• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05c
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• pp.223-227
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• 2002

As the channel length of device shrinks below $0.13{\mu}m$, CMP(chemical mechanical polishing) process got into key process for global planarization in the chip manufacturing process. The removal rate and non-uniformity of the CMP characteristics occupy an important position to CMP process control. Especially, the post-CMP thickness variation depends on the device yield as well as the stability of subsequent process. In this paper, every wafer polished two times for the improvement of oxide CMP process characteristics. Then, we discussed the removal rate and non-uniformity characteristics of post-CMP process. As a result of CMP experiment, we have obtained within-wafer non-uniformity (WIWNU) below 4 [%], and wafer-to-wafer non-uniformity (WTWNU) within 3.5 [%]. It is very good result, because the reliable non-uniformity of CMP process is within 5 [%].

• Journal of Conservation Science
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• v.4 no.1 s.4
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• pp.11-42
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• 1995

Stone-monuments, distributed in this area, have been investigated and studied on the characteristics and the rock phases in the geological and conservational points of view. Most of them may have been built from the end of the Shilla Kingdom to the Koryeo Kingdom, which are based on the typical characteristics of the form. The used rocks in these monuments are mainly biotite granite of the Jurassic age which is widely distributed around the area. Black slate and marbles are also used in some monuments, which may be obtained from other areas. The biotite granite of massive and coarse texture contains often inclusions of biotite aggregates or fragments of dioritic rock phase. However, the biotite granite in the area may be very weak to the chemical weathering so that irregular rock surface shows generally $2\~3mm$ relief. The irregular relief is mainly due to different relative degree on the chemical weathering according to the kind of minerals especially quartz, feldspar and biotite. The chemical weathering is also influenced by organisms. For conservation, they must be scientifically considered based on the characteristics, kind of the rock phase, factors on the weathering process, situation in situ or being transported, and protection.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.47 no.6
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• pp.66-72
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• 2015

This study was conducted to investigate the effects of optical brightening agents (OBA) on the chemical degradation characteristics of paper cellulose during humid heating aging. Three different types of OBAs were applied to a filter paper by dipping it in OBA solutions whose concentrations were controlled to 1% and 2%. The filter papers with an OBA were artificially aged at $80^{\circ}C$ and 65% RH, and the changes in pH of paper and viscosity of cellulose were evaluated. Their functional groups were also analyzed by ATR-FTIR (at-tenuated total reflectance fourier transform infrared spectroscopy). It was found that OBAs influenced the chemical degradation of paper cellulose during humid heating aging. Higher concentration of OBA solutions accelerated the degradation of paper cellulose. Especially, after aging for 12 days, the paper cellulose treated with the tetra-type OBA were the most significantly aged among the three types of OBAs. It was assumed that pH of OBA solutions affected the aging characteristics.

• Journal of the Society of Disaster Information
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• v.16 no.2
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• pp.310-317
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• 2020

Purpose: In this study, the characteristics of hazardous chemical transport vehicle accidents during the last six years from 2014 to 2019 was analyzed. This study is to prevent chemical transport accidents. Method: Using statistics from the Ministry of Environment, chemical transport vehicle accidents were classified into accident type, accident cause and vehicle type. Result: Of the total 506 cases chemical accidents, 105 cases were caused by transport vehicle. More than 20 percent of total accidents were reported. Most of the accidents were caused by spill·leak. The main causes of the accident were traffic accidents(49 cases) and management negligence(29 cases). This was more than 74% of all transport vehicle accidents. By vehicle type, 57 cases(54%) were most common in tank lorries, followed by trucks (39 cases, 37%) and trailers (9 cases, 9%). Conclusion: In order to prevent accident of transport vehicle, thorough inspection of the transport vehicle is required and safe operation of the driver. In addition, the government needs to expand real-time monitoring of transport vehicles and comprehensively manage different systems by the relevant ministries.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.29 no.3
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• pp.310-321
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• 2019

Objectives: The purpose of this study was to investigate types and characteristics of chemical substances used in LCD(Liquid crystal display) panel manufacturing process. Methods: The LCD panel manufacturing process is divided into the fabrication(fab) process and module process. The use of chemical substances by process was investigated at four fab processes and two module processes at two domestic TFT-LCD(Thin film transistor-Liquid crystal display) panel manufacturing sites. Results: LCD panels are manufactured through various unit processes such as sputtering, chemical vapor deposition(CVD), etching, and photolithography, and a range of chemicals are used in each process. Metal target materials including copper, aluminum, and indium tin oxide are used in the sputtering process, and gaseous materials such as phosphine, silane, and chlorine are used in CVD and dry etching processes. Inorganic acids such as hydrofluoric acid, nitric acid and sulfuric acid are used in wet etching process, and photoresist and developer are used in photolithography process. Chemical substances for the alignment of liquid crystal, such as polyimides, liquid crystals, and sealants are used in a liquid crystal process. Adhesives and hardeners for adhesion of driver IC and printed circuit board(PCB) to the LCD panel are used in the module process. Conclusions: LCD panels are produced through dozens of unit processes using various types of chemical substances in clean room facilities. Hazardous substances such as organic solvents, reactive gases, irritants, and toxic substances are used in the manufacturing processes, but periodic workplace monitoring applies only to certain chemical substances by law. Therefore, efforts should be made to minimize worker exposure to chemical substances used in LCD panel manufacturing process.

• Bulletin of the Korean Chemical Society
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• v.31 no.5
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• pp.1228-1232
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• 2010

The nanocomposites of polypyrrole (PPy) and multi-walled carbon nanotube (MWCNT) with different composition are synthesized by the chemical oxidative polymerization method. In these composites, the MWCNTs are uniformly coated by PPy with different thickness. The electrochemical properties of the composite electrodes are investigated by cyclic voltammetry, galvanostatic charge-discharge cycling and electrochemical impedance spectroscopy. The full cells assembled with the PPy/MWCNT composite electrodes deliver initial specific capacitances ranging from 146.3 to 167.2 F/g at 0.5 mA/$cm^2$ and exhibit stable cycling characteristics. The effect of content of MWCNT in the composite on cycling performance of the cells is also investigated.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1117-1119
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• 1995

Fluoroplastics have been used widely for chemical or electrical facility materials and lubricable engineering structural materials because they have the superior characteristics such as thermal stability, chemical stability, solid lubricity, arc resistance, wearable durability and good sealing property. In this study, PTFE composite materials for the insolation parts of high voltage and current breaker were investigated and estimated.

• Journal of the Korean Chemical Society
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• v.52 no.5
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• pp.561-568
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• 2008

• Carbon letters
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• v.7 no.2
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• pp.114-118
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• 2006

Isotropic pitch-based carbon fiber has been activated by steam diluted in nitrogen in order to characterize the microporosity. Especially, 40 wt% burn-off ACFs were prepared from different conditions to compare the pore structure and size. The ACFs were thinly sliced to investigate the inside pores by TEM and image analyzer. As expected, the adsorption characteristics of these ACFs were quite different from one another because of different pore structure and size. Most pores are not slit-shaped but rather round. Small round micropores become broad and irregular as increasing the activation time and temperature.

• Proceedings of the Korea Concrete Institute Conference
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• 2000.10a
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• pp.379-382
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• 2000

In this paper, we evaluated the suitability of converter slag as concrete aggregate by measuring physical and chemical characteristics of converter slag. The converter slag mainly contains SiO₂and CaO as the chemical composition. The reaction with water and a little of free CaO in the slag causes slag's volume to expanse. Therefore, we used several aging method in order to decrease the characteristics of slag volume expansion. Then the compressive strength of concrete with the converter slag aggregate is measured.