대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.148-150
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- 2005
CMP 패드 컨디셔닝 온도조절시 ITO박막의 전기적.광학적 특성 거동
Electrical and Optical of Properties ITO Thin Film with a Control of Temperature in Pad Conditioning Process
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Choi, Gwon-Woo
(Chosun University) ;
- Kim, Nam-Hoon (Chosun University) ;
- Seo, Yong-Jin (Daebul University) ;
- Lee, Woo-Sun (Chosun University)
- 발행 : 2005.11.04
초록
Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) immediately after pad conditioning with the various conditioning temperatures by control of de-ionized water (DIW). Light transparent efficiency of ITO thin film was improved after CMP process after pad conditioning at the high temperature because the surface morphology was smoother by soften polishing pad and decreased particle size.
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