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Comparison of Utrasonic and Vibration Diagnostic Techniques for the Inspection of Pipes in CVD System  

Yun Ju-Young (Vacuum Center, Korea Research Institute of Standards and Science)
Seong Dae-Jin (Vacuum Center, Korea Research Institute of Standards and Science)
Shin Yong-Hyoen (Vacuum Center, Korea Research Institute of Standards and Science)
Lee Ji-Hun (Dept. of Materials Chemistry & Engineering, Konkuk University)
Moon Doo-Kyung (Dept. of Materials Chemistry & Engineering, Konkuk University)
Kang Sang-Woo (Vacuum Center, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.15, no.4, 2006 , pp. 421-426 More about this Journal
Abstract
In examining particulate deposits in the pipes of a chemical vapor deposition (CVD) system, vibration diagnostics is compared and studied against ultrasonic diagnostics, The latter method involves pulsing the outer wall of pipes with an ultrasonic sensor and analyzing the resulting echo to observe particulate deposits inside pipes. Vibration diagnostics examines the existence of particulate deposits by analyzing the difference in the frequencies generated when a vibrator is adhered to the outer wall of pipes. With ultrasonic diagnostics, good test results were obtained only when particulate deposits were attached to the inner wall of the pipes, After some time, however, particulate deposits were not detected properly, as the ultrasonic wave failed to cross the fine gaps created between the inner wall of the pipe and the deposits. The ultrasonic wave bounced back because of the dried particulate deposits on the wall. Thus, it has been proven that the ultrasonic diagnostics is not an appropriate means of examining the particulate deposits in a vacuum, On the other hand, vibration diagnostics succeeded in detecting the particulate deposits regardless of the lapsed time. In conclusion, the vibration diagnostics is being expected as the effective method in monitoring the particulate deposits inside pipes in the CVD system where the desired behavior is reduced frequency along with the particulate deposits in comparison to the case where the pipe is clean.
Keywords
CVD; Pipe; Particle; Ultrasonic; Vibration; Monitorin;
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