• Journal of the Korea Academia-Industrial cooperation Society
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• v.3 no.2
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• pp.74-79
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• 2002

In the a rapid changes of the semiconductor manufacturing technologies for early 21st century, it may be safely said that a kernel of terms is the size increase of Si wafer and the size decrease of semiconductor devices. As the size of Si wafers increases and semiconductor device is miniaturized, the units of cleaning processes increases. A present cleaning technology is based upon RCA cleaning which consumes vast chemicals and ultra pure water (UPW) and is the high temperature process. Therefore, this technology gives rise to the environmental issue. To resolve this matter, candidates of advanced cleaning processes has been studied. One of them is to apply the electrolyzed water. In this work, Compared with surface on Si wafer with electrolyzed water cleaning and various chemicals cleaning, and analyzed Si wafer surface condition treated with elecoolyzed water by cleaning temperature and cleaning time. Especially. concentrate upon the contact angle. finally, contact angle on surface treated with cathode water cleaning is 17.28, and anode water cleaning is 34.1.

• Journal of the Korean Electrochemical Society
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• v.8 no.4
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• pp.155-161
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• 2005

In this paper, commercial CFD program FLUENT v5.3 is used for simulation of MCFC stack. Besides using conservation equations included in FLUENT by default, mass change, mole fraction change and heat added or removed due to electrochemical reactions and water gas shift reaction are considered by adding several equations using user defined function. The stacks calculated are 6 and 25 kW class coflow stack which are composed of 20 and 40 unit cells respectively. Simulation results showed that pressure drop took place in the direction of gas flow, and the pressure drop of cathode side is more larger than that of anode side. And the velocity of cathode gas decreased along with the gas flow direction, but the velocity of anode gas increased because of the mass and volume changes by the chemical reactions in each electrodes. Simulated temperature profile of the stack tended to increase along with the gas flow direction and it showed similar results with the experimental data. Water gas shift reaction was endothermic at the gas inlet side but it was exothermic at the outlet side of electrode respectively. Therefore water gas shift reaction played a role in increasing temperature difference between inlet and outlet side of stack. This results suggests that the simulation of large scale commercial stacks need to consider water gas shift reaction.

• Journal of Energy Engineering
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• v.24 no.2
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• pp.34-39
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• 2015

This study confirmed the characteristics of hydrogen production according to electrode materials by producing non-diaphragm alkaline water electroanalyzer that can be controlled at medium temperature to produce hydrogen. As a result of the electrochemical characteristics by electrode material ($IrO_2/Ti$, $RuO_2/Ti$, Ti), the highest efficiency was found in $RuO_2/Ti$, as a result of hydrogen production experiment by electrolyte concentration, electrolyte concentration has a tendency to be proportional to hydrogen production and the condition of 30% KOH showed the highest hydrogen production as $118.9m^3/m^3/day$. In the experiment that confirmed hydrogen production according to electrode materials, in case of combination of anode ($IrO^2/Ti$) and cathode ($RuO^2/Ti$), it was $157.55m^3/m^3/day$ that showed a higher hydrogen production by around 6.97% than that of $IrO^2/Ti$ and cathode. It is presumed that the improvement of electrochemical activation of DSA electrode increases hydrogen production and influences the improvement of durability compared to the former electrode so that it enables stable alkaline water electrolysis.

• Korean Journal of Materials Research
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• v.18 no.7
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• pp.384-388
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• 2008

Hydrogen production via high high-temperature steam electrolysis consumes less electrical energy than compared to conventional low low-temperature water electrolysis, mainly due to the improved thermodynamics and kinetics at elevated temperaturetemperatures. The elementalElemental powders of Cu, Ni, and YSZ are were used to synthesize high high-temperature electrolysis cathodecathodes, of Ni/YSZ and Cu/YSZ composites, by mechanical alloying. The metallic particles of the composites were uniformly covered with finer YSZ particles. Sub-micron sized pores are were homogeneously dispersed in the Ni/YSZ and Cu/YSZ composites. In this study, The cathode materials were synthesized and their Characterizations properties were evaluated in this study: It was found that the better electric conductivity of the Cu/YSZ composite was measured improved compared tothan that of the Ni/YSZ composite. Slight A slight increase in the resistance can be produced for in a Cu/YSZ cathode by oxidation, but it this is compensated offset for by a favorable thermal expansion coefficient. Therefore, Cu/YSZ cermet can be adequately used as a suitable cathode material of in high high-temperature electrolysis.

• Analytical Science and Technology
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• v.15 no.6
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• pp.502-508
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• 2002

See-through hollow cathode glow discharge cell has been developed for the trace analysis of metal ions. The systems consists of new glow discharge cell improved the cooling system. In the case of previous type of hollow cathode glow discharge cell, it had been utilized for the trace analysis of metal ions but it had a problem that the plasma becomes unstable by air-cooled device. In this study, the modified hollow cathode glow discharge cell has been developed in order to minimize the problem associated with the air-cooled device. thus the stability of the plasma with water-cooling device has been improved and also the higher plasma temperature has been measured. The fundamental characteristics of modified systems have been investigated. And the discharge parameters, such as discharge pressure, material, and diameter of cathode, have been studied to find optimum discharge conditions.

• Journal of Electrochemical Science and Technology
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• v.8 no.4
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• pp.331-337
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• 2017

A simple strategy is proposed herein for attaining uniform current distribution in direct methanol fuel cells by varying the catalyst loading over the electrode. In order to use the same total catalyst amount for a serpentine flow field, three spatial variation types of catalyst loading were selected: enhancing the cathode catalyst loading (i) near the cathode outlet, (ii) near the cathode inlet, and (iii) near the lateral areas. These variations in catalyst loading are shown to improve the homogeneity of the current distribution, particularly at lower currents and lower air-flow rates. Among these three variations, increased loading near the lateral areas was shown to contribute most to achieving a homogenous current distribution. The mechanism underlying each catalyst loading variation method is different; very high catalyst-loading is shown to decrease the homogeneity of the distribution, which may be caused by water management in the thick catalyst layer thereof.

• Transactions of the Korean Society of Automotive Engineers
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• v.14 no.6
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• pp.151-159
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• 2006

A one-dimensional numerical analysis is carried out to investigate the effects of inlet gas humidities, inlet gas pressures, and thicknesses of membrane on the performance of a proton exchange membrane fuel cell. It is found that the relative humidity of inlet gases at anode and cathode sides has a significant effect on the fuel cell performance. Especially, the desirable fuel cell performance occurs at low relative humidity of the cathode side and at high humidity of the anode side. In addition, an increase in the pressure ranging from 1 atm to 4 atm at the cathode side results in a significant improvement in the fuel cell performance due to the convection effect by a pressure gradient toward the anode side, and with decreasing the thickness of membrane, the fuel cell performance is enhanced reasonably.

• Transactions of the Korean hydrogen and new energy society
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• v.28 no.4
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• pp.369-376
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• 2017

Temperature and humidity regulations of an open-cathode PEM fuel cell with balance of plant (BOP) are developed in this study. The axial fan, a bubble humidifier, set of solenoid valves and a controller are used to perform temperature and humidity control simultaneously. A fuzzy controller is designed, and it shows its superiority in real-time controlling for strong non-linear dynamical fuel cell system. The axial fan speed is used for temperature control and solenoid valve on/off signal of the bubble humidifier is used for humidity control. The axial fan speed is controlled to keep the fuel cell temperature within the desired point. Meanwhile, the bubble humidifier is utilized to moisture hydrogen to manage the water content of membrane. The results show that the proposed fuzzy controller effectively increases the output power of 10% for a PEM fuel cell.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.749-752
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• 2009

Anodized tubular titania ($TiO_2$) electrodes (ATTEs) are prepared and used as both the photoanode and the cathode substrate in a photoelectrochemical system designed to split water into hydrogen with the assistance of an enzyme and an external bias (solar cell). In particular, the ATTE used as the cathode substrate for the immobilization of the enzyme is prepared by two methods; adsorption and crosslinking. Results show that the optimized amount of enzyme is 10.98 units for the slurried enzyme, 3.66 units for the adsorbed one and 7.32 units for the crosslinked one, and the corresponding hydrogen evolution rates are 33.04, 148.58, and 234.88 umol/hr, respectively. The immobilized enzyme, specifically the chemically crosslinked one, seems to be much superior to the slurried enzyme, due to the enhanced charge-transfer process that is caused by the lower electrical resistance between the enzyme and the ATTE. This results in a greater number of accepted electrons and a larger amount of enzymes able to deal with the electrons.

• Journal of the Korea Safety Management & Science
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• v.20 no.4
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• pp.7-13
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• 2018

This study investigates the enhancement of the oxygen diffusion rate in the cathode channel of a proton exchange membrane fuel cell (PEMFC) by pure oscillating flow, which is the same as the mechanism of human breathe. Three-dimensional numerical simulation, which has the full model of the fuel cell including electrochemical reaction, ion and electronic conduction, mass transfer and thermal variation and so on, is performed to show the phenomena in the channel at the case of a steady state. This model could analysis the oscillating flow as a moving mesh calculation coupled with electrochemical reaction on the catalyst layer, however, it needs a lot of calculation time for each case. The two dimensional numerical simulation has carried on for the study of oscillating flow effect in the cathode channel of PEMFC in order to reduce the calculation time. This study shows the diffusion rate of the oxygen increased and the emission rate of the water vapor increased in the channel by oscillating flow without any forced flow.