• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.12
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• pp.8-13
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• 2001

Cerium oxide ($CeO_2$) thin film has been proposed as a buffer layer between the ferroelectric thin film and the Si substrate in Metal-Ferroelectric-Insulator-Silicon (MFIS) structures for ferroelectric random access memory (FRAM) applications. In this study, $CeO_2$ thin films were etched with $Cl_2$/Ar gas mixture in an inductively coupled plasma (ICP). Etch properties were measured for different gas mixing ratio of $Cl_2$($Cl_2$+Ar) while the other process conditions were fixed at RF power (600 W), dc bias voltage (-200 V), and chamber pressure (15 mTorr). The highest etch rate of $CeO_2$ thin film was 230 ${\AA}$/min and the selectivity of $CeO_2$ to $YMnO_3$ was 1.83 at $Cl_2$($Cl_2$+Ar gas mixing ratio of 0.2. The surface reaction of the etched $CeO_2$ thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. There is a Ce-Cl bonding by chemical reaction between Ce and Cl. The results of secondary ion mass spectrometer (SIMS) analysis were compared with the results of XPS analysis and the Ce-Cl bonding was monitored at 176.15 (a.m.u). These results confirm that Ce atoms of $CeO_2$ thin films react with chlorine and a compound such as CeCl remains on the surface of etched $CeO_2$ thin films. These products can be removed by Ar ion bombardment.

• Clean Technology
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• v.24 no.3
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• pp.198-205
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• 2018

This study investigated the influence of catalyst preparation on the activity of $Co-CeO_2$ catalyst for $N_2O$ decomposition. $Co-CeO_2$ catalysts were synthesized by co-precipitation and incipient wetness impregnation. In order to estimate the performance of the as prepared catalysts, direct catalytic $N_2O$ decomposition test was carried out under $250{\sim}375^{\circ}C$. As a result, the catalyst prepared by co-precipitation (CoCe-CP) showed an enhanced performance on $N_2O$ decomposition reaction even in the presence of $O_2$ and/or $H_2O$, whereas the impregnation catalyst (CoCe-IM) did not. In order to investigate the difference in catalytic activity, characterization such as XRD, BET, TEM, $H_2-TPR$, $O_2-TPD$, and XPS was conducted. It is confirmed that the particle size and specific surface area were changed depending on the catalyst preparation method and the synthesis process influenced the physical properties of the catalysts. In addition, the improvement in the activity of the catalyst prepared by co-precipitation is due to the enhanced reduction from $Co^{3+}$ to $Co^{2+}$ and the improved oxygen desorption rate. However, it has been confirmed that the surface electron state and binding energy, which are related to $N_2O$ decomposition, do not change depending on the preparation method.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.23 no.6
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• pp.320-324
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• 2013

The effects of $CeO_2$ on catalytic activity of $CeO_2-TiO_2$ for the selective catalytic reduction (SCR) of $NO_x$ were investigated in terms of structural, morphological, and physico-chemical analyseis. $CeO_2-TiO_2$ catalysts were synthesized with three different additions, 10, 20, and 30 wt% of $CeO_2$, by the sol-gel method. The XRD peaks of all specimens were assigned to a $TiO_2$ phase (anatase) and the peaks became broader with the addition of $CeO_2$ because it was dispersed as an amorphous phase on the surface of $TiO_2$ particles. The specific surface area of $TiO_2$ increased with the addition of $CeO_2$ from $60.6306m^2/g$ to $116.2791m^2/g$ due to suppression of $TiO_2$ grain growth by $CeO_2$. The 30 wt% $CeO_2-TiO_2$ catalyst, having the strongest catalytic acid sites ($Br{\Phi}nsted$ and Lewis), showed the highest $NO_x$ conversion efficiency of 98 % at $300^{\circ}C$ among the specimens. It was considered that $CeO_2$ contributes to the improvement of the $NO_x$ conversion of $CeO_2-TiO_2$ catalyst by increasing specific surface area and catalytic acid sites.

• Applied Chemistry for Engineering
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• v.17 no.5
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• pp.483-489
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• 2006

The behavior of rare earth compounds such as $La_{2}O_{3}$, $CeO_{2}$, and $Ca(OH)_{2}$ on the removal of fluoride and heavy metals in the steel wastewater has been investigated. The removal mechanism of fluoride by rare earth elements has been known to be the formation of insoluble compounds between $F^{-}$ and cations such as $La^{3+}$ and $Ce^{4+}$ produced by the dissociation of rare earth compounds (To reduce the running cost of the fluoride wastewater treatment facility, their fluoride removal efficiencies were compared with those of inexpensive rare earth minerals such as natural lanthanide and cerium compound used as a glass polishing agent). All of the rare earth oxides used in this study showed a higher removal efficiency of fluoride than $Ca(OH)_{2}$ in the wastewater. In the case of artificial HF solution, the removal efficiency of fluoride showed in the order: $CeO_{2}$-mineral < $CeO_{2}$ < $Ca(OH)_{2}$ < $La_{2}O_{3}$-mineral < $La_{2}O_{3}$. However, the removal efficiency of fluoride in the wastewater increased in the following order: $Ca(OH)_{2}$ < $CeO_{2}$ mineral < $CeO_{2}$ < $La_{2}O_{3}$ mineral < $La_{2}O_{3}$. All agents showed high efficiencies for the removal of Mn and total Cr in the rare earth compounds. In the case of $Ca(OH)_{2}$, fluoride removal decreased with increasing pH while. However, the rare earth compounds showed a higher fluoride removal in higher pH condition, the optimum pH condition seemed to be around 7 considering both water quality and fluoride removal. Under the pH 7 condition, the $Ca(OH)_{2}$ was superior to rare earth compounds in Mn removal and the lanthanide was superior to others in total Cr removal.