• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05a
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• pp.192-196
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• 2002

This paper describes on the fabrication and characteristics of a metal thin-film pressure sensor based on Cr strain-gauges for harsh environment applications. The Cr thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Cr thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21 $mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.145-152
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• 2004

This paper proposed efficient manufacturing system using the OMM (on-machine measurement) system. The OMM system is software based 3D modeler for inspection on machine and it is interfaced tool machine with RS232C. The software is composed of two inspection modules that one is touch probe operating module and the other is laser displacement sensor operating module. The module for touch probe has need of inspection feature that extracted it from CAD data. Touch probe moves to workpiece by three operating modes as follows: manual, general and automatic mode. The operating module of laser displacement sensor is used inspection for profile and very small hole. An Advantage of this inspection method is to be able to execute on-line inspection during machining or after it. The efficiency of proposed system which can predict and definite the machining errors of each process is verified, so the developed system is applied to inspect the mold-base(cavity, core).

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.9
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• pp.1297-1305
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• 2004

Reliability of MEMS devices is receiving more attention as they are heading towards commercial production. In particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out several reliability tests such as environmental storage, fatigue, shock, and vibration, and we investigated the failure mechanisms of the anodically bonded vacuum gyroscope sensors. It was found that successful vacuum packaging could be achieved through reducing outgassing inside the cavity by deposition of titanium as well as by pre-taking process. The current gyroscope structure is found to be safe from fatigue failure for 1000 hours of operation test. The gyroscope sensor survives the drop and vibration tests without any damage, indicating robustness of the sensor. The reliability test results presented in this study demonstrate that MEMS gyroscope sensor is very close to commercialization.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.8
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• pp.1430-1435
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• 2007

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${\sim}150\;{\mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${\sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{\circ}C$ to $200^{\circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${\sim}10^{\circ}/^{\circ}C$.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1291-1292
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• 2007

Recently, there were many researches for efficiency improvement of DSC. Among of these works, research of surface treatment is still a prerequisite for electron diffusion, light-harvesting and surface state of DSC.[1] Using of the surface treatment, it can be raise up porosity of $TiO_2$ nano-crystalline structure on photo-electrode. There are chemical, physical, electrical and optical methods which raise up its porosity. In this paper, we have designed and manufactured MOPA-type ultrasonic circuit (100W, frequency and duty variable). Manufactured ultrasonic circuit to use to force cavity density and power into $TiO_2$ paste. Then, we have optimized forcing time, frequency and duty of ultrasonic irradiation for surface treatment of photo-electrode of DSC. In I-V characteristic test of DSC, ultrasonic and thermal treated DSC shows 19% improved its efficiency against monolithic DSC. And it shows stability of light-harvesting from drastically change of light irradiation test.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.230-233
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• 2006

In this study, the effects of residual stress induced by plastic injection molding process on the tensile behavior of plastic tensile test specimen were investigated. To manufacture plastic tensile test specimens, an injection mold based on the international standard system was designed and made. Cavity pressure and temperature sensors were installed inside of the presented mold to monitor pressure and temperature values during the cycle of injection molding. Injection molding simulation was performed with the same condition of experiment and linear structural tensile analysis was also performed with the initial condition of the residual stress. It was shown that the residual stress induced by injection molding has an effect on the experiment of tensile test and linear structural tensile simulation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.579-580
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• 2006

In this study, an injection mold of tensile test specimen was manufactured by international standard. Pressure and temperature in the cavity of the injection mold was measured by sensors. Simulation of injection molding process was performed with the same condition of experiment and linear structural tensile analysis was also performed with the initial condition of the residual stress induced by injection molding analysis. Normalized elastic coefficient of tensile test was compared with that of structural analysis. It was shown that the residual stress induced by injection molding has an effect on both the experiment of tensile test and linear structural analysis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.731-734
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• 2002

This paper describes on the fabrication and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain gauges for harsh environment applications. The Ta-N thin-film strain gauges are sputter deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Ta-N thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is $1.097{\sim}1.21mV/V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• Korean Journal of Optics and Photonics
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• v.15 no.1
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• pp.34-38
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• 2004

A fiber laser of which wavelength was scanned by an intra-cavity FP (Fabry-Perot) filter was used to interrogate a fiber Bragg grating strain sensor array. We calculated the wavelength variation of the fiber laser using quadrature signal processing with an unbalanced M/Z (Mach-Zehnder) interferometer and time-delayed sampling technique. The calculated wavelengths are mapped to corresponding temporal reflection peaks from the sensor array, which enables more accurate and stable interrogation without the problems caused by the FP filter's nonlinear characteristics. Wavelength resolution of ∼20 pm was obtained in our experimental setup, which could have been greatly enhanced with faster phase modulation.

• Journal of the Korean Institute of Gas
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• v.15 no.4
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• pp.51-55
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• 2011

This paper describes the temperature compensation algorithm using thermopile detector for nondispersive infrared methane gas sensor. From the output voltage of thermistor that is attached onto the infrared detector, the ambient temperature was extracted. The effects of temperatures on the properties of sensor module (the characteristics of narrow bandpass filter, optical cavity and infrared lamp, and gas absorption coefficient times optical path length) have been introduced in order to implement the temperature compensation algorithm. Even though the measurement error of developed sensor module was in the range of $\pm$ 1,500 ppm, after programming the temperature compensation algorithm, the developed sensor module shows a high accuracy less than +180 ppm error within $20^{\circ}C$ temperature variation.