissociation and enlargement of pyramids. Furthermore, it was also observed that there is a correlation between the photoluminescence intensity of the etched surface and the value of root-mean-square roughness. The intensity of PL increased as the roughness value increased due to the enhancement of the extraction efficiency of the generated photons.

• Korean Journal of Metals and Materials
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• v.47 no.1
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• pp.38-43
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• 2009

To investigate the effect of RF power on the structural, optical and electrical properties of amorphous InGaZnO (a-IGZO), its thin films and TFTs were prepared by RF magnetron sputtering method with different RF power conditions of 40, 80 and 120 W at room temperature. In this study, as RF power during the deposition process increases, the RMS roughness of a-IGZO films increased from 0.26 nm to 1.09 nm, while the optical band-gap decreased from 3.28 eV to 3.04 eV. In the case of the electrical characteristics of a-IGZO TFTs, the saturation mobility increased from $7.3cm^2/Vs$ to $17.0cm^2/Vs$, but the threshold voltage decreased from 5.9 V to 3.9 V with increasing RF power. It is regarded that the increment of RF power increases the carrier concentration of the a-IGZO semiconductor layer due to the higher generation of oxygen vacancies.

• Korean Journal of Remote Sensing
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• v.27 no.6
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• pp.677-692
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• 2011

Suspended sediment is an important oceanic variable for monitoring changes in coastal environment related to physical and biogeochemical processes. In order to estimate suspended sediment concentration (SSC) from satellite data, we derived SSC coefficients by fitting satellite remote sensing reflectances to in-situ suspended sediment measurements. To collect in-situ suspended sediment, we conducted ship cruises at 16 different locations three times for the periods of Sep.-November 2009 and Jul. 2010 at the passing time of Landsat $ETM_+$. Satellite data and in-situ data measured by spectroradiometers were converted to remote sensing reflectances ($R_{rs}$). Statistical approaches proved that the exponential formula using a single band of $R_{rs}$(565) was the most appropriate equation for the estimation of SSC in this study. Satellite suspended sediment using the newly-derived coefficients showed a good agreement with insitu suspended sediment with an Root Mean Square (RMS) error of 1-3 g/$m^3$. Satellite-observed SSCs tended to be overestimated at shallow depths due to bottom reflection presumably. This implies that the satellite-based SSCs should be carefully understood at the shallow coastal regions. Nevertheless, the satellite-derived SSCs based on the derived SSC coefficients, for the most cases, reasonably coincided with the pattern of in-situ suspended sediment measurements in the study region.

• IEMEK Journal of Embedded Systems and Applications
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• v.17 no.1
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• pp.9-17
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• 2022

As the COVID-19 pandemic situation worsens, the time spent indoors increases, and the exposure to indoor environmental pollution such as indoor air pollution and noise also increases, causing problems such as deterioration of human health, stress, and discord between neighbors. This paper designs and implements a system that measures and monitors indoor air quality and noise, which are representative evaluation criteria of the indoor environment. The system proposed in this paper consists of a particulate matter measurement subsystem that measures and corrects the concentration of particulate matters to monitor indoor air quality, and a noise measurement subsystem that detects changes in sound and converts it to a sound pressure level. The concentration of indoor particulate matters is measured using a laser-based light scattering method, and an error caused by temperature and humidity is compensated in this paper. For indoor noise measurement, the voltage measured through a microphone is basically measured, Fourier transform is performed to classify it by frequency, and then A-weighting is performed to correct loudness equality. Then, the RMS value is obtained, high-frequency noise is removed by performing time-weighting, and then SPL is obtained. Finally, the equivalent noise level for 1 minute and 5 minutes are calculated to show the indoor noise level. In order to classify noise into direct impact sound and air transmission noise, a piezo vibration sensors is mounted to determine the presence or absence of direct impact transmitted through the wall. For performance evaluation, the error of particulate matter measurement is analyzed through TSI's AM510 instrument. and compare the noise error with CEM's noise measurement system.

• Journal of the Korean GEO-environmental Society
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• v.14 no.11
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• pp.5-12
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• 2013

The purpose of this study is to estimate the behavior and the mechanism of debris flow at the end of mountain side when a berm was set on the inclined plane. The numerical model was performed by using the Finite Difference Method(FDM) based on the equation for the mass conservation and momentum conservation. In order to measure the behavior of the debris flow, the debris flow of a straight channel slope and the debris flow of channel slope with 3 types of berms were compared. First, the flow discharge and the sediment volume concentration at the downstream of the channel slope, depending on the various berm width and the different inflow discharges at the upstream of the channel were analyzed. The longer the berm width, the flow discharge at the downstream of the channel was decreased and the high flow fluctuation was reduced by a berm. And it means that a berm can effect for the delay of the debris flow. Through Root Mean Square ratio(RMS) comparison, the flow discharge of the channel slope with a berm was lower than that of a straight channel slope. The longer the berm width, for the sediment volume concentration, an inflection point did not show but mild curve. Because the low sediment concentration with water mixture by a berm continuously flow at the downstream end, it will be effect for reducing the disaster caused by debris flow. The results of this study will provide useful information in predicting and preventing disaster caused by the debris flow.

• Polymer(Korea)
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• v.37 no.3
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• pp.316-322
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• 2013

In this study, poly(ethylene terephthalate) (PET) was treated with fluorination and ultrasonic washing treatment for hydrophilic modification of PET film. We measured the change of surface modified PET film surface characteristics using contact angle, surface free energy, FE-SEM, AFM and XPS. After direct fluorination and ultrasonic washing treatment, the water contact angle was measured to be $10.81^{\circ}$, 85% reduction compared to the untreated PET film. Total surface free energy has been measured to be $42.25mNm^{-1}$, 650% increase compared to the untreated PET film. Also RMS roughness has been measured to be 1.965 nm, 348% increase compared to the untreated PET film. Hydrophilic functional group C-OH bond concentration has increased approximately 3 times. These results are attributed to the hydrophilic functional group and cavitation due to chemical etching. From this result, it was suggested that the fluorination-ultrasonic washing treatment method could be useful to make PET film surface hydrophilic.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.355-356
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• 2008

In this work, ZnO films doped with different contents of Indium (0.1at.%, 0.3at.%, 0.6at.%, respectively) were deposited on Si (111) substrate that has 1~20 $\Omega$cm by pulsed laser deposition (PLD) at $600^{\circ}C$ for 30min. The thickness of the films are about 250 nm. The structural, optical and electrical properties of the films were investigated using X-ray Diffraction (XRD), Atomic force microscope (AFM), Photoluminescence (PL) and Hall measurement. It has been found that RMS of the films is decreased and grain size is increased with increasing the contents of doped Indium. The results of the Photoluminescence properties were indicated that the films have UV emission about 380nm and shows a little red shitf with increasing contents of doped indium. The result of the Hall measurement shows that the concentration and resisitivity in doped ZnO are as changing as one order, respectively ${\sim}10^{18}/cm^2$, ${\sim}10^{-2}cm{\Omega}cm$.