• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.163-168
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• 2003

In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of $0.2Pb(Mg_{1/3}Nb_{2/3)O_3-0.38PbZrO_3-0,42PbTiO_3$ followed by lamination and burnout & co-firing processes. The actuators of $10\times10\times0.6~2\textrm{mm}^3$ in size were formed in a way that $60 ~ 200\mu\textrm{m}$ thick were stacked alternatively with $5\mu\textrm{m}$ thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of $90^{\circ}$/$180^{\circ}$ domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

• Proceedings of the Korean Ceranic Society Conference
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• 2003.04a
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• pp.104.2-104
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• 2003

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.4
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• pp.276-280
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• 2020

A linear piezoelectric actuator that utilizes the elliptical motion of the two tips of the actuator is proposed. This device is easy to fabricate owing to its simple structure, consisting of three piezo ceramic benders and is suitable for use in micro robotic applications. A π-shaped structure, which was composed of four piezo ceramic benders, was constructed. Two of the benders were positioned on the center of the actuator, and the joints were attached at the ends of the cantilever. The other two benders were positioned on the side of the actuator and were attached between the joint and the tips. The actuator structure was designed to obtain the first bending mode of the horizontal vibration and the vertical vibration at the same frequency, resulting in elliptical motions at the tips. When two sinusoidal wave voltages with a 90-degree phase difference were applied to the two pairs of the actuator benders, elliptical motions were obtained at the tips. The driving characteristics of the prototype actuator were then measured using a laser doppler vibrometer.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.8
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• pp.870-879
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• 2007

In this study, various damage modes in bending unimorph piezoelectric composite actuators with a thin sandwiched PZT plate during bending fracture tests have been evaluated by monitoring acoustic emission (AE) signals in terms of waveform and peak frequency as well as AE parameters. Three kinds of actuator specimens consisting of woven fabric fiber skin layers and a PZT ceramic core layer are loaded with a roller and an AE activity from the specimen is monitored during the entire loading using an AE transducer mounted on the specimen. AE characteristics from a monolithic PZT ceramic with a thickness of $250{\mu}m$ are examined first in order to distinguish different AE signals from various possible damage modes in piezoelectric composite actuators. Post-failure observations and stress analyses in the respective layers of the specimens are conducted to identify particular features in the acoustic emission signal that correspond to specific types of damage modes. As a result, the signal classification based on waveform and peak frequency analyses successfully describes the failure process of the bending piezoelectric composite actuator exhibiting diverse failure mechanisms. Furthermore, it is elucidated that when the PZT ceramic embedded actuators are loaded mechanical bending loads, the failure process of actuator specimens with different lay-up configurations is almost same irrespective of their lay-up configurations.

• Journal of the Korean Ceramic Society
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• v.40 no.3
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• pp.225-228
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• 2003

A Bender typed Multilayer Actuator(BMA) for decreasing the depolarization effect was designed and fabricated. Unlike bimorph and multimorph actuators in which depolarization occurred, the BMA did not generate depolarization because the polarization and the electric field directions are the same. The simulated results indicate that higher displacement of the BMA can be achieved by increasing input voltage. Compared with the multimorph actuator, the proposed actuator is expected to extend a life time as well as acceptable voltage range.

• Journal of the Korean Ceramic Society
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• v.40 no.11
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• pp.1062-1066
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• 2003

Design of a piezoelectric actuator for the ultrasonic motor must ensure that contact point has elliptic trajectory of movement. The new idea of an elliptic trajectory formation of the piezoelectric actuator is investigated in the paper. Shaking beam for the piezoelectric linear ultrasonic motor was introduced to realize this new idea. The principle is based on the excitation of longitudinal and flexural vibrations of the actuator by using two sources of longitudinal mechanical vibrations shifted by $\pi$/2. Mode-frequency and harmonic response analyses of the actuator based on FEM have been carried out. The moving trajectory of the contact point has been defined. Finally, The experimental research of shaking beam has been confirmed an opportunity of the elliptic trajectory reception with the help of one stable mode of the vibrations.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.5
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.594-597
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• 2003

In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of 0.2Pb(Mg1/3Nb2/3)O3-0.38PbZrO3-0.42PbTiO3 followed by lamination and burnout & co-firing processes. The actuators of 10 10 0.62 nm3 in size were formed in a way that 60 200 m thick ceramics were stacked alternatively with 5 m thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of 90o/180o domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.390-391
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• 2006

This paper describes the design, fabrication and characteristics of a micromachined piezoelectric valve utilizing a multilayer ceramic actuator (MCA). The micromachined MCA valve, which uses a buckling effect, consists of three separate structures: the MCA, the valve actuator die and the seat die. The valve seat die with 6 trenches was made, and the actuator die, which is driven by the MCA under optimized conditions, was also fabricated. After Si wafer direct bonding between the seat die and the actuator die, the MCA was also anodically bonded to the seat/actuator die structure. A polydimethylsiloxane (PDMS) sealing pad was fabricated to minimize the leak rate. Finally, the PDMS sealing pad was also bonded to the seat die and the stainless steel package. The MCA valve shows a flow rate of 9.13 sccm at an applied DC voltage of 100 V with a 50% duty cycle and a maximum non-linearity of 2.24% FS. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, as a medical bio-system and in the automobile industry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.161-164
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• 2001

In this paper, we investigated the dielectric and piezoelectric properties of Pb(Sb, Nb)O$_3$-Pb(Zr, Ti)O$_3$ ceramic(PSN) for piezoelectric transformer and actuator etc. Effect of MnO$_2$ addition on the PSN ceramic was investigated. Anisotropic properties of electromechanical coupling factor and piezoelectric properties proved to be varied with amount of MnO$_2$ impurity and sintering temperature. The electromechanical coupling factor k$_{p}$ of 0.38 and the mechanical quality factor Q$_{m}$ of 1944 were obtained from the specimen with 0.4 wt% MnO$_2$ sintered at 115$0^{\circ}C$ addition. Experimental results indicated that the PSN ceramic with MnO$_2$ impurity can be effectively used for piezoelectric transformer and actuator.tor.