• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.620-623
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• 2003

Non-linear behaviors of multilayer piezoelectric ceramic actuator (MCA) were investigated under electrical and mechanical stress. DC 100 V bias was applied to the MCA to obtain displacement. Laser vibrometer, which using Doppler effect, was employed to characterize displacement caused by $d_{33}$ mode of MCA. To understand this non-linear behavior of MCA, displacement was measured and compared under different load states. By increasing load, electric field-induced strain and piezoelectric constant($d_{33}$) of MCA was decreased. We attribute this phenomenon to the domain wall motion and depoling of MCA under heavy load.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.4 s.247
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.615-618
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• 2004

The piezoelectricity and polarization of multilayer ceramic actuators, being designed to stack ceramic layer and electrode layer alternately, were investigated under a consideration of geometry, the thickness ratio of the ceramic layer to electrode layer The actuators were fabricated by tape-casting of $0.42PbTiO_3-0.38PbZrO_3-0.2Pb(Mn_{1/3}Nb_{2/3})O_3$ followed by laminating, burn-out and co-firing process. The actuators of $5\times5mm^2$ in area were formed in a way that $60{\sim}200{\mu}m$ thick ceramics were stacked 10 times alternately with $5{\mu}m$ thick electrode. Increase in polarization and electric field-displacement with increasing thickness ratio of the ceramic/electrode layer and thickness/cross section ratio were attributed to the change of $non-180^{\circ}/180^{\circ}$ domain ratio which was affected by the interlayer internal stress and Poisson ratio of ceramic layer. The piezoelectricity and actuation behaviors were found to be dependent upon the volume ratio (or thickness ratio) of ceramic layer relative to ceramic layer. Concerning with the existence of internal stress, the field-induced polarization and deformation were described in the multilayer actuator.

• Electrical & Electronic Materials
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• v.10 no.7
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• pp.727-731
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• 1997

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.190-191
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• 2006

본 연구에서는 압전 세라믹을 이용한 Piezoelectric Energy Harvesting Systems을 개발하기 위해서, 바이몰프 액츄에이터를 제작하여 구동속도에 따른 발전특성을 고찰하였다. 또한 발전 회로시스템을 설계하여 압전소자에 의한 발전특성을 분석하였다. 본 시스템을 통해서 에 1.3 mm(100 V 인가)의 대변위 바이몰프 액츄에이터를 제작하였으며, 이런 액츄에이터를 이용하여 60 mW급의 LED를 구동하였다.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.7
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• pp.881-887
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• 2016

In this study, the vibration-based tactile actuator for smart wear applications is presented by using piezoelectric ceramic transducers. The compact wireless actuation system is constructed with a high voltage piezoelectric amplifier, a microcontroller, wireless communication module, and rechargeable lithium-polymer battery. For the wireless communication between a hardware and an operator, the bluetooth-based wireless communication system is prepared and the user interface is provided via smart phone applications. From a series of experimental user studies, it is demonstrated that the proposed vibro-tactile actuator based on piezoelectric ceramic transducers can be effectively applied to smart wear applications.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.5
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• pp.337-343
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• 2020

This study proposed piezoelectric ceramic bender actuators for application to small walking robots. As the space where human access has recently become increasingly restricted (e.g., highly concentrated radioactive storage areas, viral contaminated areas, terrorist zones, etc.), the scope of using robots is becoming more diverse, and many actions that were possible only in the past have been attempted to be replaced by small robots. This robotic concept has the advantage of being simple in structure, making it compact and producing a large size work force. The dynamic modeling, using finite element analysis, maximized the robot's mobility performance by optimizing the shape of the actuator, and the results were verified through fabrication and experimentation. The actuator moved at a maximum speed of 236 mm/s under no load conditions, and it could move at a speed of 156 mm/s under load conditions of 5g. The proposed actuator has the advantage of modular additions depending on the mission and required performance, which ensured that they are competitive against similar drive sources previously created.

• Ceramist
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• v.7 no.3
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• pp.38-47
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• 2004

최근 micro structure, micro sensor, micro actuator 및 microelectronics 등을 활용하는 microelectromecha-nical systems (MEMS) 기술은 마이크로 로봇, micro manipulation, 광학 소자 및 시스템, 유체, 열, 바이오 및 화학공정 등을 위한 시스템 그리고 atomic force와 scanning tunneling microscope 등에 사용되는 다양한 소자 등 많은 잠재력을 가지고 있다. 이들 응용 분야 들은 micro actuator와 같은 mechanical power source가 요구되는 경우가 있다. 압전 특성을 포함하는 강유전체 재료는 이러한 micro actuator를 위해 여러 가지 다양한 장점을 지니고 있는데, 이들을 정리하면 다음과 같다. (중략)

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.299-299
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• 2007

This paper presents an omni-directional piezoelectric actuator which utilizes only one actuator. The actuator has a simple structure of cone type consists of two piezoelectric ceramics of ring type and electrodes divided four segments and a stainless steel body. To find the optimal operating condition of the actuator, the frequency characteristics of the actuator are analyzed by ATILA, FEM and measured by Impedance Analyzer. We have also developed a stage using the omni-directional actuator and an actuator driver circuit to create four sinusoidal waves with a variable frequency and phase difference.