• 제목/요약/키워드: Cheon Myeong-gwan

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SLS Technology for High Performance Poly-Si TFTs and Its Application to Advanced LCD and SOG

  • 류명관;손곤;김천홍;이정열
    • E2M - 전기 전자와 첨단 소재
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    • 제19권9호
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    • pp.11-19
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    • 2006
  • SLS crystallization and CMOS LTPS process have been developed for high performance and uniform characteristics. By strictly optimizing SLS optics in conventional 2 shot SLS process, threshold voltage variation of 720 pixel TFTs in 2.2-inch QVGA panel (240xRGB) was remarkably decreased from 1.89 V to 0.56 V of 3sigma value. Mobility of the channel doped NTFT and PTFT for circuits were $146\;and\;38cm^{2}/Vs$, respectively. Functional unit circuits for SOG were also fabricated and properly operated.

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