A Study on the effect of TEOS film by Dispel8ion Time and Content of $CeO_2$ Abrasive
(DSS에서 $CeO_2$ 연마제의 첨가량과 분산시간이 TEOS 막에 미치는 특성연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2009.06a
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- pp.487-487
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- 2009