• 대한기계학회논문집A
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• 제33권10호
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• pp.1023-1028
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• 2009

Cleaning is required following CMP (chemical mechanical planarization) to remove particles. The minimization of particle residue is required with each successive technology generation, and the cleaning of wafers becomes more complicated. In copper damascene process for interconnection structure, it utilizes 2-step CMP consists of Cu and barrier CMP. Such a 2-steps CMP process leaves a lot of abrasive particles on the wafer surface, cleaning is required to remove abrasive particles. In this study, the chemical mechanical cleaning(CMC) is performed various conditions as a cleaning process. The CMC process combined mechanical cleaning by friction between a wafer and a pad and chemical cleaning by CMC solution consists of tetramethyl ammonium hydroxide (TMAH) / benzotriazole (BTA). This paper studies the removal of abrasive on the Cu wafer and the cleaning efficiency of CMC process.

• 한국고분자학회:학술대회논문집
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• 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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• pp.83-84
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• 2006

In aqueous phase, we directly prepared conducting and photoluminescent nano-structured particles by oxidation polymerization. Thiophene(PT) was initiated by $FeCl_{3}/H_{2}O_{2}$ (catalyst/oxidant) combination system. And, polydispersed core-shell poly(styrene/thiophene) and polyaniline(PANI)-coated multi core-shell polystyrene latex particles were successfully prepared by oxidative and radical polymerization. The resulting latex particles have fine improved luminescence and conductive efficiency and dispersion state due to the PT and PANI shell. Hyper functionalized nanoparticle would be expected to increase the processibility in various electrical and electro-optical fields.

• 한국생물공학회:학술대회논문집
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• 한국생물공학회 2005년도 생물공학의 동향(XVII)
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• pp.586-587
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• 2005

• Membrane and Water Treatment
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• 제6권5호
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• pp.411-422
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• 2015

Membrane modification by different concentrations of acrylic acid has been described. Grafting of acrylic acid to the surface of a polypropylene membrane was obtained by a Fenton-type reaction. Membrane permeability seemed to have been dependent on the value of pH in the solution. To explain tendency, a simple theoretical model was developed. The model incorporates explicitly statistical conformations of a polyacid chain grafted onto the pore surface. The charged capillary model with a varying diameter for porous membranes was then used to evaluate the permeability of the membrane. It has been shown both theoretically and experimentally that the permeability of a grafted membrane depends on the pH of the solution.

• Korean Chemical Engineering Research
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• 제53권5호
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• pp.531-539
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• 2015

클로로알카리 산업은 염화나트륨 수용액의 전기분해로 연간 약 7천만 톤의 가성소다 및 염소를 생산하는 전 세계적으로 가장 큰 전기화학 공정 중 하나이다. 클로로알카리 공정에서는 DSA(Dimensionally Stable Anodes) 전극인 $RuO_2$ 및 $IrO_2$를 주로 사용하여 염소를 생산하며 상업적으로 사용되고 있는 전극에 비하여 염소 발생 효율이 높은 전극을 개발하려는 연구가 계속되고 있다. 그러나 보다 염소 발생 효율이 좋은 전극을 개발하기 위해서는 DSA 전극에서의 염소 발생 메커니즘에 대한 이해가 뒷받침되어야 한다. 따라서 본 글에서는 기존 연구를 중심으로 DSA 전극에서 염소 발생 메커니즘 연구가 현재까지 어떻게 발전되어 왔는지 검토하고 염소 발생 메커니즘의 핵심적인 요인들을 분석 및 정리하여 DSA 전극에서 염소 발생을 체계적으로 이해하는데 도움이 되고자 한다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.739-742
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• 2000

Micro machining technology has been studied to fabricate small size and high accuracy milli-structure products. To perfectly overcome the conventional mechanical machining methods, the chemical mechanical micro machining(C3M) process was developed. The mechanism of C3M process is that chemical solution etches the material and results in the generation of the chemical reacted layer, and the mechanical micro tool subsequently removes the layer. From the fundamental experiments, the C3M process has been founded to have the advantages of lower machining resistance, tool wear, and higher surface quality and form accuracy than conventional methods. This study focuses on the micro grooving of both the metallic material(SKDII, A1) and hard brittle silicon oxide.

• 한국표면공학회지
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• 제40권6호
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• pp.271-278
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• 2007

In this study, applicable possibility in chemical decontamination for reactor coolant pump(RCP) was investigated for the various stainless steels. The stainless steel(STS) 304 showed the best electrochemical properties for corrosion current density and the lowest weight loss ratio in chemical decontamination process model 3-3 than other materials. The weightloss quantity in chemical decontamination process model 3-3 presents the lowest value compare to the other chemical decontamination process model 1, 2, 3-1 and 3-2. In the case of SEM observation, the pitting corrosion was generated in both STS 415 and STS 431 with the increasing numbers of cycle. The intergranular corrosion in STS 431 was sporadically observed. The sizes of their pitting corrosion were also increased with increasing cycle numbers.

• 한국유변학회:학술대회논문집
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• 한국유변학회 2006년도 춘계 학술발표회 논문집
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• pp.85-88
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• 2006

• Bulletin of the Korean Chemical Society
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• 제35권6호
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• pp.1832-1836
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• 2014

A deep understanding of the metallic silver catalysts formation process on oxide support and the formation mechanism is of great scientific and practical meaning for exploring better catalyst preparing procedures. Herein the thermal decomposition process of supported silver catalyst with silver oxalate as the silver precursor in the presence of ethylenediamine and ethanolamine is carefully investigated by employing a variety of characterization techniques including thermal analysis, in situ diffuse reflectance infrared Fourier transform spectroscopy, scanning electron microscopy, and X-ray diffraction. The formation mechanism of supported silver particles was revealed. Results showed that formation of metallic silver begins at about $100^{\circ}C$ and activation process is essentially complete below $145^{\circ}C$. Formation of silver was accompanied by decomposition of oxalate group and removal of organic amines. Catalytic performance tests using the epoxidation of ethylene as a probe reaction showed that rapid activation (for 5 minutes) at a relatively low temperature ($170^{\circ}C$) afforded materials with optimum catalytic performance, since higher activation temperatures and/or longer activation times resulted in sintering of the silver particles.

• 한국수소및신에너지학회논문집
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• 제28권4호
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• pp.352-360
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• 2017

Polygeneration process is widely used to pursuit high efficiency by sharing electricity, utility, refrigeration and the utilization of product chemicals. In this paper, performance analysis of the 450 MW Class polygeneration process was conducted with various syngas generated from coal and biomass gasifier. WGSR and PSA process were employed for hydrogen production and separation. Process modeling and dynamic simulation was carried out, and the results were compared with NETL report. Net power of the polygeneration process was 439 MW considering power consumption. More than 90% of CO was converted at WGSR and the hydrogen purity of PSA was more than 99.99%.