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Development of Wafer Cleaning Equipment Using Nano Bubble and Megasonic Ultrasound (나노 버블과 메가소닉 초음파를 이용한 반도체 웨이퍼 세정장치 개발)

  • Nohyu Kim;Sang Hoon Lee;Sang Yoon;Yong-Rae Jung
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.4
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    • pp.66-71
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    • 2023
  • This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×109 bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

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Seismic fragility analysis of base isolation reinforced concrete structure building considering performance - a case study for Indonesia

  • Faiz Sulthan;Matsutaro Seki
    • Structural Monitoring and Maintenance
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    • v.10 no.3
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    • pp.243-260
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    • 2023
  • Indonesia has had seismic codes for earthquake-resistant structures designs since 1970 and has been updated five times to the latest in 2019. In updating the Indonesian seismic codes, seismic hazard maps for design also update, and there are changes to the Peak Ground Acceleration (PGA). Indonesian seismic design uses the concept of building performance levels consisting of Immediate occupancy (IO), Life Safety (LS), and Collapse Prevention (CP). Related to this performance level, cases still found that buildings were damaged more than their performance targets after the earthquake. Based on the above issues, this study aims to analyze the performance of base isolation design on existing target buildings and analyze the seismic fragility for a case study in Indonesia. The target building is a prototype design 8-story medium-rise residential building using the reinforced concrete moment frame structure. Seismic fragility analysis uses Incremental Dynamic Analysis (IDA) with Nonlinear Time History Analysis (NLTHA) and eleven selected ground motions based on soil classification, magnitude, fault distance, and earthquake source mechanism. The comparison result of IDA shows a trend of significant performance improvement, with the same performance level target and risk category, the base isolation structure can be used at 1.46-3.20 times higher PGA than the fixed base structure. Then the fragility analysis results show that the fixed base structure has a safety margin of 30% and a base isolation structure of 62.5% from the PGA design. This result is useful for assessing existing buildings or considering a new building's performance.

Seismic performance enhancement of a PCI-girder bridge pier with shear panel damper plus gap: Numerical simulation

  • Andika M. Emilidardi;Ali Awaludin;Andreas Triwiyono;Angga F. Setiawan;Iman Satyarno;Alvin K. Santoso
    • Earthquakes and Structures
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    • v.27 no.1
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    • pp.69-82
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    • 2024
  • In the conventional seismic design approach for a bridge pier, the function of the stopper, and shear key are to serve as mechanisms for unseating prevention devices that retain and transmit the lateral load to the pier under strong earthquakes. This frequently inflicts immense shear forces and bending moments concentrated at the plastic hinge zone. In this study, a shear panel damper plus gap (SPDG) is proposed as a low-cost alternative with high energy dissipation capacity to improve the seismic performance of the pier. Therefore, this study aimed to investigate the seismic performance of the pre-stressed concrete I girder (PCI-girder) bridge equipped with SPDG. The bridge structure was analyzed using nonlinear time history analysis with seven-scaled ground motion records using the guidelines of ASCE 7-10 standard. Consequently, the implementation of SPDG technology on the bridge system yielded a notable decrease in maximum displacement by 41.49% and a reduction in earthquake input energy by 51.05% in comparison to the traditional system. This indicates that the presence of SPDG was able to enhance the seismic performance of the existing conventional bridge structure, enabling an improvement from a collapse prevention (CP) level to an immediate occupancy (IO).

Development and assessment of pre-release discharge technology for response to flood on deteriorated reservoirs dealing with abnormal weather events (이상기후대비 노후저수지 홍수 대응을 위한 사전방류 기술개발 및 평가)

  • Moon, Soojin;Jeong, Changsam;Choi, Byounghan;Kim, Seungwook;Jang, Daewon
    • Journal of Korea Water Resources Association
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    • v.56 no.11
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    • pp.775-784
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    • 2023
  • With the increasing trend of extreme rainfall that exceeds the design frequency of man-made structures due to extreme weather, it is necessary to review the safety of agricultural reservoirs designed in the past. However, there are no local government-managed reservoirs (13,685) that can be discharged in an emergency, except for reservoirs over a certain size under the jurisdiction of the Korea Rural Affairs Corporation. In this case, it is important to quickly deploy a mobile siphon to the site for preliminary discharge, and this study evaluated the applicability of a mobile siphon with a diameter of 200 mm, a minimum water level difference of 6 m, 420 (m2/h), and 10,000 (m2/day), which can perform both preliminary and emergency discharge functions, to the Yugum Reservoir in Gyeongju City. The test bed, Yugum Reservoir, is a facility that was completed in 1945 and has been in use for about 78 years. According to the hydrological stability analysis, the lowest height of the current dam crest section is 27.15 (EL.m), which is 0.29m lower than the reviewed flood level of 27.44 (EL.m), indicating that there is a possibility of lunar flow through the embankment, and the headroom is insufficient by 1.72 m, so it was reviewed as not securing hydrological safety. The water level-volume curve was arbitrarily derived because it was difficult to clearly establish the water level-flow relationship curve of the reservoir since the water level-flow measurement was not carried out regularly, and based on the derived curve, the algorithm for operating small and medium-sized old reservoirs was developed to consider the pre-discharge time, the amount of spillway discharge, and to predict the reservoir lunar flow time according to the flood volume by frequency, thereby securing evacuation time in advance and reducing the risk of collapse. Based on one row of 200 mm diameter mobile siphons, the optimal pre-discharge time to secure evacuation time (about 1 hour) while maintaining 80% of the upper limit water level (about 30,000 m2) during a 30-year flood was analyzed to be 12 hours earlier. If the pre-discharge technology utilizing siphons for small and medium-sized old reservoirs and the algorithm for reservoir operation are implemented in advance in case of abnormal weather and the decision-making of managers is supported, it is possible to secure the safety of residents in the risk area of reservoir collapse, resolve the anxiety of residents through the establishment of a support system for evacuating residents, and reduce risk factors by providing risk avoidance measures in the event of a reservoir risk situation.

Slope Failure Prediction through the Analysis of Surface Ground Deformation on Field Model Experiment (현장모형실험 기반 표층거동분석을 통한 사면붕괴 예측)

  • Park, Sung-Yong;Min, Yeon-Sik;Kang, Min-seo;Jung, Hee-Don;Sami, Ghazali-Flimban;Kim, Yong-Seong
    • Journal of the Korean Geosynthetics Society
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    • v.16 no.3
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    • pp.1-10
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    • 2017
  • Recently, one of the natural disasters, landslide is causing huge damage to people and properties. In order to minimize the damage caused by continuous landslide, a scientific management system is needed for technologies related to measurement and monitoring system. This study aims to establish a management system for landslide damage by prediction of slope failure. Ground behavior was predicted by surface ground deformation in case of slope failure, and the change in ground displacement was observed as slope surface. As a result, during the slope failure, the ground deformation has the collapse section, the after collapse precursor section, the acceleration section and the burst acceleration section. In all cases, increase in displacement with time was observed as a slope failure, and it is very important event of measurement and maintenance of risky slope. In the future, it can be used as basic data of slope management standard through continuous research. And it can contribute to reduction of landslide damage and activation of measurement industry.

The plan of stabilizing Gyeongnam Chung-yang Green Pepper Farm Income (경남 청양 풋고추농가 소득 안정화 방안)

  • Hwang, Min-Ji;Jeong, Ho-Jung;Cho, Jae-Hwan
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.2
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    • pp.387-396
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    • 2018
  • This study examined the instability factor of real income and net profits of Chung-yang Green Pepper Farm through an analysis of the operating costs. Furthermore, this paper suggests a plan for stabilizing the price by shipment adjustments resulting from an analysis of the price elasticity by A Linear Approximated Inverse Almost Ideal Demand System (LA/IAIDS). The income instability factor of the farm based on an analysis of the operating costs was attributed to the unexpected loading of utility expenses and collapse of the price due to oversupply at a specific point in time. On the other hand, this is insufficient to completely explain the income instability factor of Chung-yang Green Pepper Farm because a price collapse does not include the monthly price changes. An analysis of the price and scale flexibility of Chung-yang Green Pepper Farm by monthly data showed that annual farm net yield increases by 1.21% due to a 2.21% increase in price if the shipment quantity is reduced to 1% a year. In summary, a plan that supports the farm price received through declining shipments in winter is effective in stabilizing the income of farms. Because Chung-yang Green Pepper in Gyeongnam region has an especially high market share of 82.5%, the prices and income of Gyeongnam Chung-yang Green Pepper farms can be stabilized effectively if they form an association of producers around the Gyeongnam region and adjust the shipment.

Ultrastructural Changes in digestive gland and Lipofuscin Accumulation of the Equilateral Venus, Gomphina veneriformis (Bivalvia: Veneridae) on Tributyltin chloride (TBTCl) Toxicity (TBTCl 독성에 의한 대복, Gomphina veneriformis 소화선의 미세구조적 변화 및 지방갈색소 축적)

  • Park, Jung-Jun;Lee, Jung-Sick
    • The Korean Journal of Malacology
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    • v.26 no.1
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    • pp.63-78
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    • 2010
  • The purpose of this study was to investigate the effect of tributyltin (TBT) on histopathological and ultrastructural changes in the digestive gland structure of the equilateral venus, Gomphina veneriformis. Experimental period was 36 weeks. Experimental groups consist of control condition and 3 TBTCl exposure conditions (0.4, 0.6, $0.8\;TBTC\;{\mu}g\;L^{-1}$). Outer envelop of the visceral mass of G. veneriformis exposed to TBTCl was observed disappearance of microvilli and cilia, decrease of mucous cell and partially destruction of epithelium. In the digestive gland showed an increase of number of hemocyte and mucopolysaccaride near the digestive tubule at early time of the exposure. Especially, in $0.8\;TBTC\;{\mu}g\;L^{-1}$ group, collapse of digestive tubule with modification of epithelium was observed. TEM observation revealed the numerous glycogen granules in epithelium of the outer envelop and connective tissue. In the ciliated cell of the primary duct formed the cilia in cytoplasm. Basophilic cell was observed destruction of the rough endoplasmic reticulum and mitochondria. Also, nucleus in the epithelium of the digestive tubule was disappeared heterochromatin and nucleolus, and condense. As the concentration of TBTCl increased, the accumulation of lipofucin increased in the digestive gland, but the collapse of digestive tubule induced a decrease of accumulation of lipofuscin.

Risk Analysis Method for Deriving Priorities for Detailed Inspection of Small and Medium-sized Fill Dam (중소형 필댐의 정밀점검 우선순위 도출을 위한 간이 위험도 분석 방법)

  • Kim, Jinyoung;Kang, Jaemo
    • Journal of the Korean GEO-environmental Society
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    • v.21 no.10
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    • pp.11-16
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    • 2020
  • Korea's agricultural reservoir is one of the country's major infrastructures and plays an important role in people's lives. However, aging reservoirs are a risk for life and property. Currently, large and small dams and reservoirs have been constructed nationwide for more than 40 years of aging. Dams and reservoirs built nationwide are managed by various institutions. Therefore, it is difficult to manage all dams and reservoirs due to cost and time. Managers in the field with less management personnel and lack of expertise should be able to quickly identify risk factors for multiple reservoirs. In this study, risk factors such as seepage, leakage, settlement slide, crack and erosion were selected. To assess the risk of the items, we used the analytical hierarchical process (AHP), one of the Multi-Criteria Decision Making (MCDM) methods. The analysis showed that seepage has the greatest impact on reservoir collapse. It is judged that the priority of detailed diagnosis can be determined by evaluating the risk of dam reservoir collapse in a convenient way in advance using the calculated weight.

Sunken Ship Precision Image Analysis Using Multi-Beam Echo Sounding Data (다중빔음향측심 자료를 이용한 침몰선박 정밀영상 분석 연구)

  • Lee, Seung-Hyun;Seo, Young Kyo;Suh, Jae-Joon
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.22 no.7
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    • pp.863-868
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    • 2016
  • In this study, the precise shapes of sunken ships and information on seafloor topography were analyzed using data obtained from a multi-beam echo sounder. The state of each sunken ship was analyzed by processing diverse imagery data which was compared with data obtained from past investigations to determine changes in the state and circumjacent seafloor topography. Apparent changes in the seafloor topography around one sunken ship, the "Pacific Friend", were found from stern to bow as a result of continued submarine erosion and sedimentation. In the case of sunken ship "No. 7 Haeseong", the partial collapse of the bow was revealed in the seabed images captured in 2015, though it had still been intact in images captured during the Korea Hydrographic and Oceanographic Agency's investigation in 2011. This partial collapse was presumed to have resulted from the effects of continued tidal currents, the cargo load of the ship and continued corrosion of the ship over a long time on the seabed. Continuous monitoring of residual fuel inside the ship is necessary to avoid leakage and potential marine pollution. By conducting image analysis on these sunken ships, it has been determined that the structural safety of the ships is seriously influenced by tidal currents and seafloor topography, while the hulls will be continuously changed by corrosion. As a result, it can be concluded that the development of prediction and response techniques that take into consideration residual fuel leakage and environmental changes according to the geological characteristics of sunken ships is necessary.

A Study on the Numerical Analysis Methods for Predicting Strength Test Result of Box Girder under Bending Moment (휨 모멘트를 받는 박스거더 구조 강도 실험에 대한 수치해석 방법에 관한 연구)

  • Myung-Su Yi;Joo-Shin Park
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.29 no.5
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    • pp.488-496
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    • 2023
  • Ship and bridge structures are a type of long box-shaped structure, and resistance to vertical bending moment is a key factor in their structural design. In particular, because box girders are repeatedly exposed to irregular wave loads for a long time, the continuous collapse behavior of structural members must be accurately predicted. In this study, plastic collapse behavior, including buckling according to load changes of the box girder receiving pure bending moments, was analyzed using a numerical analysis method. The analysis targets were selected as three box girders used in the Gordo experiment. The cause of the difference was considered by comparing the results of the structural strength experiment with those of non-linear finite element analysis. This study proposed a combination of the entire and local sagging shape to reflect the effect of the initial sagging caused by welding heat that is inevitably used to manufacture carbon steel materials. The procedures reviewed in the study and the contents of the initial sagging configuration can be used as a good guide for analyzing the final strength of similar structures in the future.