Comparison of Utrasonic and Vibration Diagnostic Techniques for the Inspection of Pipes in CVD System |
Yun Ju-Young
(Vacuum Center, Korea Research Institute of Standards and Science)
Seong Dae-Jin (Vacuum Center, Korea Research Institute of Standards and Science) Shin Yong-Hyoen (Vacuum Center, Korea Research Institute of Standards and Science) Lee Ji-Hun (Dept. of Materials Chemistry & Engineering, Konkuk University) Moon Doo-Kyung (Dept. of Materials Chemistry & Engineering, Konkuk University) Kang Sang-Woo (Vacuum Center, Korea Research Institute of Standards and Science) |
1 | G. Eom, C. Park, Y. Shin, K. Chung, S. Park, and W. Choe, J. Han, Appl. Phys, Lett. 83, 1261 (2003) DOI ScienceOn |
2 | K. Kamali Moghadam and M. M. Nasseri, Appl. Rad. Iso. 61, 461 (2004) DOI ScienceOn |
3 | Jordi Salazar, Antoni Turo, Juan A. Chavez, and Migel J. Garcia, Ultrasonics 42, 155 (2004) DOI ScienceOn |
4 | Robert E. Green Jr., Ultrasonics 42, 9 (2004) DOI ScienceOn |
5 | A. Intemann, H. Koerner, and F. Koch, J. Electrochem. Soc. 140, 3215 (1993) DOI ScienceOn |
6 | Y. Itakura, N. Fujii, and T. Sawada, Phys. Chem. Earth(B) 25, 71 (2000) DOI ScienceOn |
7 | T. R. Hay and J. L. Rose, Food Cont. 14, 481 (2003) DOI ScienceOn |
8 | J. Y. Yun, M. Y. Park, and S. W. Rhee, J. Electrochem. Soc. 145, 1804 (1999) |