• Title/Summary/Keyword: Chemical conditioning

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고체/기체계 가역 화학 반응열 이용 HEAT PUMP 기술 개발

  • 이종호
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
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    • 1993.11a
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    • pp.78-81
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    • 1993
  • AN EXTENSIVE RESEARCH AND DEVELOPMENT WORK WILL BE CARRIED OUT FOR THE COMMERCIALIZATION OF THE CHEMICAL HEAT PUMP SYSTEM WHICH BASED ON THE ELF AQUITAINE FRANCE PATENTED AND KIME LICENSED SOLID/GAS CHEMICAL REACTION TECHNOLOGY. TOWARD ON THAT GOAL, THE BASIC AND ENGINEERING DETAILS SUCH AS IMPEX BLOCK MATERIAL, PHYSICO-CHEMICAL AND THERMO-CHEMICAL CHARACTERISTICS OF REACTION MECHANISMS IN THE SOLID/GAS CHEMICAL REACTION HEAT PUMP SYSTEMS. THREE KIND OF APPLICATION SYSTEM ARE NOW INVESTIGATED; AIR CONDITIONING, REFRIGERATOR AND INDUSTRIAL PROCESS HEATING AND COOLING SYSTEM.

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Electrical and Optical of Properties ITO Thin Film with a Control of Temperature in Pad Conditioning Process (CMP 패드 컨디셔닝 온도조절시 ITO박막의 전기적.광학적 특성 거동)

  • Choi, Gwon-Woo;Kim, Nam-Hoon;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the KIEE Conference
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    • 2005.11a
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    • pp.148-150
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    • 2005
  • Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) immediately after pad conditioning with the various conditioning temperatures by control of de-ionized water (DIW). Light transparent efficiency of ITO thin film was improved after CMP process after pad conditioning at the high temperature because the surface morphology was smoother by soften polishing pad and decreased particle size.

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Study on Polishing Mechanism of Thermal Oxide Film after High-Temperature Conditioning (고온 패드 컨디셔닝 후 열산화막 연마 메커니즘 연구)

  • Choi, Gwon-Woo;Kim, Nam-Hoon;Seo, Yong-Jin;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.193-194
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    • 2005
  • By the high-temperature pad conditioning process: The slurry residues in pores and grooves of the polishing pad were clearly removed. These clear pores and enlarged grooves made the slurry attack the oxide surface. The changed slurry properties by high-temperature pad conditioning process made the oxide surface hydro-carbonate to be removed easily.

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Gas 분산 기-액 반응조에서 기포운동이 열전달에 미치는 영향

  • Son, Byeong-Jin;Lee, Hyeon
    • The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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    • v.8 no.1
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    • pp.10-13
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    • 1979
  • The study for bubbling phenomena to influence heat transfer in gas - liquid contactors. The sparged contactor is gaining importance for gas-liquid chemical reactions. In this paper, correlations between Reynolds number and heat transfer coefficient were studied and experimental expressions were also obtained over broth of areas, namely, laminar area and turbulent area respectively.

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The Characteristics of Municipal wastewater Sludge Dewatering Using Oyster Shell Powder (굴껍질을 이용한 하수슬러지의 탈수특성에 관한 기초연구)

  • 신남철;문종익;정유진;장혜정;성낙창
    • Journal of Environmental Health Sciences
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    • v.26 no.2
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    • pp.30-33
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    • 2000
  • The objective of this study is to examine the subsitiution effect of the waste oyster shell powder as the conditioning agent in municipal wasterwater sludge dewatering process. Beacuse the oyster shells have a large amount(about 38% by weight) of alkaline minerals, such as calcium and magnesium, they are thought to have the potential as a good conditioning agent. In this study, the physico-chemical properties of powdered oyster shells (75${\mu}{\textrm}{m}$ or 200 mesh) and the dewatering characteristics of municipal waste water sludge using powdered oyster shells and CaCO3 are investigated. The conclusions are as follows, 1. Oyster shell could produce calcium ions up to 14ppm at pH-7.0, and this represents that oyster shell is a potential properties as a good conditioner. 2. 100ml of wastewater sludges, conditioned with pretreated oyster shell, are dewatered to the level of 25% solid concentration. 3. Wasterwater sludges, conditioned with oyster shell and CaCO3 are dewatered to the level of 32% solid concentration. And this shows that two-stage combined conditioning process is desirable than the one-stage conditioning process.

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Numerical and Experimental Analyses Examining Ozone and Limonene Distributions in Test Chamber with Various Turbulent Flow Fields

  • ITO, Kazuhide
    • International Journal of Air-Conditioning and Refrigeration
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    • v.16 no.3
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    • pp.89-99
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    • 2008
  • Indoor ozone has received attention because of its well-documented adverse effects on health. In addition to the inherently harmful effects of ozone, it can also initiate a series of reactions that generate potentially irritating oxidation products, including free radicals, aldehydes, organic acids and secondary organic aerosols (SOA). Especially, ozone reacts actively with terpene. The overarching goal of this work was to better understand ozone and terpene distributions within rooms. Towards this end, the paper has two parts. The first describes the development of a cylindrical test chamber that can be used to obtain the second order rate constant $(k_b)$ for the bi-molecular chemical reaction of ozone and terpene in the air phase. The second consists of model room experiments coupled with Computational Fluid Dynamics (CFD) analysis of the experimental scenarios to obtain ozone and terpene distributions in various turbulent flow fields. The results of CFD predictions were in reasonable agreement with the experimental measurements.

Tungsten CMP in Fixed Abrasive Pad using Hydrophilic Polymer (친수성 고분자를 이용한 고정입자패드의 텅스텐 CMP)

  • 박범영;김호윤;김형재;김구연;정해도
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.7
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    • pp.22-29
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    • 2004
  • As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.