• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.5 no.1
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• pp.55-64
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• 1993

A numerical investigation has been carried out for the two-dimensional flow and pressure characteristics in a clean room equipped with two kinds of filters and four access panels. The distributed pressure resistance concept was applied to describe the momentum loss in filters and access panels. As a result, the velocity profile in the clean room became rather smooth by the presence of access panels. Furthermore, the average pressure drop of each access panel reached the same value so that the ratio of the flow rate should be the same at any zone. The closing of an access panel with maintaining the other access panels being opened had influenced on the velocity distribution in lower two thirds of left half space of the clean room.

• Journal of the Korea Institute of Building Construction
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• v.3 no.2
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• pp.103-110
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• 2003

In the early 1990's the clean room system was a new trend of the operating room. This is the concept using in seminconductor plants. That is what the space around the operating table so clean as it remove contaminations with circulation of interior air. These articles describe the standard of interior construction and drawing details.

• Journal of Institute of Control, Robotics and Systems
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• v.17 no.6
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• pp.566-572
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• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.1
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• pp.65-72
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• 2002

Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.11
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• pp.635-639
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• 2000

In this paper, a new idea about ultra-clean aligning and mounting method of FED spacers was introduced. The glass-to -glass electrostatic bonding process was employed in order to bond the micro-structures of spacers to black matrix area formed on an FED anode substrate. It is possible to get adhesive-free bonding interface and well-aligned spacer array on an FED anode substrate with a ${\pm}5{\mu}m$ accuracy. Finally, I inch-sized FED panel was demonstrated to make sure of its applicability to FED panel fabrication.

• Journal of the Speleological Society of Korea
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• no.89
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• pp.27-33
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• 2008

Solar energy is most green and clean, unlimited and sustainable energy source on the earth. It is almost 97% of imported consumer energy in Korea. Because of resource poor nation, it is necessary to do their best to make alternative energy to allot their deficiency of the matter in hand of energy resources of petroleum. In a point of view of this problems, the natural solar energy should be improved by any methods as much, possible as we need. Photovoltaic generation with solar tracking system for obtaining optimal power is one of most benefit equipment to improve power of solar-cell panel producing clean electric power efficiently. Solar tracker is a device for orienting a solar photovoltaic panel toward the sun perpendicularly to sunlight, especially in widely separated place. For this reason, we are very interested in developing the equipment system of tracker, specially in solar cell applications, obtaining a high degree of accuracy to ensure that the optimal sunlight could be directed precisely against to the powered device. As a result, it was obtained of 12.46 volts at 90$^\circ$toward solar panel and 9.44 volts at 45$^\circ$, furthermore, improved efficiency more than 30% of average output voltage between tracker system (12.41V) and fixed system (8.55V), respectively. It is also very useful for optimum power system of widely separated cave.

• Korean Journal of Materials Research
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• v.18 no.5
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• pp.247-252
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• 2008

A laser glass cutting system using a femto-second laser was evaluated for Flat Panel Display (FPD) glass. A theoretical analysis of the ablation threshold and depth is described using an explicit analytic form. Experiments for clean and deep grooves were performed using a 3W femto-second laser, and the relationships between the input energy and the scribing depth as well as the threshold energy are presented. Mechanical breaking after the scribing process was carried out and the results are compared with a theoretical method. It was found that a two-sided LCD panel glass can be cut clearly using the laser cutting method. The methodology was found to be very effective as a mass-production cutting system.

• Clean Technology
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• v.16 no.2
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• pp.103-116
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• 2010

It has been reported that the LCD panel market in the FPD industry is become growing and its panel size and production capacity are increasing, and its manufacturing technique is improved every year. FPD manufacturing process requires high cleanliness in its overall process. Especially, FPD cleaning process which accounts for 30~40% of total manufacturing process is very important in its technological and productivity aspects. It is difficult to remove residual liquid-crystal in the fine gap after liquid-crystal injection process in the cell. In this study, aqueous cleaning agents with excellent cleaning, rinsing, and penetrating abilities, but minimum ion content for LCD panel were formulated through mixing glycol ether-type and glycol dimethyl ether-type solvents and nonionic surfactants which are widely used as raw materials for alternative cleaning agents because of environmental regulation at home and abroad. And the formulated cleaning agents were applied to clean FPD liquid crystal after its injection in the cell. Physical properties, cleaning efficiencies, and rinsabilities of the formulated cleaning agents with different combination ratios of solvents, surfactants and additives were measured. As experimental results, the formulated cleaning agents showed higher wetting indices and cloud point than the traditional commercial cleaning agent. And it was found that cleaning efficiencies of the formulated cleaning agents were influenced by the structure of main solvents in them and the types of liquid crystal as soil for cleaning. The best cleaning agents among the formulated cleaning agents showed similar cleaning efficiencies and better rinsabilities compared to the conventional cleaning agent.

• Journal of the Semiconductor & Display Technology
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• v.8 no.4
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• pp.71-76
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• 2009

The clean non-contact type conveyor system for vertical transfer of large size FPD(Flat Panel Display) glasses has been installed at FPD production line just since a few years ago. The most important part of the conveyor is the 3 axis permanent magnet rollers faced orthogonally in pairs. However, the systematic design method about it has not been proposed yet. In this paper, we studied a design analysis for determining geometrical parameters of the magnetic roller by using a commercial FEM tool of the 3D Maxwell. Through a series of simulation, we obtained the relationship of several geometrical parameters affecting the torque of the conveyor.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1507-1512
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• 2009

Flow field in a roller conveyor system, induced from the movement of a cassette in which glasses for flat panel display are loaded, is numerically studied in this paper. Contamination on the glass surface by dust particles produced from mechanical friction between roller and cassette is predicted from the analysis results of flow fields. Results show that a large swirl flow is formed under the moving cassette with constant speed. This swirl flow is confined only under the cassette because two main streams from the backward and the fan filter unit on the top ceiling are sufficiently strong. Therefore, it can be said that possibility of the contamination by the particles originated from the friction is relatively low. It is also revealed that flow direction between glass plates is changed according to the speed of the cassette movement due to the shear force of glass plates.