• 전기학회논문지
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• 제56권6호
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• pp.1165-1169
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• 2007

In this study, a novel sensor system for measuring the temperature inside an oral cavity is proposed. With this aim, a small size of thermistor was used for resolving the cavity's temperature with the resolution of $0.1^{\circ}C$. To evaluate effectiveness of our sensor system, the temperature and its output voltage characteristic, and the specifications of response are investigated. It turned out to be that our sensor system has a linear property in terms of temperature variations for a healthy subject's body temperature range and has a good response time within 3 seconds. Also, in order to investigate the medical application, our sensor system is sought to measure the real temperature variations of a subject's oral cavity and ark shell especially for 'before' and 'after' exercise mode.

• ETRI Journal
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• 제38권4호
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• pp.685-694
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• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
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• pp.132-140
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• 2005

It is well known that the family-mold has an advantage to reduce the cost for production and mold. However, defects are frequently occurred by over packing the smaller volume cavity during molding, especially whorl the family-mold has a volumetric difference between two cavities. In this study, we confirmed the cavity-filling imbalance by the temperature and the pressure sensors, and developed a variable-runner system for the cavity-filling balance. We carried out experiments fur balancing the cavity filling in the family-mold with the variable-runner system, and confirmed a balanced cavity-filing through analyzing the temperature and pressure change in each cavity as the cross-sectional area of the runner changed. We also examined the influence of the injection-speed to the balancing-capability of the variable-runner system in the experiment.

• 소성∙가공
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• 제15권1호
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• pp.47-56
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• 2006

It is well known that the family-mold has an advantage to reduce the cost for production and mold. However, defects are frequently occurred by over packing the smaller volume cavity during molding, especially when the family-mold has a volumetric difference between two cavities. In this study, the cavity-filling imbalance was confirmed by the temperature and the pressure sensors, and a variable-runner system was developed for balancing the cavity-filling. Experiments of balancing the cavity filling was carried out in the family-mold with the variable-runner system, and balancing the cavity-filling was confirmed by changing the cross-sectional area of a runner in the variable-runner system with the temperature and pressure sensors. The influence of the injection speed to the balancing-capability of the variable-runner system was also examined in the experiment.

• 전자공학회논문지D
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• 제35D권5호
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• pp.63-68
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• 1998

The absolute pressure sensor using SDB wafer has been fabricated. the structure of the sensor consists of two wheatstone bridges and a diaphragm. One of the two wheatstone bridges is located on the edge of diaphragm, and the other is located on the center of diaphragm. The diaphragm cavity is sealted in vacuum (~10$^{5}$ Torr) to reduce the effect of temperature due to the vapor in the cavity on the sensitivity of pressure sensor. This is the minor method of temperature compensation method. In this experiment the main compensation method is to use the difference of the two bridge offset voltages. The drift of offset voltage with temperature is reduced by using this method so that temperature charcteristics is improved. In this method the temperature effect in the range of 22~100.deg. C was compensated over 80%.

• 한국기계가공학회지
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• 제16권6호
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• pp.81-86
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• 2017

The high-pressure resin transfer molding (HP-RTM) process has a very effective for the mass production of carbon fiber reinforced plastic (CFRP) for light weight in the automotive industry. In developing robust equipment, new process and fast cure matrix systems reduces significantly the cycle time less than 5 minutes in recent years. This paper describes the cavity pressure, temperature and molding characteristics of the HP-RTM process. The HP-RTM mold was equipped with two cavity pressure sensors and three temperature sensors. The cavity pressure characteristics of the HP-RTM injection, pressurization, and curing processes were studied. This experiment was conducted with selected process parameters such as mold cap size, maximum press force, and injection volume. Consequently, this monitoring method provides correlations between the selected process parameters and final forming characteristics in this work.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1416-1419
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• 2005

Design and manufacturing of plastic injection mold with cavity pressure/temperature sensors were performed in the present study for tensile test specimen. Standards of mold-base and tensile test specimen were used to design an injection molding system. Cavity pressure and temperature sensors were placed on the side of fixed platen of injection mold machine to prevent them from external impact damage. Injection molding experiments with variations of injection speed and melt temperature were performed and polycarbonate tensile specimens were prepared for the tensile test. It was shown that injection molding processing parameters can have effect on the mechanical properties of the plastic injection molded part.

• 한국정밀공학회지
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• 제24권11호
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• pp.84-90
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• 2007

In this study, design and manufacturing of plastic injection mold with cavity pressure/temperature sensors were performed fur tensile test specimen. International standard system for plastic tensile specimen was applied to design an injection molding system. Cavity pressure and temperature sensors were placed on the side of fixed platen of the injection mold to prevent them from external impact damage. Injection molding experiments with variations of injection speed and melt temperature were performed and then tensile test of the manufactured polycarbonate specimens was also performed. It was shown that injection molding processing parameters can have effect on the mechanical properties of the plastic injection molded part.

• 센서학회지
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• 제12권5호
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• pp.199-204
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• 2003

본 논문에서는 Ta-N 스트레인게이지를 이용한 극한 환경용 세라믹 박막형 압력센서의 제작 및 특성에 관하여 연구하였다. 압력감지부로 Ta-N 스트레인게이지를 사용하였으며, SDB(Si-wafer Direct Bonding)와 전기화학적 식각정지법을 이용하여 매몰 cavity를 가지는 저가격 고수율의 Si 박막 다이어프램을 제작하였다. 또한, 실리콘 박막 다이어프램상에 박막형 스트레인게이지를 형성하여 세라믹 박막형 압력센서를 제작하였다. 제작된 세라믹 박막형 압력 센서는 기존의 스트레인 게이지를 이용한 로드셀에 비해서 온도특성이 우수하고 재현성, 소형화, 집적화 및 저가격화가 가능하기 때문에 고온, 고압 등의 각한 환경에서도 사용이 가능할 것으로 기대된다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1951-1956
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• 2008

Various MEMS accelerometers are used in engineering applications including automobiles, mobile phones, military systems, and electronic devices. Among them, the thermal accelerometer employing the temperature difference induced by the convective flow inside the micro cavity has been a topic of interest. As the convective sensor does not utilize a solid proof mass, it is compact, lightweight, inexpensive to manufacture, sensitive and highly endurable to mechanical shock. However, the complexity of the convective flow and various design constraints make optimization of a device a crucial step before fabrication. In this work, optimization of a 2-axis thermal convective MEMS accelerometer is conducted based on 3-dimensional numerical simulation. Parametric studies are performed by varying the several design variables such as the heater shape/size, the cavity size and types of the gas medium and the position of temperature probes in the sensor. The results of optimal design are presented.