Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2000.11a
- /
- Pages.50-50
- /
- 2000
Chemical Vapor Deposition of Cu thin film from (hfac)Cu(DMB) and water vapor
(hfac)Cu(DMB)를 이용한 Cu MOCVD에서 water vapor의 영향
- Published : 2000.11.01
Abstract
Keywords