• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.288-288
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• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• 열처리공학회지
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• 제12권1호
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• pp.9-20
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• 1999

The effect of post oxidation, water-quenched after holding in air for 5~420 seconds or cooling or furnace cooling, on corrosion resistance and phase formation characteristics of the surface layer of SM20C and SM45C carbon steels after gas nirtrocarbursing in the $NH_3-5%CO_2-N_2$ gas atmosphere at $580^{\circ}C$ for 3hours is studied. The compound layers of two steels consist of ${\varepsilon}-Fe_{2-3}N$, ${\gamma}^{\prime}-Fe_4N$ and $Fe_3O_4$, phases, however, the quantity of ${\gamma}^{\prime}-Fe_4N$ phase increases for the furnace cooled specimen compared to that of air cooling specimen. With increasing $NH_3$ content in the gas mixture and also increasing the keeping time in the air after gas nitrocarburising, the ${\varepsilon}-Fe_{2-3}N$ phase of compound layer increases, while the decreased current density recognizing the improvement of corrosion resistance are shown. the passive current density of SM45C steel is lower than that of SM20C steel at the same nitrocarburising conditions.

• 열처리공학회지
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• 제4권4호
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• pp.53-60
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• 1991

This study has been performed to investigate into the internal oxidation characteristics of low carbon steel with respect to the added amount of air in nitrogen-propane atmosphere after gas carburizing for various times at $930^{\circ}C$. The results obtained from the experiment are as follows ; (1) Optical micrographs have shown that the internal oxidation is unlikely to occur in the gas atmosphere without air and that oxidized zone in the outer surface layer is formed in the gas atmosphere with air revealing that the depth of oxidized zone increases with increasing the added amount of air. (2) The formation of internally oxidized zone in the outer surface layer has been found to be inhibited as Ni content increases, i. e, the amount of alloying element increases. (3) The depth of oxidation has been measured to increase with almost parabolically gas carburizing time of up to 6 hours.

• Carbon letters
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• 제25권
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• pp.60-67
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• 2018

In the present work, capability of thymolphthalein-grafted graphene oxide, which was successfully synthesized in this study, in stabilization of polypropylene against thermal oxidation were investigated and compared with that of SONGNOX 1010, a commercially used phenolic antioxidant for the polymer. The modified graphene oxide were incorporated into polypropylene via melt mixing. State of distribution of the nanoplatelets in the polymer matrix was examined using scanning electron microscopy and was shown to be homogeneous. Measurements of oxidation onset temperature and oxidative induction time revealed that thymolphthalein-grafted graphene oxide modifies thermo-oxidative stability of the polymer in the melt state remarkably. However, the efficiency of the nanoplatelets in stabilization of polypropylene against thermal oxidation in melt state was shown to be inferior to that of SONGNOX 1010. Furthermore, oven ageing experiments followed by Fourier transform infrared spectroscopy showed that the modified graphene oxide improves thermo-oxidative stability of the polymer strongly in the solid state, so that its stabilization efficiency is comparable to that of SONGNOX 1010.

• Carbon letters
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• 제25권
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• pp.50-54
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• 2018

Large-size graphene samples are successfully prepared by combining ultrosonic assisted liquid phase exfoliation process with oxidation-deoxidation method. Different from previous works, we used an ultrasound-treated expanded graphite as the raw material and prepared the graphene via a facile oxidation-reduction reaction. Results of X-ray diffraction and Raman spectroscopy confirm the crystal structure of the as-prepared graphene. Scanning electron microscopy images show that this kind of graphene has a large size (with a diameter over $100{\mu}m$), larger than the graphene from graphite powder and flake graphite prepared through single oxidation-deoxidation method. Transmission electron microscopy results also reveal the thin layers of the prepared graphene (number of layers ${\leq}3$). Furthermore, the importance of preprocessing the raw materials is also proven. Therefore, this method is an attractive way for preparing graphene with large size.

• 한국환경과학회지
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• 제15권9호
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• pp.855-864
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• 2006

This study introduces a method to eliminate formaldehyde and benzene, toluene from indoor air by means of a photocatalytic oxidation reaction. In the method introduced, for the good performance of the reaction, the effect and interactions of the $TiO_2$ catalyst and ultraviolet in photocatalytic degradation on the reaction area, dosages of catalysts, humidity and light should be precisely examined and controled. Experiments has been carried out under various intensities of UV light and initial concentrations of formaldehyde, benzene and toluene to investigate the removal efficiency of the pollutants. Reactors in the experiments consist of an annular type Pyrex glass flow reactor and an 11W germicidal lamp. Results of the experiments showed reduction of formaldehyde, benzene and toluene in ultraviolet $/TiO_2/$ activated carbon processes (photooxidation-photocatalytic oxidation-adsorption processes), from 98% to 90%, from 98% to 93% and from 99% to 97% respectively. Form the results we can get a conclusion that a ultraviolet/Tio2/activated carbon system used in the method introduced is a powerful one for th treatment of formaldehyde, benzene and toluene of indoor spaces.

• Journal of Electrochemical Science and Technology
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• 제7권2호
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• pp.91-96
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• 2016

Oxidation behaviours of ash free coal (AFC), carbon, and H₂ fuels were investigated with a coin type molten carbonate fuel cell. Because AFC has no electrical conductivity, its oxidation occurs via gasification to H₂ and CO. An interesting behaviour of mass transfer resistance reduction at higher current density was observed. Since the anode reaction has the positive reaction order of H₂, CO₂ and H₂O, the lack of CO₂ and H₂O from AFC results in a significant mass transfer resistance. However, the anode products of CO₂ and H₂O at higher current densities raise their partial pressure and mitigate the resistance. The addition of CO₂ to AFC reduced the resistance sufficiently, thus the resistance reduction at higher current densities did not appear. Electrochemical impedance results also indicate that the addition of CO₂ reduces mass transfer resistance. Carbon and H₂ fuels without CO₂ and H₂O also show similar behaviour to AFC: mass transfer resistance is diminished by raising current density and adding CO₂.

• 한국표면공학회지
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• 제44권4호
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• pp.125-130
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• 2011

$Cr_2AlC$ compounds were synthesized by hot pressing, and oxidized between 900 and $1200^{\circ}C$ in air for up to 50 hours. They oxidized to a thin $Al_2O_3$ layer containing a small amount of $Cr_2O_3$with the liberation of carbon as CO or $CO_2$ gases. The consumption of Al to form the $Al_2O_3$ layer led to the depletion of Al and enrichment of Cr just below the $Al_2O_3$ layer, resulting in the formation of an underlying $Cr_7C_3$ layer. As the oxidation temperature and time increased, the $Cr_7C_3$ oxide layer and the underlying $Cr_7C_3$ layer thickened. The oxidation resistance of $Cr_2AlC$ was generally good due to the formation of the $Al_2O_3$ barrier layer.

• Bulletin of the Korean Chemical Society
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• 제8권5호
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• pp.389-393
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• 1987

The oxidation of carbon monoxide by gaseous oxygen on 0.53, 1.02, and 1.51 mol $\%$CoO-doped $-Fe_2O_3$ catalysts has been investigated in the temperature range from 340 to 480$^{\circ}C$ under various CO and $O_2$ partial pressures. The oxidation rates have been correlated with 1.5-order kinetics; the 0.5-order with respect to $O_2$ and the first-order with respect to CO. In the above temperature range, the activation energy is 0.34 $\pm$ 0.01 eV${\cdot}$$mol^{-1}$. The electrical conductivity of 0.53, 1.02, and 1.51 mol %CoO-doped $\alpha$-$Fe_2O_3$ has been measured at 350$^{\circ}C$ under various $P_{CO}and $P_{O_2}$. From the conductivity data it was found that $O_2$ was adsorbed on Vo formed by doping with CoO, while CO appeared essentially to be chemisorbed on the lattice oxygen of the catalyst surface. The proposed oxidation mechanism and the dominant defect were supported by the agreement between the kinetic data and conductivities.

• Bulletin of the Korean Chemical Society
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• 제15권8호
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• pp.616-622
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• 1994

The oxidation of carbon monoxide by gaseous oxygen in the presence of a powdered $Nd_{1-x}Sr_xCoO_{3-y}$ solid solution as a catalyst has been investigated in the temperature range from 150$^{\circ}$C to 300$^{\circ}$C under various CO and $O_2$ partial pressures. The site of Sr substitution, nonstoichiometry, structure, and microstructure were studied by means of powder X-ray diffraction and infrared spectroscopy. The electrical conductivity of the solid solution has been measured at 300$^{\circ}$C under various CO and $O_2$ partial pressures. The oxidation rates have been correlated with 1.5-and 1.2-order kinetics with and without a $CO_2$ trap, respectively; first-and 0.7 order with respect to CO and 0.5-order to $O_2$. For the above reaction temperature range, the activation energy is in the range from 0.25 to 0.35 eV/mol. From the infrared spectroscopic, conductivity and kinetic data, CO appears essentially to be adsorbed on the lattice oxygens of the catalyst, while $O_2$ adsorbs as ions on the oxygen vacancies formed by Sr substitution. The oxygen vacancy mechanism of the CO oxidation and the main defect of $Nd_{1-x}Sr_xCoO_{3-y}$ solid solution are supported and suggested from the agreement between IR data, conductivities, and kinetic data.