• 제목/요약/키워드: Cleaning Device

검색결과 165건 처리시간 0.024초

New SMOLED Deposition System for Mass Production

  • Lee, J.H.;Kim, C.W.;Choi, D.K.;Kim, D.S.;Bae, K.B.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.407-410
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    • 2003
  • We will introduce our new concept deposition system for SMOLED manufacturing in this conference. This system is designed to deposit organic and metal material to downward to overcome the limit of substrate size and process tact time hurdle for OLED mass production, and is organized with organic deposition chamber, substrate pre-cleaning chamber, metal deposition chamber and encapsulation system. These entire process chambers are integrated with linear type substrate transfer system. We also compare our new SMOLED manufacturing system with conventional vacuum deposition systems, and show basic organic thin film property data, organic material deposition property data, and basic device property.

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GaAs/AlxGa1-xAs 이차원 전자계 기반 양자소자의 Switching Noise 억제 (Suppression of Switching Noise in a Quantum Device Based on GaAs/AlxGa1-xAs Two Dimensional Electron Gas System)

  • 오영헌;서민기;정윤철
    • 한국진공학회지
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    • 제21권3호
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    • pp.151-157
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    • 2012
  • GaAs/$Al_xGa_{1-x}As$ 이차원 전자계는 양자점, QPC (quantum point contact), 전자 간섭계 등 다양한 형태의 양자구조 제작에 널리 사용된다. 하지만 일반적으로 GaAs 기반 양자소자는 극저온에서 소자의 전도도가 시간에 따라 변하거나 두 가지의 전 상태 사이를 왔다 갔다 하는 random telegraph noise 때문에 소자의 동작 특성이 상당히 불안하다. 이러한 문제점을 해결하기 위하여 산소 플라즈마를 이용한 소자의 표면처리가 소자의 안정성에 미치는 영향을 연구하였다. 이를 통해 소자의 표면을 산소 플라즈마를 이용하여 50 W~120 W 사이의 출력으로 30 초간 처리한 후 HCl : $H_2O$ (1 : 3) 용액을 이용하여 10초간 습식식각한 경우 전도도의 안정성이 매우 향상됨을 알 수 있었다.

KSTAR 토카막 장치 진공 기술 현황 (Status of vacuum technique in KSTAR)

  • 김광표;김현석
    • 진공이야기
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    • 제4권1호
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    • pp.16-23
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    • 2017
  • Recently, KSTAR, Korea's superconducting fusion energy research and development device, has succeeded in driving the high performance plasma for 70 seconds for the first time in the world. Continuous plasma operation technology is an essential factor for commercialization of fusion energy power generation. Therefore, this achievement is expected to play a major role in the research of fusion technology required for future fusion power plants. In order to operate the KSTAR, the discharge process in which the neutral gas is turned into the plasma should be preceded in the start-up (breakdown) phase of tokamak operation. This process essentially involves the vacuum environment in the tokamak device. KSTAR has successfully operated a vacuum pumping system to achieve the target level of the vacuum environment through a high temperature baking operation, a discharge cleaning process and boronization.

가속기 저장링 삽입장치 진공 챔버의 용접 (The welding Characteristics of the Insertion Device Vacuum Chamber of PLS Storage Ring)

  • 최만호;한영진;김창균;정진화;권영각
    • Journal of Welding and Joining
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    • 제17권4호
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    • pp.32-38
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    • 1999
  • PAL(Pohang Accelerator Laboratory) designed and manufactured a 5m-long straight vacuum chamber to adopt U7 undulator that is the first insertion device. Top and bottom plates of the vacuum chamber were made of Al alloy A5083-H321, and welded together by the GTAW welding. The leak rate is less than 1×{TEX}$10^{-10}${/TEX} torr·ℓ/s with negligible welding deformation. The pressure has been maintained below {TEX}$10^{-10}${/TEX} torr after installation. This paper reports the welding process and the method applied to achieve ultimate vacuum performance and t satisfy integrity of welds.

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공기 청정지역(Class 100 이하)에 적합한 정전기 제거장치의 개발 및 특성에 관한 연구(I) - LCD 제조 공정을 중심으로 - (A Study for Development and Characteristics of Electrostatic Eliminator Suitable for the Super Clean Room Less than Class 100(I))

  • 정용철;박훈규;이동훈
    • 한국안전학회지
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    • 제21권4호
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    • pp.60-65
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    • 2006
  • It is a well known fact that LCD is a central part of the IT industry which is important in the present and the future. But the biggest problem of LCD manufacturing is maintaining a cleaning room environment and administration. Therefore the purpose of this study is to first, prevent the yield depreciation and damage of products, and second, protect the worker ftom accidental electrostatic discharge during LCD manufacture. The soft x-ray ionizer is a type of electrostatic reducer device. It protects against electrostatic discharge in the cleaning room environment and is a necessary environmental factor during LCD production. The positive aspects of the soft x-ray are its shorter time and wider angle of exposure. But the negative aspect of the soft x-ray is its need for several shielding of protection from the harmful x-ray exposure. On this study, the development of the Air Nozzle-type ionizer to amend and refine some problems. For example, examined the electrostatic reduce device of a soft x-ray type and discovered the ion did not go inside well. also workers to be free from danger. An Air Nozzle-type ionizer is comprised of soft x-ray radiation and ionized air production. Air is injected through the nozzle after being ionized from radiation. It supplies air keeping the same pressure into the end foundation of ion production. The soft x-ray is the structure which radiates ionized air through the nozzle (21 holes) having micro holes of the ionizable radiation after ionizing the inside air by the ion production. A worker does not need a cover to protect against x-rays and the Air Nozzle-type ionizer is easy to set up and is more effective at eliminating electrostatic.

레이저 혼탁도 모니터링을 통한 공기청정 특성에 관한 연구 (A study on characteristic of the smoke removal of an air cleaner by monitoring of turbidity with laser)

  • 김수원;박종웅;정종한;정현주;이유수;전진안;김희제
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1698-1700
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    • 2003
  • The electrostatic precipitator(ESP) is a device for removing particulate pollutants in the form of either a solid (dust or fumes) or a liquid (mist) from a gas using an electrostatic force, Electrostatic precipitation has been widely used for cleaning gas from almost all industrial processes with a medium to large gas volume(>2,000 $m^3/min$), including utility boilers, blast furnaces, and cement kilns. ESP is also in wide use for air cleaning in living environments (home, offices, hospitals, etc.) ESP has large advantages over other particulate control device : a low operating cost, a high collection performance, and ease of maintenance. The purpose of this study is to investigate the characteristics of the smoke removal of an air cleaner by adjusting variable frequency and monitoring of turbidity three results of this research are as follows ;the first is the best efficient switching frequency which is 60Hz, the second is the smoke removal time which is obtained to 9 seconds, third is that the best efficient firing angle is $90^{\circ}$ As a result, the switching trigger frequency and SCR gate firing angle is very important factor to predict the best collection efficiency.

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원자력 제염에서 $CO_2$ 기술 응용 (A pplication of $CO_2$ Technolgy in Nuclear Decontamination)

  • Park, K.H.;Kim, H.W.;Kim, H.D.;Koh, M.S.;Ryu, J.D.;Kim, Y.E.;Lee, B.S.;Park, H.T.
    • 한국표면공학회지
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    • 제34권1호
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    • pp.62-67
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    • 2001
  • Green technology is being developed up to a point that is feasible not only in an environmental sense, but also in an economical viewpoint. This paper introduces two case studies that applied $CO_2$ technology into nuclear industry. 1) Nuclear laundry : A laundry machine that uses liquid and supercritical $CO_2$ as a solvent for decontamination of contaminated working dresses in nuclear power plants was developed. The machine consists of a 16 liter reactor, a recovery system with compressors, and storage tanks. All $CO_2$ used in cleaning is fully recovered and reused in next cleaning, resulting in no production of secondary nuclear waste. Decontamination factor is still lower than that in the methods currently used in the plant. Nuclear laundry using $CO_2$ looks promising with technical improvements-surfactants and mechanical agitation. 2) $CO_2$ nozzle decontamination : An adjustable nozzle for controlling the size of dry ice snow was developed. Using the developed nozzle, a surface decontamination device was made. Human oils like fingerprints on glass were easy to remove. Decontamination ability was tested using a contaminated pump-housing surface. About 40 to 80% of radioactivity was removed. This device is effective in surface-decontamination of any electrical devices like detector, controllers which cannot be cleaned in aqueous solution.

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가변식 직선 트랩 양변기 시스템에 관한 고찰 (A study on the water saving device using a variable position straight trap in a water closet system)

  • 서기원;원영재;이영호
    • 대한설비공학회:학술대회논문집
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    • 대한설비공학회 2009년도 하계학술발표대회 논문집
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    • pp.465-470
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    • 2009
  • This study investigated the water saving technology for the toilet stool system in a water closet. Since in 21st century water would be the prospected factor to measure the wealth of a country instead of the oil, water saving technologies in the toilet stool in a closet system is getting more important than the cleaning stool and the reducing noise performances. According to the statistics in Korea the percentage of using water in toilet is about 27% to the total amount of water used. Therefore, this study theoretically approached the possible amount of water saving and suggested the new variable position straight trap device in the toilet stool system.

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회전 퀵커플러 안전장치 동작방법 연구 (A study on the operation method of safety device of rotating quick coupler)

  • 송종원;송칠성
    • Design & Manufacturing
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    • 제15권1호
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    • pp.8-13
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    • 2021
  • Excavators are construction machines used for digging soil, transporting soil, dismantling buildings and clearing the ground at construction sites. There are various attachments attached to the arm end of the excavator and used for various operations. There are the most common types of buckets attached for excavation and other types of attachments used for foresting, road cleaning, snow removal, and waste disposal. When multiple types of work are done at the same time, several attachments must be replaced and a device called a quick coupler is used to reduce replacement time. Although a quick coupler reduces the replacement time of the Attachment, it is necessary to attach safety devices to prevent unintentional detachment of attached attachments during the operation. To prevent the attachment from leaving or falling regardless of the operator's intention, support is installed in the hook of the bucket pin and controlled through a separate hydraulic cylinder to ensure safety. When attaching an attachment, it shall be attached without any action. This study is intended to verify the design validity of safety devices to prevent falls of attachments occurring at construction sites.

EMPLUX Collector에 의한 토양 오염 가스 조사 (Soil-Vapor Survey on Soil-Remediation by EMPLEX Collector)

  • 김정성
    • 한국환경과학회지
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    • 제17권1호
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    • pp.119-128
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    • 2008
  • Laboratory analytical results of 22 sets of hydrophobic adsorbent coils containing surface soil-vapor and two soil samples collected by conventional intrusive method from each boring location at two active dry cleaning facilities in the State of Illinois, U.S.A, were presented to evaluate the performance of soil-vapor survey. The most critical factor to determine the effectiveness of soil-vapor survey is the distance from the soil-vapor sampling device to the actual contamination, which is a function of soil porosity, permeability, primary lithology, and other geological and hydrogeological site-specific parameters. Also this factor can be affected by the history of contaminant-generating operations. The laboratory analytical results in this study showed longer dry cleaning operation history (i.e., 50 years) and presence of fine sand at the beneath Site B allow the contaminants to migrate farther and deeper over a fixed time compared to Site A(i.e., 35 years and silty clay) so that the soil-vapor survey is not likely the most effective environmental site investigation method alone for Site B. However, for Site A, the soil-vapor survey successfully screened the site to identify the location reporting the highest soil concentration of chlorinated solvents.