• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.14-20
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• 2023

The electrostatic chuck is a technology that uses electroadhesion to attach objects and is widely used in semiconductor and display processes. This research conducted Maxwell by varying parameters to examine the distribution and variations of chucking force in a bipolar-type ESC. The parameters that were changed include the material properties of the dielectric layer and attachment substrate, applied voltage to the electrode, and the gap and width between the electrodes. The analysis results showed that as the relative permittivity of the dielectric layer and substrate increased, the chucking force also increased, with the relative permittivity of the substrate having a greater impact on the chucking force. And increasing the applied voltage led to an increase in both the chucking force and its rate of change. Lastly, as the gap between the electrodes increased, the chucking force rapidly decreased until a certain distance, after which the decrease became less significant. On the contrary, increasing the electrode width resulted in a rapid increase in the chucking force until a certain width, beyond which the increase became less pronounced, eventually converging to a chucking force of 1700 Pa. This paper is expected to have high potential for the development and research of ESC for OLED deposition.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 춘계학술대회 논문집
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• pp.135-142
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• 1998

The performances of cutting process is mostly affected by the characteristics of closed loop system constructed with machine tool structure, work piece and tools. The chucking system is very important component in this system to hold work piece correctly in various static and dynamic load condition. Therefore, chucking force and accuracy must be considered carefully, from these reason, this paper describes the stability of chucking system which preserve high stiffness and accuracy of machine tool system.

• 한국생산제조학회지
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• 제18권5호
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• pp.462-468
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• 2009

In this study, a workpiece-chucking device that generates a chucking force from a shape memory alloy is introduced. This paper first presents train procedure to transform a commercial one-way shape memory alloy into a two-way shape memory alloy, which makes unclamping mechanism of the chucking device simpler than that using the one-way shape memory alloy Second, it describes a conceptual design of the workpiece-chucking device using the two-way type shape memory alloy. Third, it presents a prototype and its chucking characteristics, such as time-response of clamping/unclamping operations and a relationship between temperatures and chucking forces. Finally, it describes a mill-machining test conducted with the prototype. The results confirm that the proposed workpiece-chucking device is feasible for micro machine-tools.

• 대한기계학회논문집A
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• 제26권1호
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• pp.15-22
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• 2002

This paper introduces a compensating system for machining error, which is resulted from chucking with separated jaws. In machining the chucked cylindrical workpiece, the deterioration of machining accuracy, such as out-of-roundness is inevitable due to the variation of the radial compliance of the chuck workpiece system which is caused by the position of jaws with respect to the direction of the applied force. To compensate the chucking compliance induced error, firstly roundness profile of workpiece due to chucking compliance after machining needs to be predicted. Then using this predicted profile, the compensated tool feed trajectory can be generated. And by synchronizing the cutting tool feed system with workpiece rotation, the chucking compliance induced error can be compensated. To satisfy the condition that the cutting tool feed system must provide high speed and high position accuracy, brushless linear DC motor is used. In this study, firstly through the force-deflection experiment in workpiece chucked lathe, the variation of radial compliance of chuck workpiece system is obtained. Secondly using the mathematical equation and cutting experiment result, the predicted profile of workpiece and its compensation tool trajectory are generated. Thirdly the configuration of compensation system using linear motor is introduced, and to improve the system performance, PID controller is designed. Finally the tracking performance of system is examined by experiment. Through the real cutting experiment, roundness is significantly improved.

• 한국정밀공학회지
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• 제8권4호
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• pp.126-136
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• 1991

In order to reduce the possibilities of personnel injuries and damages to machines and to obtaim higher efficiency and machining accuracy in the manufacturing system, the chucking technology has recentry become important. The chucking technology of work greatly affects both the grometrical accuracy and fonctional performance of the workpiece. In this study, the dynamic gripping force of a 3-jaw power chuck is investigated on the factors of the shape of jaw and the shape of workpiece. From this investigation, the following observations are obtained. 1) The higher stiffness of workpiece is, the higher decrease of dynamic gripping force is. 2) The nearer to the root of jaw is, the higher decrease of dynamic gripping force is. 3) The centrifugal force of affectting the decrease of dynamic gripping force has to be considered in the centrifugal force of affecting jaw.

• 한국생산제조학회지
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• 제8권5호
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• pp.90-95
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• 1999

Chucking for workpieces is very important for productivity and efficiency in lathe operations. In point of productivity top jaws of the chuck should be changed as quickly as possible in order to reduce idle times wherever workpieces are regripped. A quick change power chuck which can change top jaws quickly by using a jaw change handle without any assembly/disassembly processes of screws is analyzed for this study. strength and stiffness of top jaws by centrifugal force are considered for the design. Structural analysis for the chuck is executed and the finite element method is introduced using MSC/NASTRAN software. Also, the performance of the chuck is evaluated by experiments.

• 반도체디스플레이기술학회지
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• 제1권1호
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• pp.9-13
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• 2002

A polyimide-type electrostatic chuck (ESC) was fabricated for the application of holding 8-inch silicon wafers in the oxide etching equipment. For the fabrication of the unipolar ESC, core technologies such as coating of polyimide films and anodizing treatment of aluminum surface were developed. The polyimide films were prepared on top of thin coated copper substrates for the good electrical contacts, and the helium gas cooling technique was used for the temperature uniformity of the silicon wafers. The ESC was essentially working with an unipolar operation, which was easier to fabricate and operate compared to a bipolar operation. The chucking force of the ESC has been measured to be about 580 gf when the applied voltage was 1.5 kV, which was considered to be enough force to hold wafers during the dry etching processing. The employment of the ESC in etcher system could make 8% enhancement of the wafer processing yield.

• 한국자기학회지
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• 제26권2호
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• pp.55-61
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• 2016

본 논문에서는 설계변수 변화에 따른 특성을 빠른 시간 내에 파악할 수 있는 등가자기회로법(equivalent magnetic circuit method)을 활용하여 콜레노이드(colenoid) 타입의 선형 액츄에이터 설계 알고리즘을 제시하였다. 우선 선형 액츄에이터의 중요치수가 결정되면 등가자기회로법에 의해 슬롯 폭 비율 및 인가전류에 따른 클램핑력으로 파라미터 맵(parameter map)을 완성하고 이를 활용하여 효율적인 슬롯 폭 비율을 결정하였다. 또한 최대 클램핑력(clamping force)을 얻기 위해 극 폭 조절 알고리즘을 수행하여 최적의 극 폭 치수를 선정하였으며 이를 바탕으로 인가전류에 따른 클램핑력을 계산하여 40 kN 이상 출력하기 위한 최적의 극 수, 극 폭 치수 및 인가전류를 결정하였다. 제안된 설계 알고리즘은 최적설계 방법인 반응표면법(response surface method)과 비교하여 제안한 설계 알고리즘의 타당성을 검증하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.89-94
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• 2001

A cylindrical capacitance-type spindle displacement sensor was designed and tested in the hard turning as a way to develop a sensor that can estimate cutting forces without using a tool dynamometer. The displacement sensor was installed between the face of spindle cover and the chucking element, and measured pure radial motion of the spindle. Ceramic inserts and tool steel workpieceof 65 Rc were used during the hard turning tests. The signals from the sensor showed the same pattern of cutting force variations as those from the tool dynamometer. The research results showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to estimate cutting forces.

• 한국공작기계학회논문집
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• 제11권2호
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• pp.17-23
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• 2002

A cylindrical capacitance-type spindle displacement sensor was developed and its effectiveness as a system to monitor cutting forces during hard turning was tested in this research. The sensor was installed between the face of spindle cover and the chucking element and measured pure radial motion of the spindle under the condition with presence of roundness error at measured surface. To prove the effectiveness of the developed system hard aiming tests using ceramic inserts and tool steel as workpiece were conducted. The workpiece was hardened up to 65 Rc. The variations of pure radial motion of the spindle ware measured during the cutting tests. The signals from the sensor showed the same pattern of cutting force variations from the tool dynamometer due to the progress of tool wear. As the flank wear of the ceramic tool increased both static component of cutting forces and the amount of center shift of spindle orbit increased, Results from the research showed that the developed sensor could be utilized as an effective and cheap on-line sensing device to monitor cutting conditions and tool performance in the un-manned machining center.