• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.18 no.5
• /
• pp.462-468
• /
• 2009

In this study, a workpiece-chucking device that generates a chucking force from a shape memory alloy is introduced. This paper first presents train procedure to transform a commercial one-way shape memory alloy into a two-way shape memory alloy, which makes unclamping mechanism of the chucking device simpler than that using the one-way shape memory alloy Second, it describes a conceptual design of the workpiece-chucking device using the two-way type shape memory alloy. Third, it presents a prototype and its chucking characteristics, such as time-response of clamping/unclamping operations and a relationship between temperatures and chucking forces. Finally, it describes a mill-machining test conducted with the prototype. The results confirm that the proposed workpiece-chucking device is feasible for micro machine-tools.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 1998.03a
• /
• pp.135-142
• /
• 1998

The performances of cutting process is mostly affected by the characteristics of closed loop system constructed with machine tool structure, work piece and tools. The chucking system is very important component in this system to hold work piece correctly in various static and dynamic load condition. Therefore, chucking force and accuracy must be considered carefully, from these reason, this paper describes the stability of chucking system which preserve high stiffness and accuracy of machine tool system.

• Journal of the Semiconductor & Display Technology
• /
• v.22 no.3
• /
• pp.14-20
• /
• 2023

The electrostatic chuck is a technology that uses electroadhesion to attach objects and is widely used in semiconductor and display processes. This research conducted Maxwell by varying parameters to examine the distribution and variations of chucking force in a bipolar-type ESC. The parameters that were changed include the material properties of the dielectric layer and attachment substrate, applied voltage to the electrode, and the gap and width between the electrodes. The analysis results showed that as the relative permittivity of the dielectric layer and substrate increased, the chucking force also increased, with the relative permittivity of the substrate having a greater impact on the chucking force. And increasing the applied voltage led to an increase in both the chucking force and its rate of change. Lastly, as the gap between the electrodes increased, the chucking force rapidly decreased until a certain distance, after which the decrease became less significant. On the contrary, increasing the electrode width resulted in a rapid increase in the chucking force until a certain width, beyond which the increase became less pronounced, eventually converging to a chucking force of 1700 Pa. This paper is expected to have high potential for the development and research of ESC for OLED deposition.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.17 no.2
• /
• pp.58-64
• /
• 2008

The cutting process of materials is accompanied with the elastic and plastic deformation due to chucking forces in the boring process of thin holes on the turning. Upon removal of chucking forces at the end of process, the original shape is remained in the plastic deformation; on the other hand, it is modified in the elastic deformation due to spring back. Fixing materials by chucks on the turning has influence on roundness because the process is conducted with unbalanced distribution load induced from the fixing of three jaws. Moreover, the amount of spring back depends on the magnitude of fixing forces. We studied the change of roundness according to fixing forces as well as the method to reduce the influence of chucking forces.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.26 no.1
• /
• pp.15-22
• /
• 2002

This paper introduces a compensating system for machining error, which is resulted from chucking with separated jaws. In machining the chucked cylindrical workpiece, the deterioration of machining accuracy, such as out-of-roundness is inevitable due to the variation of the radial compliance of the chuck workpiece system which is caused by the position of jaws with respect to the direction of the applied force. To compensate the chucking compliance induced error, firstly roundness profile of workpiece due to chucking compliance after machining needs to be predicted. Then using this predicted profile, the compensated tool feed trajectory can be generated. And by synchronizing the cutting tool feed system with workpiece rotation, the chucking compliance induced error can be compensated. To satisfy the condition that the cutting tool feed system must provide high speed and high position accuracy, brushless linear DC motor is used. In this study, firstly through the force-deflection experiment in workpiece chucked lathe, the variation of radial compliance of chuck workpiece system is obtained. Secondly using the mathematical equation and cutting experiment result, the predicted profile of workpiece and its compensation tool trajectory are generated. Thirdly the configuration of compensation system using linear motor is introduced, and to improve the system performance, PID controller is designed. Finally the tracking performance of system is examined by experiment. Through the real cutting experiment, roundness is significantly improved.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.19-22
• /
• 2005

As the optical communication industry is developed, the demand of optical communication part is increasing. $ZrO_2$ ceramic ferrule is very important part which can determines the transmission efficiency and information quality to connect the optical fibers. In general $ZrO_2$ ceramic ferrule is manufactured by grinding process because the demands precision is very high. And the co-axle grinding process of $ZrO_2$ ceramic ferrule is to make its concentricity all of uniform before centerless grinding. When co-axle grinding of ferrule supported by two pin, pin chucking alignment accuracy is very important. This paper deals with the analysis of the chucking alignment experiment with parallel error on the micro feeding equipment. Thus, if possible be finding highly good the chucking alignment of two pin.

• Journal of the Semiconductor & Display Technology
• /
• v.23 no.2
• /
• pp.12-18
• /
• 2024

A Electrostatic chuck is a device that fixes the substrate, using the force between charges applied between two parallel plates to attract substrates such as wafers or OLED panels. Unlike mechanical suction methods, which rely on physical fixation, this method utilizes the force of electrostatics for fixation, making it important to verify the adhesion force. As the size of the substrate increases, deformations due to gravity or chucking force also increase, and the adhesion force decreases rapidly as the distance between the chuck and the substrate increases. The outlook for displays is shifting from small to large OLEDs, necessitating consideration of substrate deformations. In this paper, to confirm the deformation of the substrate through various patterns, a simplified 2D model using Ansys' electromagnetic field analysis program, Maxwell, and the static structural analysis program, Mechanical, was utilized to observe changes in adhesion force according to the variation in the air gap between the substrate and the chuck. Additionally, the chucking force was analyzed for the size of the substrate, and the deformation of the substrate was confirmed when gravity and chucking force act simultaneously.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.2
• /
• pp.40-49
• /
• 2003

Ferrule is widely used as fiber optic connecters. In fiber-optic communications. the shape accuracy such as coaxiality and cylindricity of ferrule affects insertion loss. When coaxial grinding of ferrule supported by two pin. pin alignment and chucking accuracy are very important. In this research, the kinematic behavior of the ferrule centers are investigated in the case where the ferrule is chucked with the cone-shaped center pins and bail centers, With homogeneous coordinate transformation and numerical analysis, the obtained results are as follows: In the case of cone-type center, the alignment errors between center pins alone do not affect the rotation accuracy of ferrule. The alignment errors between center holes cause sinusoidal displacement of ferrule. And the maximum displacement of ferrule centers is proportional to the center pin angle. In the case of ball-type center, the displacements of ferrule centers has similar pattern as cone-type center, and the alignment errors art proportional to ball diameters.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.7 no.1
• /
• pp.89-94
• /
• 1998

With increasing demands on automatic and high-capability manufacturing, the dynamic performance of machine tools becomes more and more important. In this paper, the correlation between dynamic compliance of the cutting system and the commencing point of chatter vibration in turning is checked by impulse excitation method and cutting tests for some cutting system. The correlation between chucking conditions of workpiece and the commencing point of chatter vibration is clarified, and it is proven that there is a mutual relations between them. Chatter vibration commenced at certain level of dynamic compliance of the cutting system regardless of the kind of the system. It shows the possibility of dynamic performance test of a lathe by means of impulse excitation method.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.9-14
• /
• 2002

Ferrule is widely used as fiber optic connecters. In fiber-optic communications, the shape accuracy such as coaxiality and cylindricity of ferrule affects insertion loss. When coaxial grinding of ferrule supported by two pin, pin alignment and chucking accuracy are very important. In this research, the kinematic behavior of the ferrule center is investigated in the case where cone-shaped center pins and round circle hales which make contact with each other near the edge of the holes, using homeogenous coordinate transformation and numerical analysis. The obtained results are as follows: The alignment errors between center pins alone do not affect the rotation accuracy of ferrule. The alignment errors between center holes cause a sinusoidal displacement of ferrule. And the maximum displacement of ferrule centers increase in proportion to the center pin angle in the case of a fixed alignment errors