• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2007년도 동계학술발표대회 논문집
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• pp.600-605
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• 2007

In this study, the risk rates of different contamination sources of the Foreign material in a minienvironment were analyzed through CFD simulation. From the results, the ambient contamination sources mainly affect wafers in the FOUP, whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from Foreign materials transferred from the FFU. However, this system is unable to protect the wafers on the robot arm from internal Foreign materials and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.

• 한국입자에어로졸학회지
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• 제14권4호
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• pp.181-189
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• 2018

In this study, the risk rates of different contamination sources of the contaminant in a minienvironment were analyzed through Computational Fluid Dynamics (CFD) simulation. The airflow pattern characteristics can only predict the qualitative variation of contaminant concentration, but cannot evaluate the quantitative variations in the risk rate of sources. From the results, the ambient contamination sources mainly affect wafers in the Front Opening Unified Pod (FOUP), whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from contaminants transferred from the Fan Filter Unit (FFU). However, this system is unable to protect the wafers on the robot arm from internal contaminants and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.

• 한국화재소방학회논문지
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• 제28권3호
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• pp.29-33
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• 2014

FDS를 사용하여 대규모 클린룸에서의 화재에 대한 시뮬레이션을 수행하였다. 먼저 격자크기를 검토하여 크기가 $0.5{\times}0.5{\times}0.2m^3$인 격자를 사용하였다. 화재가 발생했을 때 온도와 가시거리, 일산화탄소의 성능위주설계 인명안전기준에 따라 안전을 확인하기 위하여 3개의 대규모 클린룸에서의 화재를 대상으로 하였다. 스프링클러가 작동하지 않는 경우에도 클린룸 모두 온도가 기준보다 낮아 안전함을 확인하였다. 또한 화재로 인한 가시거리의 감소와 일산화탄소농도도 무시할 수 있었다.

• Asian Journal of Atmospheric Environment
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• 제10권4호
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• pp.226-231
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• 2016

In order to remove fog often causes various troubles in our daily lives, the novel defog blower equipped the roller brush made of recycled horse's mane hair was developed. This work presents the overview of new defog devices and the experimental data obtained at two different kinds of defogging experiments. In the model experiment carried out at the enclosed cleanroom ($W5.9m{\times}L5.1m{\times}H2.4m$) targeted a vinyl house, fog was dissipated in less than 30 seconds in case with wind entrainment and two minutes 45 seconds in case without wind entrainment after running of the newly designed defog blower. When the demisting blower was run in a duct, it has an excellent mist sweeping qualities as well as a great removal effect for the background particles (89.5% and 65.4% scavenging rates for fine and coarse particles, respectively). It can be therefore said that the mist eliminator presented in this paper is ideal for use in the sealing space like a vinyl house and the industrial sites where required to remove both harmful mist and particle.

• 조명전기설비학회논문지
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• 제23권1호
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• pp.69-77
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• 2009

최근, LCD(Liquid Crystal Display) 산업에서 클린룸의 규모가 커짐에 따라 물류 이송 시스템인 Stocker 시스템의 사이즈가 커지고 길이가 장거리화 되고 있다. 이에 제조 업체는 생산 수율을 높이기 위해 Stocker 시스템의 전체 택타임을 줄이기 위한 방안으로 차세대 Stocker 시스템의 속도를 증가하도록 요구되어 지고 있다. 따라서 본 논문은 차세대 Stocker 시스템의 속도 증가에 대한 비접촉 전원 시스템을 제안하고 Stocker 시스템을 부하로 선정하여 장거리 및 직선구간에 동작 가능한 비접촉 전원 시스템을 제작하여 부하의 여러 운전 패턴에 따른 비접촉 전원시스템의 실증시험, 입/출력 특성 및 효율을 분석하였다.

• 대한기계학회논문집B
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• 제31권5호
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• pp.457-466
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• 2007

A numerical and experimental study on the evaluation and the prediction of cleanliness level in the mini-environment system was carried out. Using the concept of local mean air-age (LMA) and effective flow rate, the new direct method for estimating the mini-environment was developed and compared with the previous performance index of airflow pattern characteristics. It was found out that the airflow pattern analysis is a restricted method to estimate the real performance of the mini-environment. The reason is that the airflow pattern cannot predict the effect of the increment of the ventilation rate on the cleanliness level in the mini-environment. While LMA is capable of showing the effects of the contaminant accumulation caused by turbulent intensity, eddy, and the increment of the effective flow rate. This result showed that LMA is more exact and effective performance index than the previous one like the airflow pattern characteristics.

• 대한기계학회논문집B
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• 제25권12호
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• pp.1730-1738
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• 2001

This paper presents an overview of testing and analyzing field performance of a centrifugal chiller which has a rated capacity of 200 RT(703 kW). Field data of a chiller installed in the cleanroom research building of KIST has been collected far performance analysis. The operating data included start-up, shut-down, and quasi-static state where cooling capacity and compressor power consumption varied cyclically. It was found that the steady-state thermodynamic model could be applied to relate the cooling capacity and COP under quasi-static conditions. The results led to finding the required cooling load pattern and a possible energy saving method. This study provides a method of evaluating performance of a large capacity centrifugal chiller in which field test is necessary.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 동계학술발표대회 논문집
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• pp.452-457
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• 2008

We performed a study on the contaminant transfer in a clean space for the location of product and fan filter unit using computational fluid dynamics analysis. To simplify the real product moving process, three different non-moving cases regrading the locations of product were selected: no product, at the lower side, and at the upper and lower sides. And to investigate the characteristics of the contaminant transfer, the arrangement of fan filter units was varied. Local mean air-age and contaminant distribution were used as evaluation indices. From the results, the contaminant transfer to the product was the most when the products were simultaneously located at the upper and lower sides. And the contaminant was easily exhausted regardless of the location of product when the fan filter units were properly arranged at the top side of the clean space.

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.38-43
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• 2021

Permanent magnet linear synchronous motor (PMLSM) is suitable for use in cleanroom environments and have advantages such as high speed, high thrust, and high precision. If the stators are arranged in the entire moving path of the mover, there is a problem in that the installation cost increases. To solve this problem, discontinuous armature arrangement PMLSM has been proposed. In this case, the mover receives a greater detent force in the section where the stator is not arranged. When a large detent force occurs, it appears as a ripple component of the thrust during PMLSM operation. If the shape of the stator is changed to reduce the detent force, the characteristics of the back EMF are changed. Therefore, in this paper, the detent force and the harmonic components of back EMF were reduced through multi-purpose shape optimization. To this end, the FEA model was constructed and main effect analysis was performed on the major shape variables affecting each objective function. Then, the optimal shape that minimizes the objective function was derived through the response surface analysis method.

• 한국화재소방학회논문지
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• 제26권5호
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• pp.67-72
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• 2012

대규모 건축물의 화재 시뮬레이션에 사용되는 FDS의 적정 격자크기를 제시하기 위해 3개의 개구부가 있는 $20{\times}10{\times}3m^3$ 크기의 실과 $44{\times}48{\times}10m^3$ 크기의 클린룸에 대한 화재 시뮬레이션을 수행하였다. z방향 격자크기를 0.2 m로 고정하고 x, y방향의 격자크기 0.1~1.0 m(종횡비 0.5~5.0)에 대한 온도와 가시거리의 변화를 비교하였다. x, y방향 적정 격자크기는 0.5 m(종횡비 2.5) 이내이며, 1.0 m의 경우에는 오차가 큰 것으로 나타났다. 온도, 가시거리 등의 변동으로 인해 유효피난시간의 산정에 주의가 요구되고, 불가피하게 큰 격자를 사용해야하는 경우에는 격자크기에 대한 검토가 필요하며, 더 큰 격자를 사용하기 위해 격자의 종횡비에 관한 추가연구가 필요함을 확인하였다.