• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.189-189
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• 2015

Plasmonics, sensor, field effect transistors, solar cells 등 다양한 적용분야를 가지는 실리콘 구조체는 제작공정에 의해 전기적 및 광학적 특성이 달라지기 때문에 적합한 나노구조 제작방법이 요구되고 있다. 나노구조체 제작방법으로는 Photo lithography, Extreme ultraviolet lithography (EUV), Nano imprinting lithography (NIL), Block copolymer (BCP) 방식의 방법들이 연구되고 있으며, 특히 BCP는 direct self-assembly 특성을 가지고 있으며 가격적인 면에서도 큰 장점을 가진다. 하지만 BCP를 mask로 사용하여 식각공정을 진행할 경우 BCP가 버티지 못하고 변형되어 mask로서의 역할을 하지 못한다. 이러한 문제를 해결하기 위하여 본 논문에서는 BCP와 질화막을 이용한 double mask 방법을 사용하였다. 기판 위에 BCP를 self-assembly 시키고 mask로 사용하여 hole 부분으로 노출된 기판을 Ion gun을 통해 질화 시킨 후에 BCP를 제거한다. 기판 위에 hole 모양의 질화막 표면은 BCP와 다르게 etching 공정 중 변형되지 않는다. 이러한 질화막 표면을 mask로 사용하여 pillar pattern의 실리콘 나노구조체를 제작하였다. 질화막 mask로 사용되는 template은 PS와 PMMA로 구성된 BCP를 사용하였다. 140kg/mol의 polystyrene과 65kg/mol의 PMMA를 톨루엔으로 용해시키고 실리콘 표면 위에 spin coating으로 도포하였다. Spin coat 후 230도에서 40시간 동안 열처리를 진행하여 40nm의 직경을 가진 PS-b-PMMA self-assembled hole morphology를 형성하였다. 질화막 형성 및 etching을 위한 장비로 low-energy Ion beam system을 사용하였다. Reactive Ion beam은 ICP와 3-grid system으로 구성된 Ion gun으로부터 형성된다. Ion gun에 13.56 MHz의 frequency를 갖는 200W 전력을 인가하였다. Plasma로부터 나오는 Ion은 $2{\Phi}$의 직경의 hole을 가지는 3-grid hole로 추출된다. 10~70 voltage 범위의 전위를 plasma source 바로 아래의 1st gird에 인가하고, 플럭스 조절을 위해 -150V의 전위를 2nd grid에 인가한다. 그리고 3rd grid는 접지를 시켰다. chamber내의 질화 및 식각가스 공급은 2mTorr로 유지시켰다. 그리고 기판의 온도는 냉각칠러를 이용하여 -20도로 냉각을 진행하였다. 이와 같은 공정 결과로 100 nm 이상의 높이를 갖는 40 nm직경의 균일한 Silicon pillar pattern을 형성 할 수 있었다.

• Korean Journal of Oriental Medicine
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• v.12 no.3 s.18
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• pp.69-77
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• 2006

Background and Purpose The purpose of this study was to confirm that what symptoms are adequated indicator in the Gi-Deficiency patients. Methods In the time period July. 2005 to Sep. 2006, 136 patients with a first-ever stroke admitted in the department of Internal Medicine of Daejeon University Oriental Medical Hospital in Daejeon city, Wonkwang Oriental Medical Hospital in Iksan, JeonJu city were included. Patients were hospitalized within 3 months after the onset of stroke. Stroke patients had been interviewed by resident who studied standard operation procedures in Fundamental Study for Standardization and Objectification of Differentiation and Pattern Identification of Syndrome of Oriental Medicine for Stroke. Gi-deficiency patients was confirmed by medical specialist diagnosis, resident diagnosis, case report form analysis without a dissenting voice. Results Gi deficiency group included 23 case, Non Gi deficiency group 47 case out of 136 patients. Fatigue, weakness purse, somnolence, low voice, difficulty of uprise, pale face, pale tongue were higher among Gi deficiency group. Gi deficiency and Non Gi deficiency patients do not significantly differ in white coating tongue, light-red tongue, poor appetite, frequent sweating, teeth printed tongue. Conclusions This study was insufficiency because sample size very small. More data from prospective cohort studies will help to Korean Standard Differentiation of the Symptoms and Signs for the stroke.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.33A no.5
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• pp.132-141
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• 1996

The pixelated phase grating has been studied as a kind of diffraction gratings splitting and input beam into multiple spots. It consists of regular size cells which produce phase delays, and each cell provokes the phase delay up to sixteen levels. We have compared and analyzed the characteristics of multi-level phase gratings, laying streess on efficiency and resulted pattern. Experimental resutls obtained form fabricated grating have been presented, and the real-time method using a liquid-crystal spatial light modulator has been demonstrated through experiments. Gratings making meams with specific intensities have been designed and optical images have been generated by them. In order to specific intensities have been designed and optical images have been genrated by them. In order to decide the phase delay of each cell, optimization conditon consists of diffraction efficiency and target values. One period of phase gratings fabricated with surface relief was less than 256${\mu}m{\times}256{\mu}m$ and size of each cell was 1${\mu}m{\times}1{\mu}m$ surface relief grating has been made by coating photoresist on the glass plate, writing information pattern by Ar laser and developing it. in the experiment for real-tiem processing liquid-crystal display of epson video projector has been used.

• Korean Journal of Materials Research
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• v.30 no.10
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• pp.550-557
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• 2020

Used in the ceramic tile market as a representative building material, relief ceramic tile is showing increased demand recently. Since ceramic tiles are manufactured through a sintering process at over 1,000 ℃ after uniaxial compression molding by loading granule powders into a mold, it is very important to secure the flowability of granular powders in a mold having a relief pattern. In this study, kaolin, silica, and feldspar are used as starting materials to prepare granule powders by a spray dryer process; the surface of the granule powders is subject to hydrophobic treatment with various concentrations of stearic acid. The effect on the flowability of the granular powder according to the change of stearic acid concentration is confirmed by measuring the angle of repose, tap density, and compressibility, and the occurrence of cracks in the green body produced in the mold with the relief pattern is observed. Then, the green body is sintered by a fast firing process, and the water absorption, flexural strength, and durability are evaluated. The surface treatment of the granule powders with stearic acid improves the flowability of the granule powders, leading to a dense microstructure of the sintered body. Finally, the hydrophobic treatment of the granule powders makes it possible to manufacture relief ceramic tiles having a flexural strength of 292 N/cm, a water absorption of 0.91 %, and excellent mechanical durability.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.6
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• pp.52-57
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• 1999

Funtional metal prototypes are often required in numerous industrial applications. These components are typically needed in the early stage of a project to determine form, fit and function. Recent R/P(Rapid Prototyping) part are made of soft materials such as plastics, wax, paper, these master models cannot be employed durable test in real harsh working environment. Parts by direct metal rapid tooling method, such as laser sintering, by now are hard to get net shape, pores of the green parts of powder casting method must be infiltrated to get proper strength as tool, and new type of 3D direct tooling system combining fabrication welding arc and cutting process is reported by song etc. But a system which can build directly 3D parts of high performance functional material as metal part would need long period of system development, massive investment and other serious obstacles, such as patent. In this paper, through the rapid tooling process as silicon rubber molding using R/P master model, and fabricate wax pattern in that silicon rubber mold using vacuum casting method, then we tranlsated the wax patterns to numerous metal prototypes by new investment casting process combined conventional investment casting with rapid pototyping & rapid tooling process. with this wax-injection-mold-free investment casting, we developed new investment casting process of fabricating numerous functional metal prototypes from one master model, combined 3-D CAD, R/P and conventional investment casting and tried to expect net shape measuring total dimension shrinkage from R/P part to metal part.

• 한국신재생에너지학회:학술대회논문집
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• 2010.06a
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• pp.84.1-84.1
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• 2010

Currently, new and renewable energy come into the spotlight, such as solar energy, wind power, fuel cell, hybrid car etc., due to the energy resource is being depleted. Especially, in order to solve like this problem, the study of solar cell manufacturing systems are being extensively researched such as vacuum process. But the major fault of the vacuum process are its expensive production price. On the order hand, Roll-to-roll printing system, the new technology of solar cell manufacturing, has low production price compare with the vacuum process. Also roll-to-roll printing system can decrease the 95% of waste water and 99.9% of harmful gasses than the vacuum process. So we addressed the roll to roll printing system for the flexible solar cell by using printing technology. This roll-to-roll printing system is comprised of various modules, such as web handling module, fine pattern printing module, dry/curing module, uniform coating module and laminating module etc.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.410.1-410.1
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• 2016

Vanadium dioxide ($VO_2$) is a well-known material that exhibits a metal-semiconductor transition at 340 K, with drastic change of transmittance at NIR region. However, $VO_2$ based thermochromics accompany with low visible transmittance value and unfavorable color (brownish yellow). Herein, we demonstrate the adjustment of visible transmittance of $VO_2$ thin film by nanosphere template assisted patterning process using sol-gel method. 2-Dimenstional honeycomb shape was varied as function of diameter of nanosphere and coating conditions. The morphological geometry of the films was investigated by FE-SEM and AFM. Result shows that inversed shape of nanosphere was formed clearly and pattern width was altered according to the bead size. This structure creates the geometrical blank area from the position of nanosphere which improves the optical transmittance at the visible region. Moreover, such patterned $VO_2$ thin film not only maintains the optical switching efficiency, but also generate the gorgeous scattering effect which presumably support the glazing application.

• Journal of the Korean Ceramic Society
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• v.52 no.4
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• pp.264-268
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• 2015

Cu films were plated in an eco-friendly electroless bath (No-Formaldehyde) on Ni/screen printed Ag pattern/PET substrate. For electroless Cu plating, we used sodium-phosphinate ($NaH_2PO_2{\cdot}H_2O$) as reducing agent instead of Formaldehyde. All processes were carried out in electroless solution of pH 7 to minimize damage to the PET substrate. According to the increase of sodium-phosphinate, the deposition rate, the granule size, and rms roughness of the electroless Cu film increased and the Ni content also increased. The electroless Cu films plated using 0.280 M and 0.575 M solutions of sodium-phosphinate were made with Cu of 94 at.% and 82 at.%, respectively, with Ni and a small amount P. All electroless Cu plated films had typical FCC crystal structures, although the amount of co-deposited Ni changed according to the variation of the sodium-phosphinate contents. From these results, we concluded that a formation of higher purity Cu film without surface damage to the PET is possible by use of sodium-phosphinate at pH 7.

• 한국생물공학회:학술대회논문집
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• 2005.04a
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• pp.570-573
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• 2005

The spray method was chiefly used to prepare alginate microspheres. Additionally due to formation at mild conditions, the alginate microspheres were coated with chitosan. The particle size of alginate microspheres increased when the sodium alginate increased. Release pattern of OVA in alginate microspheres was evaluated at PBS buffer(pH 7.4) and HCl buffer(pH 1.2). Release rate of OVA from chitosan/alginate microsphere was also lower than that with the concentration of alginate in the microspheres, the amount of OVA released from alginate microspheres increased from alginate micorsphere. Therefore, the alginate microspheres can be prepared by spray rozzle for a protein drug delivery. OVA release from the alginate microspheres was controlled by a coating with chitosan.

• KSBB Journal
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• v.24 no.6
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• pp.515-520
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• 2009

This study presented facile method of cell patterning using fabricated PDMS patterns on polyelectrolyte coated surface. This basic principle is the fabrication of functional surface presenting two orthogonal surfaces such as cell adhesive and repellent properties. Cell adhesive surface was firstly fabricated with simple coating of polyelectrolyte multilayer. And then, the desired patterns of PDMS for the prevention of nonspecific binding of cells were transferred onto the previously formed thin film of polyelectrolyte multilayer. Thus, we could prepare novel functional surface simultaneously containing PDMS and polyelectrolyte region. As expected, the PDMS regions showed effective prevention of nonspecific binding of cell and the other region, exposed polyelectrolyte area, provided cell adhesive environment. The height of formed PDMS structure was about 100 nm. Based on this method, cell patterning can be successfully obtained with various pattern shapes and sizes. Therefore, we expect that this simple method will be useful platform technology for the development of cell chip, cell based assay system, and biochip.