• 제목/요약/키워드: Colloidal deposition technique

검색결과 10건 처리시간 0.029초

PEALD과 ALD을 이용한 다공성 기판의 증착 특성 비교

  • 강고루;차덕준;김진태;윤주영
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
    • /
    • pp.155.2-155.2
    • /
    • 2014
  • Plasma Enhanced Atomic Layer Deposition(PEALD)와 Atomic Layer Deposition(ALD) Techniques는 '정확한 두께 조절' 및 '우수한 균일도'를 가지는 신뢰할 수 있는 진공 기술이다. 본 연구에서는 다공성 구조를 가지는 기판을 대상으로 PEALD와 ALD Techniques을 이용한 $Al_2O_3$ 형성 공정의 증착 특성을 비교하였다. 각 공정은 공통적으로 Tris-Methyl-Aluminium(TMA)을 첫번째 전구체로 사용하였고 purge gas로는 Nitrogen를 사용하였다. 그리고 두번째 전구체로 PEALD 공정에서는 Oxygen Plasma를 사용하였고 ALD 공정에서는 Water를 사용하였다. 복잡한 다공성 구조를 가지는 기판은 $TiO_2$ Nano-Particle paste과 colloidal Silver paste를 소결시켜 제작하여 사용하였다. 각 공정의 차이점을 비교하기 위해서 배기단에 Capacitor Diaphram Gauge(CDG)와 Residual Gas Analyzer(RGA)를 통해서 압력과 잔류 가스를 모니터하였다. 그리고 각 공정을 통해서 porous한 Nano-Particles Network에 형성된 $Al_2O_3$막의 특성을 비교하기 위해서 FE-SEM과 EDX를 통해서 관찰하였다. 또한 좀 더 자세한 비교 분석을 위해서 $Al_2O_3$ 막이 형성된 porous한 Nano-Particles Networks의 각 각의 particles들을 분산시켜 TEM과 AFM를 통해서 관찰하였다. 나아가 전기적 물성의 차이점을 비교하기 위해서 IV 및 CV를 측정하였다. 위의 일련의 비교 실험을 통해서 'PEALD과 ALD을 이용한 다공성 기판의 증착 특성'에 대하여 고찰하였다.

  • PDF

Conditioning Effects on LSM-YSZ Cathodes for Thin-film SOFCs

  • Lee You-Kee;Visco Steven J.
    • 전기화학회지
    • /
    • 제2권4호
    • /
    • pp.202-208
    • /
    • 1999
  • [ $50/50 vol\%$ ] LSM-YSZ의 양극은 콜로이드 증착법에 의해 YSZ 전해질상에 증착하였다. 양극 특성은 주사전자현미경과 임피던스 분석기에 의해 고찰하였다. LSM-YSZ양극의 제조 조건에 따른 영향을 관찰하였으며, 그 영향에 대한 개선책이 고체산화물 연료전지의 성능향상을 위해 제시되었다. 임피던스에 대한 온도, YSZ전해질로의 양극 접착에 대한 표면 오염, 사용하는 Pt 페이스트, 미세구조에 대한 곡표면에 가해진 연무질 분사기술과 셀과 셀의 변동성에 대한 영향들은 각각 $900^{\circ}C$ 측정, YSZ표면 연마, 일단의 Pt페이스트 사용, 평편한 YSZ판의 사용과 일관된 절차와 기술의 사용에 의해 해결되었다. 이때 재현성 있는 임피던스 스펙트럼들이 향상된 셀을 사용함으로써 얻어졌고, $900^{\circ}C$에서 (공기)LSM-YSZ/YSZ/LSM-YSZ(공기) 셀에 대해 측정된 전형적인 임피던스 스펙트럼들은 2개의 불완전한 호로 구성되었다. 또한 LSM-YSZ 양극의 임피던스 특성은 촉매층, 양극 조성, 인가 전류 등과 같은 실험 조건들에 의해서도 영향을 받았다.

박막 고체산화물 연료전지용 이트리아 안정화 지르코니아 전해질 연마표면상의 공기극 성능 (Performance of Air Electrodes with a Surface-Polished Yttria-Stabilized Zircona Electrolyte for Thin-Film Solid Oxide Fuel Cells)

  • 이유기
    • 한국재료학회지
    • /
    • 제11권4호
    • /
    • pp.283-289
    • /
    • 2001
  • 50/50 vol% LSM-YSZ (La$_{1-x}$Sr$_{x}$MnO$_3$-yttria stabilized zirconia)의 복합공기극이 콜로이드 증착법에 의해 연마된 YSZ 전해질상에 증착되었다. 그 전극 특성은 주사전자현미경, X선회절과 임피던스 분석기에 의해 연구되어졌다. 90$0^{\circ}C$에서 공기/LSM -YSZ/YSZ/Pt/공기 셀에 대해 측정된 전형적인 임피던스 스펙트럼들은 2개의 불완전한 호(depressed arc)로 구성되었다. LSM 전극에 대한 YSZ의 첨가는 전극내의 삼상계(TPB) 영역을 증가시켰으며, 이것이 LSM-YSZ 복합공기극의 비저항을 감소시켰다. 또한 전해질 표면의 불순물 제거와 TPB 길이의 증가를 위한 전해질 표면연마는 공기극의 비저항을 훨씬 더 감소시켰다. LSM-YSZ 공기극의 비저항은 작동온도, 공기극의 조성과 입자크기, 인가전류 및 전해질의 표면거칠기에 의해 큰 영향을 받았다.

  • PDF

랭뮤어-블롯젯을 통해 형성된 고밀도 양자점 박막과 이를 기반으로 한 발광다이오드 (Light-emitting Diodes based on a Densely Packed QD Film Deposited by the Langmuir-Blodgett Technique)

  • 이승현;정병국;노정균
    • 센서학회지
    • /
    • 제31권4호
    • /
    • pp.249-254
    • /
    • 2022
  • To achieve high-performance colloidal quantum dot light-emitting diodes (QD-LEDs), the use of a densely packed QD film is crucial to prevent the formation of leakage current pathways and increase in interface resistance. Spin coating is the most common method to deposit QDs; however, this method often produces pinholes that can act as short-circuit paths within devices. Since state-of-the-art QD-LEDs typically employ mono- or bi-layer QDs as an emissive layer because of their low conductivities, the use of a densely packed and pinhole-free QD film is essential. Herein, we introduce the Langmuir-Blodgett (LB) technique as a deposition method for the fabricate densely packed QD films in QD-LEDs. The LB technique successfully transfers a highly dense monolayer of QDs onto the substrate, and multilayer deposition is performed by repeating the transfer process. To validate the comparability of the LB technique with the standard QD-LED fabrication process, we fabricate and compare the performance of LB-based QD-LEDs to that of the spin-coating-based device. Owing to the non-destructiveness of the LB technique, the electroluminescence efficiency of the LB-based QD-LEDs is similar to that of the standard spin coating-based device. Thus, the LB technique is promising for use in optoelectronic applications.

Nano Fabrication of Functional Materials by Pulsed Laser Ablation

  • 윤종원
    • 한국재료학회:학술대회논문집
    • /
    • 한국재료학회 2009년도 추계학술발표대회
    • /
    • pp.6.2-6.2
    • /
    • 2009
  • Nanostructured materials arecurrently receiving much attention because of their unique structural andphysical properties. Research has been stimulated by the envisagedapplications for this new class of materials in electronics, optics, catalysisand magnetic storage since the properties derived from nanometer-scalematerials are not present in either isolated molecules or micrometer-scalesolids. This study presents the experimental results derived fromthe various functional materials processed in nano-scale using pulsed laserablation, since those materials exhibit new physical phenomena caused by thereduction dimensionality. This presentation consists of three mainparts to consider in pulsed laser ablation (PLA) technique; first nanocrystallinefilms, second, nanocolloidal particles in liquid, and third, nanocoating fororganic/inorganic hybridization. Firstly, nanocrystalline films weresynthesized by pulsed laser deposition at various Ar gas pressures withoutsubstrate heating and/or post annealing treatments. From the controlof processng parameters, nanocystalline films of complex oxides and non-oxidematerials have been successfully fabricated. The excellentcapability of pulsed laser ablation for reactive deposition and its ability totransfer the original stoichiometry of the bulk target to the deposited filmsmakes it suitable for the fabrication of various functionalmaterials. Then, pulsed laser ablation in liquid has attracted muchattention as a new technique to prepare nanocolloidal particles. Inthis work, we represent a novel synthetic approach to directly producehighly-dispersed fluorescent colloidal nanoparticles using the PLA from ceramicbulk target in liquid phase without any surfactant. Furthermore, novel methodbased on simultaneous motion tracking of several individual nanoparticles isproposed for the convenient determination of nanoparticle sizedistributions. Finally, we report that the GaAs nanocrystals issynthesized successfully on the surface of PMMA (polymethylmethacrylate)microspheres by modified PLD technique using a particle fluidizationunit. The characteristics of the laser deposited GaAs nanocrytalswere then investigated. It should be noted that this is the first successfultrial to apply the PLD process nanocrystals on spherical polymermatrices. The present process is found to be a promising method fororganic/inorganic hybridization.

  • PDF

비진공 나노입자 코팅법을 이용한 CIGS 박막 태양전지 제조 (Fabrication of CIGS Thin Film Solar Cell by Non-Vacuum Nanoparticle Deposition Technique)

  • 안세진;김기현;윤경훈
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 한국신재생에너지학회 2006년도 춘계학술대회
    • /
    • pp.222-224
    • /
    • 2006
  • A non-vacuum process for $Cu(In,Ga)Se_2$ (CIGS) thin film solar cells from nanoparticle precursors was described in this work CIGS nanoparticle precursors was prepared by a low temperature colloidal route by reacting the starting materials $(CuI,\;InI_3,\;GaI_3\;and\;Na_2Se)$ in organic solvents, by which fine CIGS nanoparticles of about 20nm in diameter were obtained. The nanoparticle precursors were mixed with organic binder material for the rheology of the mixture to be adjusted for the doctor blade method. After depositing the mixture of CIGS with binder on Mo/glass substrate, the samples were preheated on the hot plate in air to evaporate remaining solvents ud to burn the organic binder material. Subsequently, the resultant (porous) CIGS/Mo/glass simple was selenized in a two-zone Rapid Thermal Process (RTP) furnace in order to get a solar ceil applicable dense CIGS absorber layer. Complete solar cell structure was obtained by depositing. The other layers including CdS buffer layer, ZnO window layer and Al electrodes by conventional methods. The resultant solar cell showed a conversion efficiency of 0.5%.

  • PDF

Efficiency enhancement of spray QD solar cells

  • Park, Dasom;Lee, Wonseok;Jang, Jinwoong;Yim, Sanggyu
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
    • /
    • pp.420.1-420.1
    • /
    • 2016
  • Colloidal quantum dot (CQD) is emerging as a promising active material for next-generation solar cell applications because of its inexpensive and solution-processable characteristics as well as unique properties such as a tunable band-gap due to the quantum-size effect and multiple exciton generation. However, the most widely used spin-coating method for the formation of the quantum dot (QD) active layers is generally hard to be adopted for high productivity and large-area process. Instead, the spray-coating technique may potentially be utilized for high-throughput production of the CQD solar cells (CQDSCs) because it can be adapted to continuous process and large-area deposition on various substrates although the cell efficiency is still lower than that of the devices fabricated with spin-coating method. In this work, we observed that the subsequent treatment of two different ligands, halide ion and butanedithiol, on the lead sulfide (PbS) QD layer significantly enhanced the cell efficiency of the spray CQDSCs. The maximum power conversion efficiency was 5.3%, comparable to that of the spin-coating CQDSCs.

  • PDF

The Role of Surface Oxide of Metal Nanoparticles on Catalytic Activity of CO Oxidation Unraveled with Ambient Pressure X-ray Photoelectron Spectroscopy

  • Park, Jeong Young
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
    • /
    • pp.132-132
    • /
    • 2013
  • Colloidal synthesis of nanoparticles with well-controlled size, shape, and composition, together with development of in situ surface science characterization tools, such as ambient pressure X-ray photoelectron spectroscopy (APXPS), has brought new opportunities to unravel the surface structure of working catalysts. Recent studies suggest that surface oxides on transition metal nanoparticles play an important role in determining the catalytic activity of CO oxidation. In this talk, I will outline the recent studies on the influence of surface oxides on Rh, Pt, Ru and Co nanoparticles on the catalytic activity of CO oxidation [1-3]. Transition metal nanoparticle model catalysts were synthesized in the presence of poly(vinyl pyrrolidone) polymer capping agent and deposited onto a flat Si support as two-dimensional arrays using the Langmuir-Blodgett deposition technique. APXPS studies exhibited the reversible formation of surface oxides during oxidizing, reducing, and CO oxidation reaction [4]. General trend is that the smaller nanoparticles exhibit the thicker surface oxides, while the bigger ones have the thin oxide layers. Combined with the nature of surface oxides, this trend leads to the different size dependences of catalytic activity. Such in situ observations of metal nanoparticles are useful in identifying the active state of the catalysts during use and, hence, may allow for rational catalyst designs for practical applications. I will also show that the surface oxide can be engineered by using the simple surface treatment such as UV-ozone techniques, which results in changing the catalytic activity [5]. The results suggest an intriguing way to tune catalytic activity via engineering of the nanoscale surface oxide.

  • PDF

고체산화물 연료전지의 공기극으로서 La1-xSrxMnO3 계의 합성 및 특성 (Synthesis and Properties of La1-xSrxMnO3 System as Air Electrode for Solid Oxide Fuel Cell)

  • 이유기;이영기
    • 한국재료학회지
    • /
    • 제22권9호
    • /
    • pp.470-475
    • /
    • 2012
  • $La_{1-x}Sr_xMnO_3$(LSM,$0{\leq}x{\leq}0.5$) powders as the air electrode for solid oxide fuel cell were synthesized by a glycine-nitrate combustion process. The powders were then examined by X-ray diffraction(XRD) and scanning electron microscopy (SEM). The as-formed powders were composed of very fine ash particles linked together in chains. X-ray maps of the LSM powders milled for 1.5 h showed that the metallic elements are homogeneously distributed inside each grain and in the different grains. The powder XRD patterns of the LSM with x < 0.3 showed a rhombohedral phase; the phase changes to the cubic phase at higher compositions($x{\geq}0.3$) calcined in air at $1200^{\circ}C$ for 4 h. Also, the SEM micrographs showed that the average grain size decreases as Sr content increases. Composite air electrodes made of 50/50 vol% of the resulting LSM powders and yttria stabilized zirconia(YSZ) powders were prepared by colloidal deposition technique. The electrodes were studied by ac impedance spectroscopy in order to improve the performance of a solid oxide fuel cell(SOFC). Reproducible impedance spectra were confirmed using the improved cell, which consisted of LSM-YSZ/YSZ. The composite electrode of LSM and YSZ was found to yield a lower cathodic resistivity than that of the non-composite one. Also, the addition of YSZ to the $La_{1-x}Sr_xMnO_3$ ($0.1{\leq}x{\leq}0.2$) electrode led to a pronounced, large decrease in the cathodic resistivity of the LSM-YSZ composite electrodes.

고체산화물 연료전지용 공기극재료로써의 LSM-YSZ 전극 연구 (Investigations of LSM-YSZ as Air Electrode Materials for Solid Oxide Fuel Cells)

  • 이유기;김정열;이영기;박동구;조범래;박종완
    • 한국재료학회지
    • /
    • 제9권11호
    • /
    • pp.1075-1082
    • /
    • 1999
  • 50/50 vol% LSM-YSZ의 복합공기극(LSM=$\textrm{La}_{1-x}\textrm{Sr}_{x}\textrm{MnO}_{3}$(0$\leq$x$\leq$0.5))이 콜로이드 증착법에 의해 준비으며 주사전자현미경과 임피던스 분석기에 의해 연구되어졌다. 재현성있는 임피던스 스펙트럼들이 LSM-YSZ/YSZ/LSM-YSZ로 구성된 향상된 셀을 사용함으로써 얻어졌다. 이러한 셀들의 임피던스 스펙트럼들은 작동온도에 강하게 영향을 받았으며, 가장 안정된 조건은 $900^{\circ}C$에서 도달되어졌다. $900^{\circ}C$에서 공기//공기 셀에 대해 측정된 전형적인 임피던스 스펙트럼들은 2개의 불완전한 호(depressed arc)로 구성되었다. LSM전극에 대한 YSZ의 첨가는 LSM-YSZ 공기극의 저항 감소를 가져왔으며, 전해질 표면의 불순물의 영향을 제거하기 위한 연마는 공기극 저항을 더욱 감소시켰다. 또한 촉매층(Ni 혹은 Sr)을 가진 LSM-YSZ 전극은 촉매층이 없는 경우에 비해 공기극 저항의 감소를 가져왔다. LSM-YSZ 공기극 저항은 전극조성, 전해질의 형태, 인가 전류에 의해 영향을 받았다.

  • PDF