• Journal of the Korean Institute of Telematics and Electronics A
• /
• v.33A no.12
• /
• pp.47-52
• /
• 1996

Cl-based gas chemistry is generally used to etching for al alloy metallization. After the etching of Al alloy with Cl-based gas plasma, residual chlorine on Al alloy reacts with H$_{2}$O due to air exposure and results in Al corrosion. In this study, the corrosion phenomena of Al wer examined with XPS(X-ray photoelectron spectroscopy) and SEM (scanning electorn microscopy). It was confirmed that chlorine mainly existed at the grian boundary of Al alloy after plasma etching of Al alloy with cl-based gas chemistry and Al corrosion was largely generated at the grain boundary of Al alloy. And residual chlorine was passivated by sulfur and fluorine which were generated by SF$_{6}$ plasma. These effects of passivation reduced the Al corrosion due to air exposure.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1996.11a
• /
• pp.252-255
• /
• 1996

Cl-based gas chemistry is generally used to etching for Al alloy metallization. After the etching of Al alloy with Cl-based gas plasma, residual chlorine on Al alloy reacts with $H_2O$ due to air exposure and results in Al corrosion. In this study, the corrosion Phenomena of Al were examined with XPS(X-ray photoelectron spectroscopy) and SEF(Scanning electron microscopy). It was confirmed that chlorine mainly existed at the grain boundary of Al alloy after plasma etching of Al alloy with Cl-based gas chemistry and Al corrosion was largely generated at the grain boundary of Al a1loy. And residual chlorine was passivated by sulfur and fluorine which were generated by SF$_{6}$ plasma. These effects of passivation reduced the Al corrosion due to air exposure.e.

• Journal of the Korean Institute of Gas
• /
• v.21 no.3
• /
• pp.46-52
• /
• 2017

During the transportation of chemicals, quantitative risk assessment for chemical leakage accidents caused by traffic accidents was carried out and the appropriateness of chemical transportation route was evaluated. The quantitative risk assessment method applied to the chemical leakage accidents that may occur in the chemical handling equipments installed in the workplace was presented and applied to the chemical transportation. By analyzing the number of traffic accidents in transportation vehicles, the probability of chemical leakage accidents during chemical transportation was predicted and applied to the quantitative risk assessment of chlorine gas leakage accidents that may occur when transporting liquified chlorine bombe using vehicles. As a result, the most appropriate route of transporting the liquefied chlorine bombe was suggested on the basis of risk.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
• /
• v.18 no.2
• /
• pp.169-177
• /
• 2020

Here, the stability of stainless steel 316 (SS-316) was investigated to identify its applicability in the oxide reduction process, as a component in related equipment, to produce a complicated gas mixture composed of O₂ and Cl₂ under an argon (Ar) atmosphere. The effects of the mixed gas composition were investigated at flow rates of 30 mL/min O₂, 20 mL/min O₂ + 10 mL/min Cl₂, 10 mL/min O₂ + 20 mL/min Cl₂, and 30 mL/min Cl₂, each at 600℃, during a constant argon flow rate of 170 mL/min. It was found that the corrosion of SS-316 by the chlorine gas was suppressed by the presence of oxygen, while the reaction proceeded linearly with the reaction time regardless of gas composition. Surface observation results revealed an uneven surface with circular pits in the samples that were fed mixed gases. Thermodynamic calculations proposed the combination of Fe and Ni chlorination reactions as an explanation for this pit formation phenomenon. An exponential increase in the corrosion rate was observed with an increase in the reaction temperature in a range of 300 ~ 600℃ under a flow of 30 mL/min Cl₂ + 170 mL/min Ar.

• Journal of the Korean Institute of Gas
• /
• v.8 no.4 s.25
• /
• pp.8-14
• /
• 2004

Accidental releases of toxic gases heavily affect to the risk of process facilities. In this research, consequence analysis for accidental releases of ammonia and chlorine gases was studied using the risk based inspection, based on API-581 BRD. It was found out that consequence areas (toxic areas) decrease as temperature increases and as the pipe diameter and pressure decrease. For the same release condition, the toxic area by the release of chlorine gas was larger than that by the release of ammonia gas.

• Journal of the Korean Institute of Gas
• /
• v.18 no.5
• /
• pp.1-5
• /
• 2014

As high-tech science has developed, the need of semiconductor is required constantly. However, there are many processes which use a great deal of poisonous gas in the semiconductor process, so the dangerousness by a gas leak is latent in these processes. Especially, the accident of toxic gas is almost made by ammonia and chlorine. Therefore this report estimates the damage by the leak of ammonia and chlorine used in LPCVD system.

• Proceedings of the IEEK Conference
• /
• 2001.10a
• /
• pp.179-182
• /
• 2001

The chloride volatilization method for the recovery of zirconium and removal of uranium from zirconium containing metallic wastes formed in spent fuel reprocessing was studied using the simulated alloy waste, i.e. the mixture of Zr foil and UO$_2$/U$_3$O$_{8}$ powder. When the simulated waste was heated to react with chlorine gas at 350- l00$0^{\circ}C$, the zirconium metal changed to volatile ZrCl$_4$showing high volatility ratio (Vzr) of 99%. The amount of volatilized uranium increases at higher temperatures causing lowering of decontamination factor (DF) of uranium. This is thought to be caused by the chlorination of UO$_2$ with ZrCl$_4$vapor. The highest DF value of 12.5 was obtained when the reaction temperature was 35$0^{\circ}C$. Addition of 10 vol.% oxygen gas into chlorine gas was effective for suppressing the volatilization of uranium, while the volatilization ratio of zirconium was decreased to 68% with the addition of 20 vol.% oxygen. In the case of the mixture of Zr foil and U$_3$O$_{8}$, the V value of uranium showed minimum (44%) at 40$0^{\circ}C$ with chlorine gas giving the highest DF value 24.3. When the 10 vol.% oxygen was added to chlorine gas, the V value of zirconium decreased to 82% at $600^{\circ}C$, but almost all the uranium volatilized (Vu=99%), which may be caused by the formation of volatile uranium chlorides under oxidative atmosphere.ere.

• Food Science of Animal Resources
• /
• v.38 no.3
• /
• pp.487-497
• /
• 2018

Controlling of microorganisms in the industrial process is important for production and distribution of hatching and table eggs. In the previous study, we reported that chlorine dioxide ($ClO_2$) gas of a proper concentration and humidity can significantly reduce the load of Salmonella spp. on eggshells. In this study, we compared microbial reduction efficacy on egg's surface using hatching eggs and table eggs, internal quality of table eggs, and hatchability after both the conventional method (washing and UV expose, fumigation with formalin) and $ClO_2$ gas disinfection. Application of 40 ppm $ClO_2$ gas to the table and hatching eggs, respectively, reduced the aerobic plate count (APC) with no statistical difference compared with the conventional methods. Additionally, we didn't observed that any significant difference in albumin height, Haugh unit (HU), and yolk color, this result confirms that 40 ppm $ClO_2$ had no effect on the internal quality of the table eggs, when comparing with the UV treatment method. The hatchability of hatching eggs was not statistical different between formaldehyde fumigation and 80 ppm $ClO_2$ gas treatment, though the value was decreased at high concentration of 160 ppm $ClO_2$ gas. From these results, we recommend that $ClO_2$ gas can be used as a safe disinfectant to effectively control egg surface microorganisms without affecting egg quality.

• Journal of Ceramic Processing Research
• /
• v.20 no.4
• /
• pp.388-394
• /
• 2019

In this study, high-purity single-walled carbon nanotubes (SWCNTs) were prepared by removing the unreacted metal constituents and amorphous carbon impurities using a post-annealing process. Unlike conventional thermal processing techniques, this technique involved different gas atmospheres for efficient removal of impurities. A heat treatment was conducted in the presence of chlorine, oxygen, and chlorine + oxygen gases. The nanotubes demonstrated the best characteristics, when the heat treatment was conducted in the presence of a mixture of chlorine and oxygen gases. The scanning electron microscopy, transmission electron microscopy, ultraviolet absorbance, and sheet resistance measurements showed that the heat treatment process efficiently removed the unreacted metal and amorphous carbon impurities from the as-synthesized SWCNTs. The high-purity SWCNTs exhibited improved electrical conductivities. Such high-purity SWCNTs can be used in various carbon composites for improving the sensitivity of gas sensors.

• Journal of the Korean Institute of Gas
• /
• v.11 no.4
• /
• pp.98-103
• /
• 2007

Likelihood analysis was used for the revision of release probability/frequency in chlorine Injection facilities used in chlorine process. Typically these facilities consist of pressure cylinder, vaporizer, pipeline, measuring equipment and safety equipment. This paper described the incident scenarios considered, likelihood analysis procedure and the selection and application of basic events and for failure rates of mechanical components. Human errors were also considered. The major objective of this paper is to estimate the likelihood of each determined incident scenarios. We estimated failure rates of mechanical components based on likelihood analysis procedure. Human errors were also considered. It was estimated to have $5.73{\times}10^{-5}$ $Cl_2$ leak per year during the major $Cl_2$ handling process. The probability of failure in scrubber system was$4.11{\times}10^{-2}$/demand.