• Journal of the Society of Naval Architects of Korea
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• v.58 no.3
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• pp.129-136
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• 2021

Cavitation erosion is one of the major factors causing damage by lowering the structural strength of the marine propeller and the risk of it has been qualitatively evaluated by each institution with their own criteria based on the experiences. In this study, in order to quantitatively evaluate the risk of cavitation erosion on the propeller, we implement a deep learning algorithm based on a convolutional neural network. We train and verify it using the model tests results, including cavitation characteristics of various ship types. Here, we adopt the validated well-known networks such as VGG, GoogLeNet, and ResNet, and the results are compared with the expert's qualitative prediction results to confirm the feasibility of the prediction algorithm using a convolutional neural network.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2511-2514
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• 2008

As the minimum feature size decreases, techniques to avoid contamination and processes to maintain clean wafer surfaces have become very important. The deposition and detachment of nanoparticles from surfaces are major problem to integrated circuit fabrication. Therefore, cleaning technology which reduces nanoparticles is essential to increase yield. Previous megasonic cleaning technology has reached the limits to reduce nanoparticles. Megasonic cleaning is one of the efficiency method to reduce contamination nanoparticle. Two major mechanisms are active in a megasonic cleaning, namely, acoustic streaming and cavitation. Acoustic streaming does not lead to sufficiently strong force to cause damage to the substrates or patterns. Sonoluminescence is a phenomenon of light emission associated with the cavitation of a bubble under ultrasound. We studied a correlation between sonoluminescence and sound pressure distribution for the minimum of pattern damage in megasonic cleaning.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• Journal of Advanced Marine Engineering and Technology
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• v.26 no.3
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• pp.328-336
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• 2002

decrease in efficiency due to cavity fluid fluctuation. The purpose of this study is to examine erosion aspect on the SS400 specimen by cavitation and the effect of impact pressure generated from the demolition of the cavity of ultrasonic vibrator horn in the marine sludge oil environment. The erosion damage of specimen was investigated mainly on weight loss, weight loss rate and maximum erosion rate with variation of the vibration amplitude of $50{\mu}m, 24{\mu}m$ as well as the change of space between transducer horn and specimen. The experimental results showed that as the space between ultrasonic vibrator horn and specimen disk increased, the weight loss and weight loss rate decreased and the values were larger in SFO than in SLO. These findings would help interpret the aspect of cavitation erosion damage in metallic materials of different operating environment and material characteristics.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.121.1-121.1
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• 2014

Recently, much attention has been given to plasma production under liquid and its applications [1]. However, most of plasma production techniques reported so far utilize high voltage dc, ac, rf or microwave power [2], where damage to discharge electrodes and small discharge volume are remained issues. As an alternative of plasma production method under liquid, we have proposed pulsed microwave excited plasma using slot antenna, where damage to the slot electrode can be minimized and plasma volume can be increased. We have also reported improvement of treatment efficiency with use of reduced-pressure condition during the discharge [3]. To realize low pressure conditions in liquid, various alternative technique can be considered. One possible technique is simultaneous injection of microwave power and ultrasonic wave. Ultrasonic wave induces pressure fluctuation with the wave propagation and is so far used for cavitation production in the water. We propose utilization of reduced pressure induced by ultrasonic cavitation for improvement of the plasma production. Correlation between the plasma production and the ultrasonic power will be discussed.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.196-196
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• 2013

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2011.06a
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• pp.311-311
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• 2011

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2011.06a
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• pp.227-227
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• 2011

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2012.06a
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• pp.256-256
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• 2012

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.198-198
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• 2013