• 전자공학회논문지A
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• 제33A권12호
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• pp.47-52
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• 1996

Cl-based gas chemistry is generally used to etching for al alloy metallization. After the etching of Al alloy with Cl-based gas plasma, residual chlorine on Al alloy reacts with H$_{2}$O due to air exposure and results in Al corrosion. In this study, the corrosion phenomena of Al wer examined with XPS(X-ray photoelectron spectroscopy) and SEM (scanning electorn microscopy). It was confirmed that chlorine mainly existed at the grian boundary of Al alloy after plasma etching of Al alloy with cl-based gas chemistry and Al corrosion was largely generated at the grain boundary of Al alloy. And residual chlorine was passivated by sulfur and fluorine which were generated by SF$_{6}$ plasma. These effects of passivation reduced the Al corrosion due to air exposure.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.252-255
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• 1996

Cl-based gas chemistry is generally used to etching for Al alloy metallization. After the etching of Al alloy with Cl-based gas plasma, residual chlorine on Al alloy reacts with $H_2O$ due to air exposure and results in Al corrosion. In this study, the corrosion Phenomena of Al were examined with XPS(X-ray photoelectron spectroscopy) and SEF(Scanning electron microscopy). It was confirmed that chlorine mainly existed at the grain boundary of Al alloy after plasma etching of Al alloy with Cl-based gas chemistry and Al corrosion was largely generated at the grain boundary of Al a1loy. And residual chlorine was passivated by sulfur and fluorine which were generated by SF$_{6}$ plasma. These effects of passivation reduced the Al corrosion due to air exposure.e.

• 한국가스학회지
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• 제21권3호
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• pp.46-52
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• 2017

화학물질 운송과정에서 교통사고로 인한 화학물질 누출사고가 발생할 경우에 대한 정량적 위험성평가를 실시하였고, 이를 기준으로 화학물질 운송경로의 적절성을 평가하였다. 이를 위해 사업장 내부에 설치되어 있는 화학물질 취급설비에서 화학물질 누출사고가 발생할 경우 적용하는 정량적 위험성평가방법을 제시하였고, 이를 화학물질 운송과정에 적용하였다. 운송 차량의 교통사고 건수를 분석하여 화학물질 운송시 화학물질 누출사고가 발생할 확률을 예측하였고, 차량을 이용하여 액화염소용기를 운송할 경우 발생할 수 있는 염소가스 누출사고에 대한 정량적 위험성평가에 적용하였다. 그 결과 위험도를 바탕으로 액화염소용기를 운송하는 차량의 가장 적절한 운행경로를 제시하였다.

• 방사성폐기물학회지
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• 제18권2호
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• pp.169-177
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• 2020

Here, the stability of stainless steel 316 (SS-316) was investigated to identify its applicability in the oxide reduction process, as a component in related equipment, to produce a complicated gas mixture composed of O₂ and Cl₂ under an argon (Ar) atmosphere. The effects of the mixed gas composition were investigated at flow rates of 30 mL/min O₂, 20 mL/min O₂ + 10 mL/min Cl₂, 10 mL/min O₂ + 20 mL/min Cl₂, and 30 mL/min Cl₂, each at 600℃, during a constant argon flow rate of 170 mL/min. It was found that the corrosion of SS-316 by the chlorine gas was suppressed by the presence of oxygen, while the reaction proceeded linearly with the reaction time regardless of gas composition. Surface observation results revealed an uneven surface with circular pits in the samples that were fed mixed gases. Thermodynamic calculations proposed the combination of Fe and Ni chlorination reactions as an explanation for this pit formation phenomenon. An exponential increase in the corrosion rate was observed with an increase in the reaction temperature in a range of 300 ~ 600℃ under a flow of 30 mL/min Cl₂ + 170 mL/min Ar.

• 한국가스학회지
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• 제8권4호
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• pp.8-14
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• 2004

독성가스의 누출은 공정설비의 위험도에 크게 영향을 미친다. 본 연구에서는 API-581에 의한 위험기반검사에서 매개변수의 변화에 따른 독성가스(암모니아 및 염소 가스)의 누출사고 결과를 분석하였다. 그 결과, 독성물질의 누출에 의한 사고결과, 즉 독성 피해영역은 온도가 증가할수록, 그리고 압력과 파이프 직경이 감소할수록 감소하였으며, 동일한 누출조건에서 암모니아 보다 염소가스인 경우에 큰 값을 나타내었다.

• 한국가스학회지
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• 제18권5호
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• pp.1-5
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• 2014

첨단과학이 발전하면서 반도체의 필요성은 끊임없이 요구되고 있으며, 이러한 반도체 공정에서는 다량의 독성가스를 이용한 공정이 많다. 이러한 공정에서 가스의 누설로 인한 사고의 위험성은 항상 내재되어 있는 실정이다. 특히 국내 독성가스 사고는 암모니아와 염소에 의한 사고가 대부분이다. 따라서 본 논문에서는 LPCVD 공정에서 사용하는 암모니아와 염소의 누출로 인한 피해를 예측하여 안전에 만전을 기하고자 한다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 The 6th International Symposium of East Asian Resources Recycling Technology
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• pp.179-182
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• 2001

The chloride volatilization method for the recovery of zirconium and removal of uranium from zirconium containing metallic wastes formed in spent fuel reprocessing was studied using the simulated alloy waste, i.e. the mixture of Zr foil and UO$_2$/U$_3$O$_{8}$ powder. When the simulated waste was heated to react with chlorine gas at 350- l00$0^{\circ}C$, the zirconium metal changed to volatile ZrCl$_4$showing high volatility ratio (Vzr) of 99%. The amount of volatilized uranium increases at higher temperatures causing lowering of decontamination factor (DF) of uranium. This is thought to be caused by the chlorination of UO$_2$ with ZrCl$_4$vapor. The highest DF value of 12.5 was obtained when the reaction temperature was 35$0^{\circ}C$. Addition of 10 vol.% oxygen gas into chlorine gas was effective for suppressing the volatilization of uranium, while the volatilization ratio of zirconium was decreased to 68% with the addition of 20 vol.% oxygen. In the case of the mixture of Zr foil and U$_3$O$_{8}$, the V value of uranium showed minimum (44%) at 40$0^{\circ}C$ with chlorine gas giving the highest DF value 24.3. When the 10 vol.% oxygen was added to chlorine gas, the V value of zirconium decreased to 82% at $600^{\circ}C$, but almost all the uranium volatilized (Vu=99%), which may be caused by the formation of volatile uranium chlorides under oxidative atmosphere.ere.

• 한국축산식품학회지
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• 제38권3호
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• pp.487-497
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• 2018

Controlling of microorganisms in the industrial process is important for production and distribution of hatching and table eggs. In the previous study, we reported that chlorine dioxide ($ClO_2$) gas of a proper concentration and humidity can significantly reduce the load of Salmonella spp. on eggshells. In this study, we compared microbial reduction efficacy on egg's surface using hatching eggs and table eggs, internal quality of table eggs, and hatchability after both the conventional method (washing and UV expose, fumigation with formalin) and $ClO_2$ gas disinfection. Application of 40 ppm $ClO_2$ gas to the table and hatching eggs, respectively, reduced the aerobic plate count (APC) with no statistical difference compared with the conventional methods. Additionally, we didn't observed that any significant difference in albumin height, Haugh unit (HU), and yolk color, this result confirms that 40 ppm $ClO_2$ had no effect on the internal quality of the table eggs, when comparing with the UV treatment method. The hatchability of hatching eggs was not statistical different between formaldehyde fumigation and 80 ppm $ClO_2$ gas treatment, though the value was decreased at high concentration of 160 ppm $ClO_2$ gas. From these results, we recommend that $ClO_2$ gas can be used as a safe disinfectant to effectively control egg surface microorganisms without affecting egg quality.

• Journal of Ceramic Processing Research
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• 제20권4호
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• pp.388-394
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• 2019

In this study, high-purity single-walled carbon nanotubes (SWCNTs) were prepared by removing the unreacted metal constituents and amorphous carbon impurities using a post-annealing process. Unlike conventional thermal processing techniques, this technique involved different gas atmospheres for efficient removal of impurities. A heat treatment was conducted in the presence of chlorine, oxygen, and chlorine + oxygen gases. The nanotubes demonstrated the best characteristics, when the heat treatment was conducted in the presence of a mixture of chlorine and oxygen gases. The scanning electron microscopy, transmission electron microscopy, ultraviolet absorbance, and sheet resistance measurements showed that the heat treatment process efficiently removed the unreacted metal and amorphous carbon impurities from the as-synthesized SWCNTs. The high-purity SWCNTs exhibited improved electrical conductivities. Such high-purity SWCNTs can be used in various carbon composites for improving the sensitivity of gas sensors.

• 한국가스학회지
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• 제11권4호
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• pp.98-103
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• 2007

발생가능성 분석은 염소공정의 염소투입설비에서 누출 가능성을 교정하는데 자주 사용되고 있다. 그리고 이러한 시설은 전형적으로 압력용기, 기화기, 배관, 측량장비, 안전장치로 등으로 구성되어 있다. 이 논문에서는 가능성 분석절차와 기계적 요소들의 고장률에 대하여 사건 시나리오를 만들 인적오류도 고려하였다. 논문의 주된 목적은 결정된 각각의 시나리오의 발생가능성을 계산하는 것으로 발생가능성분석 방법에 근거하여 기계요소의 고장률과 인적오류를 포함하여 계산하였다. 그 결과, 주요 $Cl_2$ 취급공정에서 누출이 발생할 가능성이 $5.73{\times}10^{-5}$로 예측되었으며 세정시스템의 고장확률은 $4.11{\times}10^{-2}$로 나타났다.