• Smart Structures and Systems
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• v.1 no.1
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• Design & Manufacturing
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• v.2 no.5
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• pp.30-33
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• 2008

Injection Molding is the most effective process for mass production of plastic parts. The injection molding process is composed with several steps such as Filling, Packing, Holding, Cooling, Ejecting. Among them, filling and packing process should be considered carefully to improve accuracy of dimension, surface quality of plastic parts. Usually the quality above-mentioned is managed with weight of part after molding on the field. In this paper, a series of experiment for molding automotive front bumper was conducted with cavitity temperature sensor to optimize switch-over time(V-P switching), hot runner vale gate sequence time during filling and packing step for the purpose of uniform quality, weight at every molding. As a result, it was found that it is effective method to use temperature sensor in injection molding for quality control of plastic molding.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.12
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• pp.83-88
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• 1997

We present a fiber laser sensor that uses a fiber grating as a strain sensor head and an end-reflector of the laser cavity. A passive wavelength. The long-period grating band-rejection filter showed a wide usable filter wavelength range of about 25 nm, and the intensity of transmitted light increased by 16% for 1nm sensor wavelength shift in trhe measurement range.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.8
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• pp.1461-1465
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• 2007

A micromachined sensor part for an infrared focal plane array has been designed and fabricated. Amorphous silicon was adapted as a sensing material, and silicon nitride was used as a membrane material. To get a good efficiency of infrared absorption, the sensor was made as a ${\lambda}/4$ cavity structure. All the processes were done in $0.5\;{\mu}m$ iMEMS fab. in the Electronics and Telecommunication Research Institute (ETRI). The processed MEMS sensor structure had a small membrane deflection less than $0.3\;{\mu}m$. This excellent deflection property can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range $8\;-\;14\;{\mu}m$.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.11 no.2
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• pp.225-229
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• 2011

In this study, capacitive type pressure sensors based on low temperature co-fired ceramics (LTCC) technology for environmental monitoring were demonstrated. The LTCC is one of promising technology than is based one since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.) for sensor application. Especially, it has good mechanical and chemical properties for robust environmental application. The 3D LTCC diaphragm with thickness of 400 ${\mu}m$ were fabricated by laminating 4 green sheets using commercial powder (NEG, MLS 22C). To evaluate the sensing properties of the different cavity areas, two types of diaphragm which had different cavity areas with 25, 49 $mm^2$ respectively, were fabricated. To realize capacitive type pressure sensor, the Au top electrode was fabricated using thermal evaporator and the bottome electrode was compressed using aluminium foil. The sensing properties of the fabricated sensors showed linear characteristic under different pressure (0~30 psi) using pressure measurement system.

• Journal of Sensor Science and Technology
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• v.4 no.1
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• pp.29-34
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• 1995

The absolute silicon pressure sensors are fabricated using SDB(silicon direct bonded) wafer. The fabricated pressure sensors consist of four bridge type piezoresistances and a diaphragm which plays a role of mechanic amplifier to supplying pressure. In order to make the diaphragm cavity in low vaccum condition, we anodically bonded Si diaphragm with pyrex 7740 glass in 0.02mmHg, at $400^{\circ}C$. The sensitivity and offset voltage of the fabricated sensors were $30.4{\mu}V/VmmHg$ and 30.6mV, respectively.

• Journal of Sensor Science and Technology
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• v.8 no.4
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• pp.308-313
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• 1999

This paper will present an anisotropic etching in TMAH technique used in the fabrication of three-dimensional magnetic field vector sensor based on angled Hall plate structure. This sensor design relies on simultaneously detecting all magnetic field vector components using Hall plates that are imbedded into the silicon [111] sloped-surface of bulk micromachined cavity by the anisotropic etching of [100] silicon. The fabricated Hall elements has relatively improved sensitivity compare to convensional Hall elements for three-dimensional magnetic field sensing. The product sensitivity of 547V/AT at the supply current of 1.0mA was achived. The corresponding limit in the detection of magnrtic field is 0.07G that calculated by measured power spectral density(PSD) in magnetic sensor output.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.9
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• pp.944-950
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• 2013

This paper is a study of a rain sensor using an open-ended coaxial cavity resonator which senses the amount of rain drops linearly. It shows that it will be used as a sensor to sense the amount of rain dropped on the windshield of an automobile based on the principle of varied resonant frequency and the loss according to the amount and characteristics of an dielectric lied on the open side of a resonator. The input and output ports are built in the both sides of the resonator and the input and output coupling probes are formed like 'ㄱ' shape. The response of rain drops were simulated by the radius of inner conductor of 2 mm, 5 mm, and 10 mm respectively and it showed that the raindrop was sensed most linearly and sensitively when the radius of inner conductor is 5 mm, We have measured that the resonant frequency have varied from 3.55 GHz to 3 GHz and the Q value have varied from 42.38 to 24.3 according to the variation of rain drop amount on the fabricated resonator. Therefore, it shows that the designed resonator can be applied as a rain sensor that measures the amount of rain drops linearly by using the resonant frequency as a measurement parameter.

• Journal of the Korean Society for Precision Engineering
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• v.9 no.2
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• pp.52-60
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• 1992

In this study on the development of the heat flux sensor, unlike the common heat-flux sensor with thermocouple, the heat-treated adhesive-tupe film nickel-gauge was used in measuring temperature. The proposed its Ni-gauge is bound to be compatible with platinum gauge(Pt-Gauge) in its linearity. It is also considered to be cheap in economical sense. In the evaluation of it's performance, the numerical analysis is essential to investigate charateristics of proper sensor and the adequate analsis is depended upon boundary conditions and actual conditions. There are many types of heat flux sensor in the market, and adhexive type flux sensor is most common. In the present investigation, this type of heat flux sensor had been chosen. The figure of the sensor under consideration is an open cavity type, which is calculated numerically by SIMPLER algorithm. The temperature distributions of the sensor predicted by numerical calculation for steady and unsteady states are able to give the chacteristics of the adhesive type heat flux sensor(1st heat flux sensor) according to the heat flux. It means that the outvoltage, the sensitivity, and the performances of responsibility could be evaluated as a result. Through this analysis improved heat flux sensor(2nd heat flux sensor) could be predicted with the reflection of proper operating temperature($150^{\circ}C$) of the Ni-gauge.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2003.04a
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• pp.14-17
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• 2003

Vibration control of a composite plate with a surface-bonded fiber Bragg grating (FBG) sensor and piezoceramic actuators has been performed using a neural network based adaptive predictive control algorithm. For the detection of Bragg wavelength changes, two cavity lengths in Fabry-Perot read-out interferometers are used in order to produce two quadrature phase shifted signals. The FBG sensor system and real-time neuro-adaptive control algorithm could be applicable to diverse dynamic systems.