• Bulletin of the Korean Chemical Society
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• 제22권8호
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• pp.921-924
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• 2001

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2004년도 추계학술대회논문집
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• pp.18-21
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• 2004

• JSTS:Journal of Semiconductor Technology and Science
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• 제4권3호
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• pp.217-221
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• 2004

[ $CO_2$ ]laser ablation rates for bulk 4H-SiC substrates and GaN/AIN/SiC templates in the range 229-870 ${\mu}m.min^{-1}$ were obtained for pulse energies of 7.5-30 mJ over diameters of 50·500 ${\mu}m$ with a Q-switched pulse width of ${\sim}30$ nsec and a pulse frequency of 8 Hz. The laser drilling produces much higher etch rates than conventional dry plasma etching (0.2 - 1.3 ${\mu}m/min$) making this an attractive maskless option for creating through-wafer via holes in SiC or GaN/AlN/SiC templates for power metal-semiconductor field effect transistor applications. The via entry can be tapered to facilitate subsequent metallization by control of the laser power and the total residual surface contamination can be minimized in a similar fashion and with a high gas throughput to avoid redeposition. The sidewall roughness is also comparable or better than conventional via holes created by plasma etching.

• 한국항공우주학회지
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• 제44권9호
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• pp.789-795
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• 2016

이차 추진제로 많이 쓰이는 알루미늄을 고출력 레이저를 조사하여 공기 중의 산소와 반응시켜 발생되는 알루미늄과 산소의 화학 반응을 레이저 분광분석법을 이용하여 연구를 수행 하였다. 7ns의 펄스 주기와 1064nm의 주파수를 가진 Q-switched Nd:YAG 레이저로 40 - 2500mJ($6.88{\times}10^{10}-6.53{\times}10^{11}W/cm^2$)의 에너지가 공급되었으며, 플라즈마 빛은 echelle 회절 분광기와 ICCD 카메라로 감지하였다. 분광분석을 통하여 알루미늄과 산소의 원자/분자 신호 분석과 현상이 일어나는 플라즈마 환경의 특성 연구를 위해 들뜸 온도(2200K~6600K) 및 전자밀도($3.15{\times}10^{15}{\sim}2.38{\times}10^{16}cm^{-3}$) 계산, 그리고 알루미늄 표면의 크레이터(Crater) 분석을 수행하였다. 본 연구는 고 레이저 복사 조도 환경하에서 발생되는 화학 반응과 플라즈마의 특성을 파악하는 방법을 제시하고 있다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.914-917
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• 2002

Fabrication of micro carbon structures and patterns using laser-assisted chemical vapor deposition is studied. Argon ion laser and ethylene were used to grow micro carbon rod through pyrolytic decomposition of the reaction gas. The influence of reaction gas pressure and incident laser power on the diameter and growth rate of the micro carbon rod was experimentally investigated. The diameter of micro carbon rods increases linearly with respect to the laser power but is almost independent of the reaction gas pressure. Growth rate of the rod changes little with gas pressure when the laser power remains below 1W. When the carbon rod was grown at near threshold laser power, a very smooth surface is obtained on the rod. By continuously moving the focusing lens in the direction of growth, a micro carbon rod with a diameter of 28 ${\mu}{\textrm}{m}$ and aspect ratio of 100 was fabricated.

• Bulletin of the Korean Chemical Society
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• 제25권1호
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• pp.101-105
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• 2004

The laser ablation/ionization time-of-flight mass spectrometry is applied to the isotopic analysis of solid samples using a home-made instrument. The technique is convenient for solid sample analysis due to the onestep process of vaporization and ionization of the samples. The analyzed samples were lead, cadmium, molybdenum, and ytterbium. To optimize the analytical conditions of the technique, several parameters, such as laser energy, laser wavelength, size of the laser beam on the samples surface, and high voltages applied on the ion source electrodes were varied. Low energy of laser light was necessary to obtain the optimal mass resolution of spectra. The 532 nm light generated mass spectra with the higher signal-to-noise ratio compared with the 355 nm light. The best mass resolution obtained in the present study is ~1,500 for the ytterbium.

• 한국염색가공학회지
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• 제35권2호
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• pp.121-127
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• 2023

In this study, a comprehensive investigation was conducted on the morphological and property changes of laser-induced nanocarbon (LINC) as a function of laser process parameters. LINC was formed on the surfaces of polyimide films with different backbone structures under various process conditions, including laser power, scan speed, and resolution. Three different forms of LINC electrodes (i.e., continuous 3D porous graphene, wooly nanocarbon fibers, line cut) were formed depending on the laser power and scan speed. Furthermore, heteroatom doping induced from the chemical structure of the polyimide during laser patterning was found to be effective in modifying the electrical properties of LINC electrodes. The LINC surfaces exhibited different microstructures depending on the laser beam resolution under constant laser power and scan speed, allowing for controllable surface wettability. The correlation between the chemical structure of the polymer substrate, laser process parameters, and carbonized surface properties in this study is expected to be utilized as fundamental understanding for the manufacturing of next-generation carbon-based electronic devices.

• Bulletin of the Korean Chemical Society
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• 제18권1호
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• pp.56-61
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• 1997

Lead zirconate titanate (PZT) thin fills were deposited onto the Pt/Ti/SiO2/Si substrate by the pulsed laser deposition with the second harmonic wavelength (532 nm) of Nd:YAG laser. In order to determine the optimum conditions for the film deposition, the phase of the films were investigated as functions of ambient oxygen pressure, substrate temperature, and laser fluence. Also the chemical composition analysis was conducted for the PZT films deposited under various ambient oxygen pressure. When the distance between substrate and bulk PZT target is set to 20 mm, the optimum conditions have been determined to be 3 torr of oxygen pressure, 1.5 J/cm2 of laser fluence, and 823-848(±10) K range of substrate temperature. At these conditions, perovskite phase PZT films were obtained on platinized silicon. The chemical composition of the films is very similar to that of PZT bulk target. The physical structure of the deposited films analyzed by scanning electron microscopy shows a columnar morphology perpendicular to the substrate surface. Capacitance-Voltage hysteresis loop measurements show also a typical characteristics of ferroelectric thin film. The dielectric constant is found to be 528 for the 0.48 μm thickness of PZT thin film.

• Bulletin of the Korean Chemical Society
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• 제34권8호
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• pp.2241-2242
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• 2013

• 대한화학회지
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• 제33권2호
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• pp.168-176
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• 1989

화학 레이저 모델의 이론적 연구를 화학 반응속도론, gain 과정과 유도 방출과정을 고려하여 수행하였다. 우선 F+$H_2$비 연쇄반응 HF 화학 레이저를 진동준위가 v = 3 까지 pumping되는 것으로 생각하고 관련된 rate equation을 풀어서 출력을 산출하였다. 여기서 조화진동자를 가정한 계산과 비조화성 보정을 해준 계산결과의 비교로부터 그 차이가 거의 없음을 확인하였다. 또한 여러가지 온도와 초기농도를 택하여 산출되는 laser 축력의 변화를 검토하였다. 그리고 $H_2$+$F_2$ 연쇄반응 HF 화학 레이저에 관한 비교적 단순한 model simulation을 수행하였다. 이 계산 결과는 이미 보고된 상당히 복잡한 계산결과와 비교하여 만족할 정도이었다.