• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.130-135
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• 2023

Plasma-resistant ceramic (PRC) is a material used to prevent internal damage in plasma processing equipment for semiconductors and displays. The challenge is to suppress particles falling off from damaged surfaces and increase retention time in order to improve productivity and introduce the latest miniaturization process. Here, we confirmed the effect of suppressing plasma deterioration and reducing the etch rate through surface treatment of existing PRC with an initial illumination level of 200 nm. In particular, quartz glass showed a decrease in etch rate of up to 10%. Furthermore, it is believed that micro-scale secondary particles formed on the microstructure of each material grow as crystals during the fluoridation process. This is a factor that can act as a killer defect when dropped, and is an essential consideration when analyzing plasma resistance. The plasma etching suppression effect of the initial illumination is thought to be due to partial over etching at the dihedral angle of the material due to the sputtering of re-emission of Ar+-based cations. This means that plasma damage due to densification can also be interpreted in existing PRC studies. The research results are significant in that they present surface treatment conditions that can be directly applied to existing PRC for mass production and a new perspective to analyze plasma resistance in addition to simple etching rates.

• Proceedings of the IEEK Conference
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• 2001.10a
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• pp.173-178
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• 2001

The materials processing factors such as remelting and casting, heat treatment and microstructure, sheet rolling and can body forming in the aluminum can-to-can recycling procedure have been investigated. Aluminum used beverage can(UBC) was remelted together with virgin aluminum. The ceramic filter was used during casting to remove large impurities. As-cast microstructure was composed of large intermetallic compound (mainly $\beta$ -phase) distributed in the aluminum matrix. By heat treatment, $\beta$ -phase was transformed to $\alpha$ -phase which was also formed from $Mg_2$Si particles. The heat treated ingots were hot-rolled at 48$0^{\circ}C$ and cold-rolled to thin sheets. Can making from this thin sheets was successful and earing was measured after can making. There was a critical cold reduction rate for minimum earing. Some cracks were initiated from the impurity particles which was not removed during filtering.

• Korean Membrane Journal
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• v.7 no.1
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• pp.42-50
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• 2005

Among ceramic membranes developed to date, amorphous silica membranes are attractive for gas separation at elevated temperatures. Most of the silica membranes can be formed on a porous support by sol-gel or chemical vapor deposition (CVD) process. To improve gas permselectivity of the membrane, well-controlled pores having desired size and chemical affinity between permeates and membrane become important factors in the preparation of membranes. In this article, we review the literature and introduce our technologies on the microstructure to be solved and pore size control of silica membranes using sol-gel and CVD methods.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.8
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• pp.496-500
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• 2017

$Pb(Mn_{1/3}Nb_{2/3})_{0.07}(Ni_{1/3}Nb_{2/3})_{0.10}(Zr_{0.5}Ti_{0.5})_{0.83}O_3$ composition ceramics with high piezoelectric properties were fabricated by the columbite precursor method for ultrasonic generators, and the effects of sintering temperature on microstructure and piezoelectric properties were systematically investigated. It was found that the tetragonality of the ceramics decreased with increase in sintering temperature. Moreover, excellent physical properties such as $d_{33}=447pC/N$, ${\varepsilon}_r=1,843$, $k_p=0.641$, and $Q_m=1,207$ were obtained for an ultrasonic generator when the second calcination temperature and sintering temperature were $720^{\circ}C$ and $920^{\circ}C$, respectively.

• Journal of the Korean Ceramic Society
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• v.53 no.2
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• pp.234-240
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• 2016

Energetically-modified material using reject fly ash (RFA), generated from thermal power plants, was manufactured to investigate the effect of the material on the physical and chemical characteristics of cement mortar. In order to modify reject fly ash, a vibration mill was used. Particle size, grain shape, and crystal structure of the ash were analyzed. Then, the compressive strength of the mortar using energetically-modified reject fly ash (ERFA) was measured. Microstructure and X-ray diffraction (XRD) patterns were also used in the analysis. As the replacement rate of ERFA increased, the value of the compressive strength tended to decrease. However, it was found that the compressive strength values of 7 and 28 days-cured specimens were higher than those of conventional ordinary Portland cement (OPC) mortar with 10 % replacement rate condition.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.208-208
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• 2008

Micro patterning of conductor line/space on LTCC green sheet in the LTCC module is an important process for miniaturization in 3D integrated circuits. This work presented the effect of inorganic binders on the microstructure, adhesion, electrical resistivity, shrinkage and line/space resolution, which is a part of study in photoimageable conductor paste. The photoimageable conductor paste contains silver powder, polymer binder, monomer, photo-initiator, UV absorber, and solvent. The inorganic binders were furnished with varied weight percentage of anorthite, diopside and MLS-62 glass frits from 0% to 7%. The Line/space sizes thus obtained was under 25 micron.

• Journal of the Korean Ceramic Society
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• v.50 no.3
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• pp.180-185
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• 2013

We investigated the characteristics of hot-pressed pure yttria ceramics, and annealed them in an oxidation atmosphere. Regardless of the heat treatment in the oxidation atmosphere, XRD analysis showed that all the samples had a $Y_2O_3$ phase without structural change. Even though the color variation of the hot-pressed $Y_2O_3$ ceramics was due to the sintering temperatures, the oxidation process turned the color of the $Y_2O_3$ ceramics into white. The color change during oxidation treatment appears to be related to oxygen defects. In addition, oxygen defects also affected the weight change and microstructure of the $Y_2O_3$ ceramics. The $Y_2O_3$ ceramic sintered at $1600^{\circ}C$ had a $5.03g/cm^3$ density, which is close to the theoretical density of $Y_2O_3$. As the sintering temperature increased, small homogeneous grains grew to large grains which affected the Vickers hardness. $Y_2O_3$ ceramics hot-pressed at $1600^{\circ}C$ and annealed at $1200^{\circ}C$ had a flexural strength of 140MPa.

• Journal of Powder Materials
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• v.22 no.6
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• pp.438-442
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• 2015

Porous thick film of alumina which is fabricated by freeze tape casting using a camphene-camphor-acrylate vehicle. Alumina slurry is mixed above the melting point of the camphene-camphor solvent. Upon cooling, the camphene-camphor crystallizes from the solution as particle-free dendrites, with the $Al_2O_3$ powder and acrylate liquid in the interdendritic spaces. Subsequently, the acrylate liquid is solidified by photopolymerization to offer mechanical properties for handling. The microstructure of the porous alumina film is characterized for systems with different cooling rate around the melting temperature of camphor-camphene. The structure of the dendritic porosity is compared as a function of ratio of camphene-camphor solvent and acrylate content, and $Al_2O_3$ powder volume fraction in acrylate in terms of the dendrite arm width.

• Journal of the Korean Ceramic Society
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• v.43 no.5 s.288
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• pp.277-283
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• 2006

A porous material with a surface layer was fabricated from glass abrasive sludge and expanding agents. The glass abrasive sludges were mixed with expanding agents and compacted into precursors. These precursors were sintered in the range of $700-900^{\circ}C$ for 20 min. The sintered porous materials had a surface layer with smaller pores and inner parts with larger pores. The surface layer and closed pores controlled water absorption. As the expanding agent fraction and the sintering temperature increased, the porosity and pore size increased. The porous materials with $Fe_2O_3$ and graphite as the expanding agents had a low absorption ratio of about 3% or lower while the porous material with $CaCO_3$ as the expanding agent had a higher absorption ratio and more open pores.

• Korean Journal of Materials Research
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• v.27 no.7
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• pp.353-358
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• 2017

Recycled cenosphere, which is a hollow shaped particle from fly ash, has become attractive as a building material due to its light weight and excellent heat insulation and soundproof properties. In this paper, we investigated the effect of cenosphere size on the physical and optical properties. High brightness of cenosphere as raw material is required for a wide range of ceramics applications, particularly in fields of building materials and industrial ceramic tiles. Cenospheres were sorted by particle size; the microstructure was analyzed according to the cenosphere size distribution. Cenospheres were generally composed of quartz, mullite, and amorphous phase. Colour measurement corresponding to chemical composition revealed that the contents of iron oxide and carbon in the cenospheres were the major factors determining the brightness of the cenospheres.