• Title/Summary/Keyword: Chemical Vapor

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Characterization of Chemical Vapor Condensation Reactor for Parylene-N Thin Film Deposition

  • Lee, Jong-Seung;Yeo, Seok-Ki;Park, Chin-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 2003.07a
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    • pp.897-900
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    • 2003
  • Chemical vapor condensation (CVC) reactor was investigated for the deposition of Parylene-N thin films as the passivation layer for organic light emitting diodes (OLEDs). Several gas inlet manifold designs were tested to improve the deposition rate and its uniformity, and it was found that proper inlet design is crucial to get the desired film properties. Process characterization was also performed with the modified inlets to optimize the process variables.

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Development of Chemical Vapor Sampler for Man-in-Simulant Test(MIST) (화생방 개인보호체계 시험평가용 화학증기 흡착 샘플러의 개발)

  • Jung, Hyunsook;Lee, Kyoo Won;Kah, Dongha;Jung, Heesoo;Ko, Chung Ah;Choi, Geun Seob;Park, Hyen Bae;Lee, Hae Wan
    • Journal of the Korea Institute of Military Science and Technology
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    • v.18 no.4
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    • pp.387-394
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    • 2015
  • We have recently developed a cost-effective and pouch-type chemical vapor sampler which consists of a selectively permeable high density polyethylene(HDPE) membrane, aluminum/nylon barrier film, and adsorbents. Since the sampler mimics the actual adsorption process that occurs when the skin is exposed to chemical vapors, it can be applied to man-in-simulant test(MIST) to determine the protective capability of individual protective ensembles for chemical warfare agents. In this study, we describe the manufacturing process of samplers and results for performance testing on MIST. Methyl salicylate(MeS) is used to simulate chemical agent vapor and the vapor sampler was used to monitor chemical concentration of MeS inside the protective suit system while worn. Values of protection factors(PF) were also analyzed to provide an indication of the protection level of the suit system evaluate by MIST. The results obtained by home-made samplers(ADD samplers) and commercially avaliable ones(Natick samplers) showed no significant differences.

Chemical Vapor Deposition Polymerization of Poly(arylenevinylene)s and Applications to Nanoscience

  • Joo, Sung-Hoon;Lee, Chun-Young;Kim, Kyung-kon;Lee, Ki-Ryong;Jin, Jung-Il
    • Bulletin of the Korean Chemical Society
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    • v.27 no.2
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    • pp.169-184
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    • 2006
  • A review is made on the chemical vapor deposition polymerization (CVDP) of insoluble and infusible poly(arylenevinylene)s and its applications to nanoscience. Poly(p-phenylenevinylene) (PPV), poly(naphthylenevinylene)s, poly(2,5-thinenylenevinylene) (PTV), and other homologous polymers containing oligothiophenes could be prepared by the CVDP method in the form of films, tubes, and fibers of nano dimensions. They would be readily converted to graphitic carbons of different structures by thermal treatment. Field emission FE) of carbonized PPV nanotubes, photoconductivity of carbonized PPV/PPV bilayer nanotubes and nanofilms also were studied.

Adsorption of nitrate onto nitrogen-doped activated carbon fibers prepared by chemical vapor deposition

  • Yoo, Pyunghwa;Amano, Yoshimasa;Machida, Motoi
    • Korean Journal of Chemical Engineering
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    • v.35 no.12
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    • pp.2468-2473
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    • 2018
  • Nitrogen-doped activated carbon fibers (ACFs) were prepared by chemical vapor deposition using melamine powder and acetonitrile for introducing quaternary nitrogen on the commercial ACFs, subsequently heated at $950^{\circ}C$ and activated by steam. Adsorption experiments of nitrate in aqueous solution were also conducted to evaluate adsorption capacity of the prepared ACFs using ion chromatography. The amount of introduced nitrogen content and nitrogen species on activated carbon fibers was examined by CHN elemental analyzer and X-ray photoelectron spectroscopy, respectively. As a result, adsorption capacity of quaternary nitrogen-doped ACF (ST-ML-AN-ST) was 0.75 mmol/g, indicating ca. two-times higher than that of untreated ACF (0.38 mmol/g). According to the adsorption data, the Langmuir isotherm model was the best fit. The prepared samples were also regenerated using hydrochloric acid. After regeneration, the adsorption capacity of the nitrogen-doped ACF (ST-ML-AN-ST) showed ca. 80% on average, implying that a portion of nitrates was adsorbed on the prepared ACFs irreversibly.

Effect of Vapor Pressure of Adsorbate on Adsorption Phenomena (흡착질의 증기압이 흡착에 미치는 영향)

  • Kim, Sang-Won;Kwon, Jun-Ho;Kang, Jeong-Hwa;Song, Seung-Koo
    • Journal of Environmental Science International
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    • v.17 no.1
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    • pp.67-75
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    • 2008
  • Adsorption process is largely influenced by pore structures of adsorbents and physical properties of adsorbates and adsorbents. The previous studies of this laboratory was focused on the role of pore structures of adsorbents. And we found some pores of adsorbates which have larger pore diameters than the diameter of adsorbate are filled with easily. In this study the effects of physical and chemical properties of adsorbates and adsorbents, such as pore size distribution, vapor pressure on adsorption were investigated more thoroughly at the concentration of adsorbate of 1000 ppm. The adsorption in the pore ranges of $2{\sim}4$ times of adsorbates's diameter could be explained by space filling concept. But there was some condensation phenomena at larger pore ranges. The errors between the adsorbed amount of non-polar adsorbates and the calculated amounts by considering factors were found to be 44.46%, positively, and -142%, negatively. When vapor pressure is considered, the errors between the adsorbed amount of non-polar adsorbates and the calculated amounts were in the range of $1.69%{\sim}32.25%$ positively, and negatively $-1.08%{\sim}-63.10%$.

Metal Organic Chemical Vapor Deposition Characteristics of Germanium Precursors (Metal Organic Chemical Vapor Deposition법을 이용한 Germanium 전구체의 증착 특성 연구)

  • Kim, Sun-Hee;Kim, Bong-June;Kim, Do-Heyoung;Lee, June-Key
    • Korean Journal of Materials Research
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    • v.18 no.6
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    • pp.302-306
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    • 2008
  • Polycrystalline germanium (Ge) thin films were grown by metal organic chemical vapor deposition (MOCVD) using tetra-allyl germanium [$Ge(allyl)_4$], and germane ($GeH_4$) as precursors. Ge thin films were grown on a $TiN(50nm)/SiO_2/Si$ substrate by varying the growth conditions of the reactive gas ($H_2$), temperature ($300-700^{\circ}C$) and pressure (1-760Torr). $H_2$ gas helps to remove carbon from Ge film for a $Ge(allyl)_4$ precursor but not for a $GeH_4$ precursor. $Ge(allyl)_4$ exhibits island growth (VW mode) characteristics under conditions of 760Torr at $400-700^{\circ}C$, whereas $GeH_4$ shows a layer growth pattern (FM mode) under conditions of 5Torr at $400-700^{\circ}C$. The activation energies of the two precursors under optimized deposition conditions were 13.4 KJ/mol and 31.0 KJ/mol, respectively.

Water - Assisted Efficient Growth of Multi-walled Carbon Nanotubes by Thermal Chemical Vapor Deposition

  • Choi, In-Sung;Jeon, Hong-Jun;Kim, Young-Rae;Lee, Nae-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.418-418
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    • 2009
  • Vertically aligned arrays of multi-walled carbon nanotube (MWCNT) on layered Si substrates have been synthesized by water-assisted thermal chemical vapor deposition (CVD). We studied changes in growth by parameters of growth temperature, growth time, rates of gas and annealing time of catalyst. Also, We grew CNTs by adding a little amount of water vapor to enhance the growth of CNTs. $H_2$, Ar, and $C_2H_2$ were used as carrier gas and feedstock, respectively. Before growth, Fe served as catalyst, underneath which AI were coated as an underlayer and a diffusion barrier, respectively, on the Si substrate. The water vapor had a greater effect on the growth of CNTs on a smaller thickness of catalyst. When the water vapor was introduced, the growth of CNTs was enhanced than without water. CNTs grew 1.29 mm for 10 min long by adding the water vapor, while CNTs were 0.73 mm long without water vapor for the same period of time. CNTs grew up to 1.97 mm for 30 min prior to growth termination under adding water vapor. As-grown CNTs were characterized by using scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM), and Raman spectroscopy.

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Comparisons of Adsorption-Desorption Characteristics of Major 10 Kinds Components Consisting of Gasoline Vapor (유증기를 구성하는 주요 10종류 성분의 온도에 따른 흡·탈착특성 비교)

  • Lee, Song-Woo;Na, Young-Soo;Lee, Min-Gyu
    • Journal of Environmental Science International
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    • v.23 no.9
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    • pp.1593-1600
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    • 2014
  • Adsorption and desorption characteristics of the representative 10 kinds components consisting of gasoline vapor on activated carbon were investigated at the temperature range of $-30^{\circ}C{\sim}25^{\circ}C$. The breakthrough curves of each vapors obtained by the Thomas model were well described the breakthrough experimental results of this study. The breakthrough times of each vapors were correlated with the molecular weight, density, and vapor pressure. The breakthrough times had greater correlation with boiling point than molecular weight and density. The slope of the breakthrough curve was a proportional relationship with the rate constant (k) of Thomas model expression. The higher the slope of the breakthrough curve, the rate constant was larger. The biggest slope vapor had the smallest adsorption capacity ($q_e$). Adsorption and desorption characteristics of mixed vapor similar to the gasoline vapor were studied at room temperature ($25^{\circ}C$). The mixed vapor consisting of 9 components; group A (pentane, hexene, hexane), group B (benzene, toluene), group C (octane, ethylbenzene, xylene, nonane) was examined. Group A was not nearly adsorbed because of substitution by group C, and the desorption capacity of group A was smaller than group C. The adsorbed substances were confirmed to be Group C.

Comparison of Adsorption and Desorption Characteristics of Acetone Vapor and Toluene Vapor on Activated Carbons According to Pore Structure (활성탄의 기공구조에 따른 아세톤 증기와 톨루엔 증기의 흡착 및 탈착특성 비교)

  • Lee, Song-Woo;Na, Young-Soo;An, Chang-Doeuk;Lee, Min-Gyu
    • Journal of Environmental Science International
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    • v.21 no.10
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    • pp.1195-1202
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    • 2012
  • The purpose of this work is to study the adsorption and desorption characteristics of acetone vapor and toluene vapor from adsorption tower in the VOCs recovery device. The six kinds of activated carbon with different pore structures were used and the adsorption and desorption characteristics were compared according to pore structure, desorption temperature, and adsorption method, respectively. Adsorption capacity of acetone vapor and toluene vapor by batch method was higher than that by dynamic method. Especially, activated carbon with medium-sized or large pores had more difference in adsorption capacity according to adsorption methods as a result of gradually condensation of vapors on relatively mesopore and large pores. Activated carbons with relatively large pores and relatively small saturated adsorption capacity had excellent desorption ability.