• Journal of Sensor Science and Technology
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• v.32 no.5
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• pp.328-333
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• 2023

This study experimentally verified the etch rate of the SiO₂ sacrificial layer etching process with a single etch hole using vapor-phase hydrogen fluoride (VHF) etching. To fabricate small-sized polysilicon etch holes, both circular and triangular pattern masks were employed. Etch holes were fabricated in the polysilicon thin film on the SiO₂ sacrificial layer, and VHF etching was performed to release the polysilicon thin film. The lateral etch rate was measured for varying etch hole sizes and sacrificial layer thicknesses. Based on the measured results, we obtained an approximate equation for the etch rate as a function of the etch hole size and sacrificial layer thickness. The etch rates obtained in this study can be utilized to minimize structural damage caused by incomplete or excessive etching in sacrificial layer processes. In addition, the results of this study provide insights for optimizing sacrificial layer etching and properly designing the size and spacing of the etch holes. In the future, further research will be conducted to explore the formation of structures using chemical vapor deposition (CVD) processes to simultaneously seal etch hole and prevent adhesion owing to polysilicon film vibration.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.18 no.1
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• pp.46-63
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• 2024

One of the biggest dangers in the globe is water contamination. Water is a necessity for human survival. In most cities, the digging of borewells is restricted. In some cities, the borewell is allowed for only drinking water. Hence, the scarcity of drinking water is a vital issue for industries and villas. Most of the water sources in and around the cities are also polluted, and it will cause significant health issues. Real-time quality observation is necessary to guarantee a secure supply of drinking water. We offer a model of a low-cost system of monitoring real-time water quality using IoT to address this issue. The potential for supporting the real world has expanded with the introduction of IoT and other sensors. Multiple sensors make up the suggested system, which is utilized to identify the physical and chemical features of the water. Various sensors can measure the parameters such as temperature, pH, and turbidity. The core controller can process the values measured by sensors. An Arduino model is implemented in the core controller. The sensor data is forwarded to the cloud database using a WI-FI setup. The observed data will be transferred and stored in a cloud-based database for further processing. It wasn't easy to analyze the water quality every time. Hence, an Optimized Neural Network-based automation system identifies water quality from remote locations. The performance of the feed-forward neural network classifier is further enhanced with a hybrid GA- PSO algorithm. The optimized neural network outperforms water quality prediction applications and yields 91% accuracy. The accuracy of the developed model is increased by 20% because of optimizing network parameters compared to the traditional feed-forward neural network. Significant improvement in precision and recall is also evidenced in the proposed work.

• Smart Media Journal
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• v.13 no.4
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• pp.23-32
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• 2024

Large-scale fires and their consequential damages are becoming increasingly common, but confidence in fire detection systems is waning. Recently, widely-used chemical fire detectors frequently generate lots of false alarms, while video-based deep learning fire detection is hampered by its time-consuming and expensive nature. To tackle these issues, this study proposes a fire detection model utilizing an autoencoder approach. The objective is to minimize false alarms while achieving swift and precise fire detection. The proposed model, employing an autoencoder methodology, can exclusively learn from normal data without the need for fire-related data, thus enhancing its adaptability to diverse environments. By amalgamating data from five distinct sensors, it facilitates rapid and accurate fire detection. Through experiments with various hyperparameter combinations, the proposed model demonstrated that out of 14 scenarios, only one encountered false alarm issues. Experimental results underscore its potential to curtail fire-related losses and bolster the reliability of fire detection systems.

• Journal of Sensor Science and Technology
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• v.10 no.1
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• pp.62-70
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• 2001

The ZnSe sample grown by chemical bath deposition (CBD) method were annealed in Ar gas at $45^{\circ}C$. Using extrapolation method of X-ray diffraction pattern, it was found to have zinc blend structure whose lattice parameter $a_o$ was $5.6687\;{\AA}$. From Hall effect, the mobility was likely to be decreased by impurity scattering at temperature range from 10 K to 150 K and by lattice scattering at temperature range from 150 K to 293 K. The band gap given by the transmission edge changed from $2.700{\underline{5}}\;eV$ at 293 K to $2.873{\underline{9}}\;eV$ at 10 K. Comparing photocurrent peak position with transmission edge, we could find that photocurrent peaks due to excition electrons from valence band, ${\Gamma}_8$ and ${\Gamma}_7$ and to conduction band ${\Gamma}_6$ were observed at photocurrent spectrum. From the photocurrent spectra by illumination of polarized light on the ZnSe thin film, we have found that values of spin orbit coupling splitting ${\Delta}so$ is $0.098{\underline{1}}\;eV$. From the PL spectra at 10K, the peaks corresponding to free bound excitons and D-A pair and a broad emission band due to SA is identified. The binding energy of the free excitons are determined to be $0.061{\underline{2}}\;eV$ and the dissipation energy of the donor -bound exciton and acceptor-bound exciton to be $0.017{\underline{2}}\;eV$, $0.031{\underline{0}}\;eV$, respectively.

• Korean Journal of Materials Research
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• v.4 no.8
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• pp.934-944
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• 1994

Effects of residual chloride on thermal decomposition behaviour of a-stannic acid and physical properties of $SnO_{2}$ powder were observed. The powder was fabricated by hydroxide method; $\alpha$-stannic acid was precipitated by mixing acqueous solutions of $SnCl_{4}$ and $NH_{4}$OH . The precipitate was washed with $NH_{4}NO_{3}$ solution while washing was controlled to be of three grades to modify its residual chloride content. The precipitate was dried at $1100^{\circ}C$ ~ 24h and calcined in air at $500^{\circ}C$ ~ $1100^{\circ}C$ for one hour. Thermal decomposition behaviour of $\alpha$-stannic acid was examined by a DT-TGA and a FTIR. Chemical composition and physical properties of $SnO_{2}$ powder were observed by an AES, a BET and a TEM, respectively. With a reduction in chloride content, the relative crystallite size of $SnO_{2}$ powder slightly increased by a low-temperature-calcining. However, at a high calcining temperature(T), the reverse relation occured. It was suggested that chloride ion replaces part of lattice oxygen site of a-stannic acid. Also, chloride ion on the site was suggested to retard de-hydration as well as crystalization at a low T while to promote crystal growth of $SnO_{2}$ by forming oxygen vacancy at a high T.

• Journal of Ecology and Environment
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• v.41 no.3
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• pp.45-53
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• 2017

Background: There have been many studies on the growth conditions of Zostera marina and Zostera japonica, but few studies have examined how spatial and temporal factors affect growth in established seagrass beds or the distribution range and shoot density. This study aims to clarify the factors that determine the temporal and spatial distribution of Zostera marina and Zostera japonica in the Seto Inland Sea east of Yamaguchi Prefecture. Methods: The study site is in Hiroshima Bay of the Seto Inland Sea, along the east coast of Yamaguchi Prefecture, Japan. We monitored by diving observation to confirm shoot density, presence or absence of both species and observed water temperature, salinity by sensor in study sites. Results: The frequency of occurrence of Zostera marina was high in all seasons, even in water depths of D.L. + 1 to -5 m ($80{\pm}34%$ to $89{\pm}19%$; mean ${\pm}$ standard deviation), but lower (as low as $43{\pm}34%$) near the breakwall, where datum level was 1 to 2 m, and it was further reduced in datum level -5 m and deeper. The frequency of occurrence of Zostera japonica was highest in water with a datum level of +1 to 0 m. However, in datum level of 0 m or deeper, it became lower as the water depth became deeper. Datum level +1 m to 0 m was an optimal water depth for both species. The frequency of occurrence and the shoot density of both species showed no negative correlation. In 2011, the daily mean water temperature was $10^{\circ}C$ or less on more days than in other years and the feeding damage by S. fuscescens in the study sites caused damage at the tips. Conclusions: We considered that the relationship between these species at the optimal water depth was not competitive, but due to differences in spatial distribution, Zostera marina and Zostera japonica do not influence each other due to temperature conditions and feeding damage and other environmental conditions. Zostera japonica required light intensity than Zostera marina, and the water depth played an important role in the distribution of both species.

• Analytical Science and Technology
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• v.26 no.1
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• pp.42-50
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• 2013

This paper describes the electrocatalytic activity for the oxidation of small biomolecules on the surface of Pt-Ru nanoparticles supported by $TiO_2$-hollow sphere prepared for use in sensor applications or fuel cells. The $TiO_2$-hollow sphere supports were first prepared by sol-gel reaction of titanium tetraisopropoxide with poly(styrene-co-vinylphenylboronic acid), PSB used as a template. Pt-Ru nanoparticles were then deposited by chemical reduction of the $Pt^{4+}$ and $Ru^{3+}$ ions onto $TiO_2$-hollow sphere ($Pt-Ru@TiO_2-H$). The prepared $Pt-Ru@TiO_2-H$ nanocomposites were characterized by transmission electron microscopy (TEM), X-ray diffraction (XRD), and elemental analysis. The electrocatalytic efficiency of Pt-Ru nanoparticles was evaluated via ethanol, methanol, dopamine, ascorbic acid, formalin, and glucose oxidation. The cyclic voltammograms (CV) obtained during the oxidation studies revealed that the $Pt-Ru@TiO_2-H$ nanocomposites showed high electrocatalytic activity for the oxidation of biomolecules. As a result, the prepared Pt-Ru catalysts doped onto $TiO_2$-H sphere nanocomposites supports can be used for non-enzymatic biosensor or fuel cell anode electrode.

• The Korean Journal of Physiology and Pharmacology
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• v.21 no.3
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• pp.309-316
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• 2017

Transient receptor potential vanilloid 3 (TRPV3) is a non-selective cation channel with modest permeability to calcium ions. It is involved in intracellular calcium signaling and is therefore important in processes such as thermal sensation, skin barrier formation, and wound healing. TRPV3 was initially proposed as a warm temperature sensor. It is activated by synthetic small-molecule chemicals and plant-derived natural compounds such as camphor and eugenol. Schisandra chinensis (Turcz.) Baill (SC) has diverse pharmacological properties including antiallergic, anti-inflammatory, and wound healing activities. It is extensively used as an oriental herbal medicine for the treatment of various diseases. In this study, we investigated whether SC fruit extracts and seed oil, as well as four compounds isolated from the fruit can activate the TRPV3 channel. By performing whole-cell patch clamp recording in HEK293T cells overexpressing TRPV3, we found that the methanolic extract of SC fruit has an agonistic effect on the TRPV3 channel. Furthermore, electrophysiological analysis revealed that ${\gamma}$-schisandrin, one of the isolated compounds, activated TRPV3 at a concentration of $30{\mu}M$. In addition, ${\gamma}$-schisandrin (${\sim}100{\mu}M$) increased cytoplasmic $Ca^{2+}$ concentrations by approximately 20% in response to TRPV3 activation. This is the first report to indicate that SC extract and ${\gamma}$-schisandrin can modulate the TRPV3 channel. This report also suggests a mechanism by which ${\gamma}$-schisandrin acts as a therapeutic agent against TRPV3-related diseases.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.421-426
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• 2006

In examining particulate deposits in the pipes of a chemical vapor deposition (CVD) system, vibration diagnostics is compared and studied against ultrasonic diagnostics, The latter method involves pulsing the outer wall of pipes with an ultrasonic sensor and analyzing the resulting echo to observe particulate deposits inside pipes. Vibration diagnostics examines the existence of particulate deposits by analyzing the difference in the frequencies generated when a vibrator is adhered to the outer wall of pipes. With ultrasonic diagnostics, good test results were obtained only when particulate deposits were attached to the inner wall of the pipes, After some time, however, particulate deposits were not detected properly, as the ultrasonic wave failed to cross the fine gaps created between the inner wall of the pipe and the deposits. The ultrasonic wave bounced back because of the dried particulate deposits on the wall. Thus, it has been proven that the ultrasonic diagnostics is not an appropriate means of examining the particulate deposits in a vacuum, On the other hand, vibration diagnostics succeeded in detecting the particulate deposits regardless of the lapsed time. In conclusion, the vibration diagnostics is being expected as the effective method in monitoring the particulate deposits inside pipes in the CVD system where the desired behavior is reduced frequency along with the particulate deposits in comparison to the case where the pipe is clean.

• Maxillofacial Plastic and Reconstructive Surgery
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• v.35 no.1
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• pp.38-50
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• 2013

Purpose: The aim of this study is to evaluate the effect and potential of electron beam (E-beam) irradiation treatment to the synthetic bony mixtures composed of hydroxyapatite (HA; Bongros$^{(R)}$, Bio@ Co., Korea) and tricalcium phosphate (${\beta}$-TCP, Sigma-Aldrich Co., USA), mixed at various ratios and of type I collagen (Rat tail, BD Biosciences Co., Sweden) as an organic matrix. Methods: We used 1.0~2.0 MeV linear accelerator and 2.0 MeV superconductive linear accelerator (power 100 KW, pressure 115 kPa, temperature $-30{\sim}120^{\circ}C$, sensor sensitivity 0.1~1.2 mV/kPa, generating power sensitivity 44.75 mV/kPa, supply voltage $5{\pm}0.25$ V) with different irradiation dose, such as 1, 30 and 60 kGy. Structural changes in this synthetic bone material were studied in vitro, by scanning electron microscopy (SEM), elementary analysis and field emission scanning electron microscope (FE-SEM), attenuated total reflection (ATR), and electron spectroscopy for chemical analysis (ESCA). Results: The large particular size of HA was changed after E-beam irradiation, to which small particle of TCP was engaged with organic collagen components in SEM findings. Conclusion: The important new in vitro data to be applicable as the substitutes of artificial bone materials in dental and medical fields will be able to be summarized.