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http://dx.doi.org/10.3740/MRSK.2008.18.5.247

Femto-Second Laser Glass Cutting for Flat Panel Display  

Kim, Kwang-Ryul (Department of Electronics & Computer Engineering, Hanyang University)
Publication Information
Korean Journal of Materials Research / v.18, no.5, 2008 , pp. 247-252 More about this Journal
Abstract
A laser glass cutting system using a femto-second laser was evaluated for Flat Panel Display (FPD) glass. A theoretical analysis of the ablation threshold and depth is described using an explicit analytic form. Experiments for clean and deep grooves were performed using a 3W femto-second laser, and the relationships between the input energy and the scribing depth as well as the threshold energy are presented. Mechanical breaking after the scribing process was carried out and the results are compared with a theoretical method. It was found that a two-sided LCD panel glass can be cut clearly using the laser cutting method. The methodology was found to be very effective as a mass-production cutting system.
Keywords
Femto-Second Laser; Laser Glass Cutting; Flat Panel Display;
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Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 1
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1 K. R. Kim, Kor. J. Mater. Res., 17(7), 352 (2007)   과학기술학회마을
2 C. -H. Tsai and H. -W. Chen, Int. J. Adv. Manuf. Technol., 23, 342 (2004)   DOI
3 M. D. Perry, B. C. Stuart,, P. S. Banks, M. D. Feit, V. Yanovsky and A. M. Rubenchik, J. Appl. Phys., 85, 6803 (1999)   DOI   ScienceOn
4 J. Hassaun, Laser Focus World, 35, 86 (1999)
5 H. Y. Zheng and T. Lee, J. Micromech. Microeng., 15, 2093 (2005)   DOI   ScienceOn
6 V. I. Kondrashov, L. A. Shitova, V. A. Litvinov and V. V. Surkov, Glass and Ceramics, 58, 9 (2001)
7 J. Cheng, M. Yen, C. Wei, Y. Chuang and T. Young, J. Micromech. Microeng., 15, 1147 (2005)   DOI   ScienceOn
8 K. S. -Tinten, J. Bialkowski, A. CAvalieri, M. Boing, H. Schuler and D. V. Linde, Proc. SPIE 3343, 47 (1998)
9 E. G. Gamaly, A.V. Rode, and B. L. Davies, Phys. Plasmas, 9, 949 (2002)   DOI   ScienceOn