• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.362-365
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• 2005

Currently Chemical Mechanical Planarization (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. Especially the CMP pad conditioner, one of the diamond tools, is required to have strong diamond retention. Strong cohesion between diamond grits and metal matrix prevents macro scratch on the wafer. If diamond retention is weak, the diamond will be pulled out of metal matrix. The pulled diamond grits are causative of macro scratch on wafer during CMP process. Firstly, some results will be reported of cohesion between diamond grits and metal matrix on the diamond tools prepared by three different manufacturing methods. A measuring instrument with sharp cemented carbide connected with a push-pull gauge was manufactured to measure the cohesion between diamond grits and metal matrix. The retention force of brazed diamond tool was stronger than the others. The retention force was also increased in proportion to the contact area of diamond grits and metal matrix. The brazed diamond tool has a strong chemical combination of the interlayer composed of chrome in metal matrix and carbon which enhance the interfacial cohesion strength between diamond grits and metal matrix. Secondly, we measured real-time data of the coefficient of friction and the pad wear rate by using CMP tester (CETR, CP-4). CMP pad conditioner samples were manufactured by brazed, electro-plated and sintered methods. The coefficient of friction and the pad wear rate were shown differently according to the arranged diamond patterns. Consequently, the coefficient of friction is increased according as the space between diamonds is increased or the concentration of diamonds is decreased. The pad wear rate is increased according as the degree of diamond protrusion is increased.

• Bulletin of the Korean Chemical Society
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• v.32 no.6
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• pp.1902-1906
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• 2011

Sulfonated poly(fluorinated arylene ether)s (SDF-F)/poly[(N-vinylimidazole)-co-(3-methacryloxypropyl-trimethoxysilane)] (poly(VI-co-MPS))/poly(tetrafluoroethylene) (PTFE) is prepared for a high temperature proton exchange membrane fuel cell (PEMFC). The reaction of the membrane with phosphoric acid forms silicate phosphor, as a chemically bound proton carrier, in the membrane. Thus-formed silicate phosphor, nitrogen in the imidazole ring, and physically bound phosphoric acid act as proton carriers in the membrane. The physico-chemical and electrochemical properties of the membrane are investigated by various analytical tools. The phosphoric acid uptake and proton conductivity of the SDF-F/poly(VI-co-MPS)/PTFE membrane are higher than those of SDF-F/PVI/PTFE. The power densities of cells with SDF-F/poly(VI-co-MPS)/PTFE membranes at 0.6 V are 286, 302, and 320 mW $cm^{-2}$ at 150, 170, and 190 $^{\circ}C$, respectively. Overall, the SDFF/poly(VI-co-MPS)/PTFE membrane is one of the candidates for anhydrous HT-PEMFCs with enhanced mechanical strength and improved cell performance.

• The KSFM Journal of Fluid Machinery
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• v.14 no.6
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• pp.61-67
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• 2011

The study is to analyze the chemical and heat-flow reactions in the hydrogen generation unit(autothermal reformer), using computational numerical tools. Autothermal reformer(ATR) is involved in complex chemical reaction, mass and heat transfer due to exothermic and endothermic reactions. Therefore it is necessary to reveal the effects of various operation parameters and geometries on the ATR performance by using numerical analysis. Numerical analysis needs to dominant chemical reactions that includes Full Combustion(FC) reaction, Steam Reforming(SR) reaction, Water-Gas Shift(WGS) reaction and Direct Steam Reforming(DSR) reaction. The objective of the study is to improve theoretically the reformer design capability for the goal of high hydrogen production in the autothermal reformer using methane. Hydrogen production reached maximum in a certain value of Oxygen to Carbon Ratio(OCR) or Steam to Carbon Ratio(SCR). When the longitudinal distance to dimeter ratio(L/D) is increased, hydrogen production increases.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.2
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• pp.101-106
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• 2017

The chemical mechanical planarization (CMP) process combines the chemical effect of slurry with the mechanical effect of abrasive (slurry)-wafer-pads The slurry delivery system has a notable effect on polishing results, because the slurry distribution is changed by the supply method. Thus, the investigation of slurry pumps and nozzles with regard to the slurry delivery system becomes important. This paper investigated the effect of a centrifugal slurry pump on a spray nozzle system in terms of uniform slurry supply under a rotating copper (Cu) wafer, based on experimental results and computational fluid dynamics (CFD). In conventional tools, the slurry is unevenly and discontinuously supplied to the pad, due to a pulsed flow caused by the peristaltic pump and distributed in a narrow area by the tube nozzle. Adopting the proposed slurry delivery system provides a higher uniformity and lowered shear stress than usual methods. Therefore, the newly developed slurry delivery system can improve the CMP performance.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.147.1-147.1
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• 2011

We investigate the chemical differentiation in F, G, K type stars with and without planets to extend the work by Kang et al. (2011) to various spectral types. Since the primordial chemical composition has been preserved in the stellar atmosphere, stellar metallicity can provide the information on the primordial material, which is the potential building block of planets. Therefore, we can explore the favored conditions for planet formation through the comparison of chemical compositions between planet-host stars (PHSs) and stars without planets. In this work, we analyze 19 F, G, and K type stars. In each spectrum, we measure equivalent widths (EWs) of Fe, Na, Mg, Al, Si, Ca, Sc, Ti, V, Cr, Mn, Co, and Ni using TAME (Tools for Automatic Measurement of Equivalent width). The abundances of these species can be derived with the measured EWs and MOOG code (Sneden 1973). Like results by precedent studies, we find that planet-host stars have abundances higher than stars without planets. The typical difference in the abundances of Na, Mn, Co and Ni is $0.4{\pm}0.2dex$. In addition, as found in Kang et al. (2011), Mn is the most different element between PHSs and comparison stars.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.12
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• pp.2340-2348
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• 1992

Recently, various film coated insert tools have been used in order to improve tool life by several different vapor deposition or chemical vapor deposition. Especially, TiN coated drills have been broadly studied because of improving drill performance in terms of drill life, work quality and its brilliant color. Nevertheless, because of the poor adhesion between TiN film and drill, it was difficult to attain the better drill performance. Therefore, to improve adhesion of TiN films, we sputtered titanium as interlayer prior to TiN deposition on drill by PECVD(Plasma Enhanced Chemical Vapor Deposition). The results indicate that Ti/TiN coated drills achieve about 2.6 times life improvement, while TiN coated drills only 2 times. Wear characteristics of tested drills were examined using SEM, and the results were correlated with drill life and roughness of drilled holes.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.395-400
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• 2005

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The damaged layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• Korean Chemical Engineering Research
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• v.56 no.2
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• pp.240-244
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• 2018

There is growing concern about cross infection among the patients to patients, patients to staffs, and tools to patients in healthcare facilities, especially in dentistry. In this study, the most widely used dental impression materials were prepared and the synergy effect of Chlorhexidine and essential oil on antimicrobial activity was examined in the impression materials. Chlorhexidine concentration of 0.1 wt% and 0.5 wt% showed no antimicrobial activity on Escherichia coli (E. coli) and Candida albicans. At 1.0 wt% Chlorhexidine, 0% of E. coli and 34.7% of Candida albicans were survived. Bergamot (Essential oil) concentration of 0.5 wt% and 1.0 wt% showed no antimicrobial activity on E. coli. At 2.0 wt% Bergamot oil, 71.9% of E. coli were survived. Tea tree oil (Essential oil) of 0.5 wt% showed no antimicrobial activity on E. coli. At 1.0 wt% Tea tree oil, 11.2% of E. coli was survived. At 2.0 wt% Tea tree oil, no E. coli was survived. However, no E. coli was survived at the concentration of 0.8 wt% Bergamot with 0.3 wt% Chlorhexidine. At the concentration of 0.8 wt% Tea Tree oil with 0.3 wt% Chlorhexidine, 1.3% of E. coli were survived. The experimental results showed that the synergy effects between Chlorhexidine and essential oils on antimicrobial activity were prominent.

• Genomics & Informatics
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• v.8 no.2
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• pp.63-69
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• 2010

Monofunctional biosynthetic peptidoglycan transglycosylase (MBPT) catalyzes the formation of the glycan chain in bacterial cell walls from peptidoglycan subunits: N-acetylglucosamine (NAG) and acetylmuramic acid (NAM). Bifunctional glycosyltransferases such as the penicillin binding protein (PBP) have peptidoglycan glycosyltransferase (PGT) on their C terminal end which links together the peptidoglycan subunits while transpeptidase (TP) on the N terminal end cross-links the peptide moieties on the NAM monosaccharide of the peptide subunits to create the bacterial cell wall. The singular function of MBPT resembles the C terminal end of PBP as it too contains and utilizes a similar PGT domain. In this article we analyzed the infectious and non infectious protein sequences of MBPT from 31 different strains of bacteria using a variety of bioinformatic tools. Motif analysis, dot-plot comparison, and phylogenetic analysis identified a number of significant differences between infectious and non-infectious protein sequences. In this paper we have made an attempt to explain, analyze and discuss these differences from an evolutionary perspective. The results of our sequence analysis may open the door for utilizing MBPT as a new target to fight a variety of infectious bacteria.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.39-46
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• 2006

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.