• 제목/요약/키워드: Cleaning Test

검색결과 393건 처리시간 0.026초

CMP 후 세정용 PVA 브러쉬의 접촉압력 분포 측정 (Contact Pressure Distribution Measurement of PVA Brush for Post CMP Cleaning)

  • 유선중;김덕중
    • 반도체디스플레이기술학회지
    • /
    • 제15권4호
    • /
    • pp.73-78
    • /
    • 2016
  • Contact pressure distribution between PVA brush and semiconductor wafer was measured by developing a test setup which could simulates the post CMP cleaning process. The test set-up used thin film type pressure sensor which could measure the pressure distribution of contact area with the resolution of $15.5ea/cm^2$. As the experimental results, it was verified that there had been severe contact pressure non-uniformity along the axis of the brush and between the adjacent projections on the brush's surface. These results should be considered when developing post CMP cleaning stage or designing the PVA brush.

A Teleoperated Cleaning Robot for a High Radioactive Environment

  • Kim, Ki-Ho;Park, Jang-Jin;Yang, Myung-Seung;Oh, Chae-Youn
    • 제어로봇시스템학회:학술대회논문집
    • /
    • 제어로봇시스템학회 2003년도 ICCAS
    • /
    • pp.849-854
    • /
    • 2003
  • The Korea Atomic Energy Research Institute has developed a teleoperated cleaning robot for use in the radioactive zone of the isolation room of the Irradiated Material Examination Facility where direct human access to the interior is strictly limited. The teleoperated cleaning robot that was designed to completely eliminate human interaction with the hazardous radioactive contaminants has five remotely replaceable submodules - a mobile module for navigation, a cleaning module for dislodging and sucking contaminated waste, a sensing module for obstacle avoidance, a collection module for storing the acquired waste, and a cover module for protecting the collection module. This cleaning robot is capable of cleaning the contaminated floor surface of the isolation room and collecting loose dry spent nuclear fuel debris and other radioactive waste fixed or scattered on the floor surface. The developed cleaning robot is operated either by a manual control or by autonomous control in conjunction with a graphical simulator, by which the human operator can monitor and intervene the robot performing cleanup tasks in the isolation room. In this paper, we present the mechanical and environmental design considerations and development of the teleoperated cleaning robot for radioactive isolation room use. We also demonstrate its mock-up performance test results from the viewpoint of a remote cleanup operation and remote maintenance.

  • PDF

배수문에서 실내모형실험에 의한 무동력 토사제거시스템의 수리 특성 (Hydraulic Characteristics of the Non-power Soil Cleaning and Keeping System by the Large-Scale Model Test at the Dike Gate)

  • 박찬근;오범환;이달원
    • 한국농공학회논문집
    • /
    • 제56권5호
    • /
    • pp.67-75
    • /
    • 2014
  • In this study, the large-scale hydraulic model test was performed to investigate the hydraulic characteristics for development of the non-power soil cleaning and keeping system at the dike gate. The outlet height, outflow number, outflow discharge, and outflow cycle were compared and analyzed. The non-power soil cleaning and keeping system was most effective at 11.2 mm in the outlet height. And then the mean outflow cycle was 1.09 sec, and the mean outflow discharge was $0.00164m^3/s$. The total outflow number increased gradually as the water level of a water tank increased, and the outlet height decreased. As a level of water tank decreased, the mean outflow cycle was lengthened, and the unit outflow discharge increased. This result showed this system was most effective. To remove the silty clay deposited in facilities, the methods of excavation, dredging, high pressure washing, etc have been applied to the tidal facilities such as land reclamation, a small size fishing port, and a harbor for maintenance. However, this is extremely cost-ineffective, whereas the non-power soil cleaning and keeping system will bring about an enormously positive economic effect. In addition, when the non-power soil cleaning and keeping system is applied to the dike gate of land reclamation, a thorough examination of the local tidal data and the careful system planning are required to prevent the disaster damage caused by flooding.

Polyethylene terephthalate 필름의 표면에너지 변화에 따른 세척성(제일보) Methacrylic acid 그라프트 PET 필름의 표면장력 (Detergency of PET Film Having Various Surface Free Energy: Part I. Surface Tension of MAA Grafted PET Film)

  • 정해운;김성련
    • 한국의류학회지
    • /
    • 제12권2호
    • /
    • pp.217-223
    • /
    • 1988
  • This study is to examine the cleaningproof by dry cleaning runs and parts(shoulder, belly, butt) of garment leathers tanned chrome. This study is composed of three methods of test; color difference test, surface view by scanning electron micrographs, mechanical properties measurement by KES-FB system. The results obtained were as follows: 1. In stiffening of parts of sample, the belly is the best degree in smoothness, fullness, softness. But that of the butt have been found to be the worst degree and to be thick. 2. In fading of parts, the shoulder is an extreme case, but the belly is the best among three parts. 3. In dry cleaning runs, the view after 3 runs has been found to be the best result. 4. The stiffening after dry cleaning 1 run have been low grade, for the sample absorb much solvent of dry cleaning. And, the fading and the decoloration are to be worse after 5 runs. Because the leather surface is affected by dry cleaning runs.

  • PDF

자탈형 콤바인의 선별모델 (Cleaning Model of Head-feeding Combine)

  • 김상헌;강화석;제임스 엠 그레고리
    • Journal of Biosystems Engineering
    • /
    • 제19권1호
    • /
    • pp.22-32
    • /
    • 1994
  • The combine harvester is considered as an important but complicated and costly machine. The appropriate size of combine has to be developed to use efficiently in Korea. But the combine is such a complicated machine that a complete design model to develop a new type is impossible without understanding the relationship between each factor. The combine capacity is generally limited by the cleaning shoe performance. So a design model for a cleaning shoe has to be developed first for the complete combine design. The objective of this research was to develop a cleaning model of head-feeding combine to predict grain separation from chaff and broken straw on a sieve. A developed physically based model can explain the situation which can happen during separation process. A test apparatus based on the field going machine was developed. The test materials were paddy rice and barley. The data obtained were analyzed by the hand and the video camera. The developed model was verified as an adequate model through the test with $R^2$ of 0.934 and 0.837. The model can be used to evaluate design and operation alternatives of combine and also applied to the automatic control of separation unit of combine with a loss monitering sensors.

  • PDF

열동력 시스템 내부 열교환 표면의 클리닝에 관한 연구 (A study of cleaning of heat transfer surface in thermal power system)

  • 한규일
    • 수산해양기술연구
    • /
    • 제51권4호
    • /
    • pp.576-582
    • /
    • 2015
  • The efficiencies of thermal power system using fossil fuel depend on heat exchangers which extract energy from the exhaust gas before it is expelled to the atmosphere. To increase heat transfer efficiency it is very important to maintain the surface of heat exchanger as clean condition. The accepted skill of cleaning of fouled surface of heat exchanger is soot blowing. A high pressure jet of air is forced through the flat surface of plate to remove the deposit of fouling. There is, however, little knowledge of the fundamental principles of how the jet behave on the surface and how the jet actually removes the deposit. Therefore, the study focuses on the measuring of cleaning area and cleaning dwell time after accumulating the simulated deposit on the flat surface. The deposit test rig was built for the study and simulated deposit material is used after measuring the physical property of the each material by shearing stress test. Much data was obtained for the analysis by the parameters change such as the different jet speed, different inner pressure and variable distance of the jet from the test rig surface. The experimental data was compared with the theoretical equation and most of the data matches well except some extreme cases.

전자·반도체용 스프레이 분사형 세정제에 대한 청정도 평가 (Cleanliness Test by Spray-Type Cleaning Agent for Electronic and Semiconductor Equipment)

  • 허효정;노경호
    • Korean Chemical Engineering Research
    • /
    • 제47권6호
    • /
    • pp.688-694
    • /
    • 2009
  • PCB의 먼지 제거용 세정제로 사용되는 스프레이형 세정제를 선정하여 이에 대한 청정도를 평가하였다. 친환경적인 대체 세정제를 채택하기 위해서는 세정제의 세정성, 환경성, 경제성을 평가하여 체계적인 선정절차에 의거하여 도입 및 적용하여야 한다. 객관적이고 효율적인 세정성 평가방법의 정립이 현시점에서 매우 중요하다. 본 연구에서는 여러 세정성 평가 방법들 중 표면관찰평가법인 SEM-EDX(Scanning Electron Microscopy/Energy-Dispersive X-ray) 분석과 적외선열화상카메라(THERMOVISION A20 model)를 이용하여 청정도를 평가하였다. CT-2770 모델의 사운드카드를 $2{\times}2cm$로 잘라내어 스프레이 세정 전과 후의 청정도를 SEM의 이미지 분석을 통해 관찰할 수 있었고 EDX의 성분분석을 통해 먼지의 제거율을 정량화할 수 있었다. 컴퓨터의 P4T-E 모델의 마더보드와 IPC-A-36 모델의 기판을 사용, 오염물로 먼지와 철가루를 사용하여 열화상카메라로 세정 전, 후의 상온과 $50^{\circ}C$ Oven에 방치된 시간의 차이에 따른 온도의 변화를 비교하였다.

스펀지 볼을 이용한 원전용 복수기 튜브 세정 시스템 개발 (Development on Cleaning System of Condenser for Nuclear Power Plant by Using Sponge Ball)

  • 이중섭;이치우
    • 한국기계가공학회지
    • /
    • 제14권6호
    • /
    • pp.21-26
    • /
    • 2015
  • This study presents a development of the cleaning system in a nuclear power plant condenser. The tube cleaning system is very important equipment in a power plant condenser. Specially, removal of the fouling is a key process in the condenser tube. The objective of this study is development of a ball collector system for cleaning a condenser by using a sponge ball. This study uses CFD in order to optimize design of the ball strainer screen. Through the CFD, the implication of the ball strainer screen for static pressure distribution is examined. Results of research, this study have developed a 1/5 scale model for application to the power plant and developed a performance test equipment.

청소용 로봇의 성능평가 자동화를 위한 Testbed 개발 (Testbed development for automation of performance evaluation to cleaning robot)

  • 신익상;문승빈;박광호;남상현;장순필;지완일
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2005년도 춘계학술대회 논문집
    • /
    • pp.1024-1027
    • /
    • 2005
  • This paper describes the performance index of mobile robot and development of testbed which is used to evaluate the index. The developed testbed has rectangular structure similar to a living room of home. It is semi-automation testbed system for evaluation of cleaning performance index. This system is composed with scattering and cleaning equipment of test materials, equipment rifting of objects in inner space and sides itself, vision processing system. To be consistent of performance evaluation of cleaning robot, we make use of camera in this system for the sake of measurement of robot s mobility, path and suction quantity.

  • PDF

광전자방출(OSEE)법을 이용한 세정성 평가 연구 (A Study on the Evaluation of Cleaning Ability Using Optically Stimulated Electron Emission Method)

  • 민혜진;신진호;배재흠
    • 청정기술
    • /
    • 제14권2호
    • /
    • pp.95-102
    • /
    • 2008
  • 친환경적인 대체 세정제를 채택하기 위해서는 세정제의 세정성, 환경성, 경제성을 평가하여 체계적인 선정절차에 의거하여 도입 적용하여야 하며 객관적이고 효율적인 세정성 평가방법의 정립이 현시점에서 매우 중요하다. 따라서 본 연구에서는 여러 세정성 평가 방법들 중 광전자방출법(optically stimulated electron emission)(OSEE)을 활용한 세정성 평가에 관한 연구를 하였다. 실험에 사용된 오염물은 플럭스, 솔더, 그리스, 절삭유, 그리고 그리스 35%와 절삭유 65%을 혼합하여 만든 혼합 오염물로서 세정제에 의한 이들의 세정성을 평가하였다. 본 연구실에서 개발하였거나 조제한 세정제를 이용하여 세정 후 OSEE법 측정 결과와 중량법 및 접촉각측정법에 의한 세정성 평가방법을 비교 분석하였다. 본 연구 결과로 플럭스와 혼합오염물을 세정한 경우의 OSEE 세정효율은 중량법과 거의 유사한 결과를 나타내었지만, 솔더와 그리스 세정의 경우는 UV를 반사 또는 흡수하여 중량법과 비교할 수 없었다. 그리고 절삭유 세정의 경우 실질적으로 눈에 보일 정도로 피세정물 표면에 오염물이 남아 있음에도 불구하고 중량법 측정 시 100%의 세정효율을 보임으로써 중량법 측정의 한계를 보였지만 OSEE법으로는 미소잔류 절삭유의 존재를 측정할 수 있었다. 또한 OSEE법과 접촉각측정법의 세정성을 비교측정한 결과로 플럭스, 혼합 오염물 그리고 절삭유의 세정성 평가는 OSEE법과 접촉각측정법이 유사한 세정효율을 보여주었다. 그리고 솔더와 그리스 세정은 접촉각측정법이 OSEE법보다 더욱 정밀하게 세정성을 평가할 수 있는 것으로 판단되었다.

  • PDF