• 마이크로전자및패키징학회지
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• 제11권2호
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• pp.29-35
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• 2004

65 nm급 게이트 유전체로의 $HfO_2$의 적용을 위해 hydrogen-terminate된 Si 기판과 ECR $N_2$ plasma를 이용하여 SiNx를 형성한 기판 위에 MOCVD를 이용하여 $HfO_2$를 증착하였다. $450^{\circ}C$에서 증착시킨 박막의 경우 낮은 carbon 불순물을 가지며 비정질 matrix에 국부적인 결정화와 가장 적은 계면층이 형성되었으며 이 계면층은 Hf-silicate임을 알 수 있었다. 또한 $900^{\circ}C$, 30초간 $N_2$분위기에서 RTA 결과 $HfO_2/Si$의 single layer capacitor의 경우 계면층의 증가로 인해 EOT가 열처리전(2.6nm)보다 약 1 nm 증가하였다. 그러나 $HfO_2/SiNx/Si$ stack capacitor의 경우 SiNx 계면층은 열처리후에도 일정하게 유지되었으며 $HfO_2$ 박막의 결정화로 열처리전(2.7nm)보다 0.3nm의 EOT 감소를 나타내었으며 열처리후에도 $4.8{\times}10^{-6}A/cm^2$의 매우 우수한 누설전류 특성을 가짐을 알 수 있었다.

• 한국전기전자재료학회논문지
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• 제18권12호
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• pp.1133-1138
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• 2005

In this study, we have prepared, as the pluse power source, a commercially supplied Li-ion battery with a capacity of 700 mAh and AC resistivity of 60 md at 1 kHz and nonaqeous asymmetric hybrid capacitor composed of an activated carbon cathode and MCMB anode, and have examined the electrochemical characteristics of hybrid capacitor and the pulse performances of parallel connected hybrid capacitor/Li-ion battery source. The nonaqueous asymmetric hybrid capacitors constituted with each stack number of pairs composed of the cathode, the porous separator and the anode electrode were housed in Al-laminated film cell. The 10 stacked hybrid capacitor, which was charged and discharged at a constant current at 0.25 $mA/cm^2$ between 3 and 4.3 V, has exhibited the capacitance of 108F and the lowest equivalent series resistance was 32 $m{\Omega}$ at 1 kHz. On the other hand, the enhanced run time of Li-ion battery assisted by the hybrid capacitor was obtained with increasing of current density and pulse width in Pulse mode. The best improvement, $84\;\%$ for hybrid capacitor/Li-ion battery was obtained in the condition of a 7C-rate pulse (100 msec)/0.5C-rate standby/$10\;\%$ duty cycle.

• Transactions on Electrical and Electronic Materials
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• 제8권1호
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• pp.46-50
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• 2007

We have studied the nematic liquid crystal (NLC) alignment effects on a nitrogen-doped diamond-like carbon (NDLC) thin film layer with ion beam irradiation. The pretilt angle for NLC on the NDLC surface with ion beam exposure was observed below 1 degree. Also, we had the good LC alignment characteristics on the NDLC thin films with ion beam exposure of 1800 eV. In thermal stability experiments, the alignment defect of the NLC on the NDLC surface with ion beam irradiation above annealing temperature of $250^{\circ}C$ can be observed. Therefore, the good thermal stability and LC alignment for NLC by ion beam aligned NDLC thin films can be achieved.

• 대한토목학회논문집
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• 제4권2호
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• pp.25-33
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• 1984

활성탄(活性炭)의 입경변화(粒徑變化)가 trihalomethane의 흡착(吸着)에 미치는 영향(影響)에 관하여 실험적(實驗的)으로 연구(硏究)하였다. 실험(實驗)에 사용(使用)된 활성탄(活性炭)은 평균입경(平均粒徑)이 0.73mm에서 2.03mm까지의 4종류(種類)이었으며 이들에 대하여 물리적(物理的) 특성(特性)을 조사(調査)하고 trihalomethanedml 흡착능력(吸着能力)을 등온흡착실험(等溫吸着實驗)과 micro-column 실험(實驗)을 통해 밝혀냈다. 입경(粒徑)의 증가(增加)에 따라 비표면적(比表面積)이 감소(減少)하였고 활성탄(活性炭) 내부공극(內部空隙)의 반경(半徑)이 크게 증가(增加)하였다. 또한 큰 입자(粒子)의 경우에는 공극(空隙)의 크기가 넓게 분포(分布)하였다. Trihalomethane의 흡착(吸着)은 Freundlich 공식(公式)에 의해 잘 표현(表現)되었고 입경증가(粒徑增加)에 따라 흡착능력(吸着能力)의 감소(減少)가 뚜렷하게 나타났다. Micro-column 실험결과(實驗結果)와 모형(模型)의 Simulation으로부터 물질도달계수(物質導達係數)와 내부표면광산계수(內部表面壙散係數)를 산정(算定)하였다. 입경변화(粒徑變化)에 따른 계수(係數)의 변화(變化)는 무시(無視)할 수 있었으며 입경변화(粒徑變化)에 따른 효율(効率)의 차이(差異)는 주로 흡착능력(吸着能力)의 차이(差異)에서 오는 결과(結果)로 판단(判斷)된다.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2003년도 하계학술연구발표회 및 한.일 공동심포지엄
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• pp.220-221
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• 2003

Equiatomic FePt and CoPt alloy thin films have received considerable attention as possible magnetic and magneto-optic recording because of their high magnetic anisotropy energy and high coercivity. The high coercivity in these thin films is due to the presence of finely dispersed ordered FePt phase mixed with disordered FePt phase. However, a high temperature treatment, either substrate heating during deposition or post annealing, is needed to obtain the ordered L1$\_$0/ phase with high value of magneto crystalline anisotropy. Recent microstructural studies on these films suggest that the average grain size ranges from 10-50 nm and the grains are magnetically coupled between each other. On the other hand, the ultrahigh-density magnetic recording media with low media noise imposes the need of a material, which consists of magnetically isolated grains with size below 10 nm. The magnetic grain isolation can be controlled by the amount of additional non-magnetic element in the system which determines the interparticle separation and therefore the interparticle interactions. Recently, much research work has been done on various non-magnetic matrices. Preliminary studies showed that the samples prepared in B$_2$O$_3$ and Carbon matrices have shown strong perpendicular anisotropy and fine grain size down to 4nm, which suggest these nanocomposite films are very promising and may lead to the realization of a magnetic medium capable of recording densities beyond 1 Tb/in$^2$. So, in this work, the effect of Carbon doping on the magnetic properties of FePt nanoparticles were investigated.

• 대한방사선기술학회지:방사선기술과학
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• 제5권1호
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• pp.35-43
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• 1982

The authors surveyed the cassettes in 10 general hospitals and compared in experimentation on performances of 6 kinds of cassettes manufactured with several materials in order to discover the present condition and performance of the cassettes being used at present. And the authors got the following results. 1. In distribution of the cassettes in use, Okamoto's(Japan), Picker's and Titan's(U.S.A.) were more than others classified by the manufacture. The rate of using high speed was 72.0%, par speed 28.0% classified by types of intensifying screens in the cassettes and the rate of the year in use for $4{\sim}5$ years was 40.0%, $6{\sim}7$ years 24.0% classified by the years in use. 2. The results of the screen-film contact test were that tile ordinary was 42.7%, the good 36.0%, and the poor 21.3%. 3. The results of the test for light leakage were that fogged area appeared on 1 side or more in 84.0% films. 4. In Aluminum equivalents of front plate, the cassettes with a front plate consisting of carbon fiber were fewest, and the ones of bakelite and aluminum were fewer in order 5. In compared results of the exposure dosage for same density of the films, the exposure of the cassettes used carbon fiber for the material on the front plate was smallest and bakelite, auminum was smaller in order.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1446-1449
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• 1996

Thin films of diamond-like carbon(DLC) have been deposited using a magnetron plasma-enhanced chemical vapor deposition(PECVD) method with an rf(13.56 MHz) plasma of $C_{3}H_{8}$. From the Langmuir probe I-V characteristics, it can be observed that increasing the magnetic field yields an increase of the temperature($T_e$) and density($N_e$) of electron. At a magnetic field of 82 Gauss, the estimated values of $T_e$ and $N_e$ are approximately $1.5\;{\times}\;10^5$ K(13.5 eV) and $1.3\;{\times}\;10^{11}\;cm^{-3}$, respectively. Such a highly dense plasma can be attributed to the enhanced ionization caused by the cyclotron motion of electrons in the presence of a magnetic field. On the other hand, the negative dc self-bias voltage($-V_{sb}$) decreases with an increasing magnetic field, which is irrespective of gas pressure in the range of $1{\sim}7$ mTorr. This result is well explained by a theoretical model considering the variation of $T_e$. Deposition rates of DLC films increases with a magnetic field. This may be due to the increased mean free path of electrons in the magnetron plasma. Structures of DLC films are examined by using various techniques such as FTIR and Raman spectroscopy. Most of hydrocarbon bonds in DLC films prepared consist of $sp^3$ tetrahedral bonds. Increasing the rf power leads to an enhancement of cross-linking of carbon atoms in DLC films. At approximately 140 W, the maximum film density obtained is about 2.4 $g/cm^3$.

• 대한기계학회논문집B
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• 제26권7호
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• pp.911-918
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• 2002

Evaporation heat transfer coefficients of carbon dioxide($CO_2$), R-22, and R-134a in a horizontal smooth tube were measured and analyzed as a function of heat flux, mass flux, and evaporating temperature. The experiments were carried out by varying heat flux from 10 to 20 $kW/m^2$, mass flux from 170 to 340 $kg/m^2s$, and saturation temperatures of 5 and $10^{\circ}C$. It was found that the heat transfer coefficient of $CO_2$ decreased with a rise of quality due to an earlier liquid-film dryout as compared to R-22 and R-134a. Averaged heat transfer coefficients of $CO_2$ were 22-63% higher than those of R-22 and R-134a at all test conditions. The effects of mass flux and heat flux on averaged heat transfer coefficients were much greater in $CO_2$ than in R-22 and R-134a. When comparing $CO_2$ test results with the correlations in the literature, the existing models yielded large deviations at medium and high qualities. Therefore, a generalized correlation for $CO_2$evaporation heat transfer needs to be developed by including the effects of dryout phenomenon.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.380.2-380.2
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• 2014

Direct synthesis of graphene using a chemical vapor deposition (CVD) has been considered a facile way to produce large-area and uniform graphene film, which is an accessible method from an application standpoint. Hence, their fundamental understanding is highly required. Unfortunately, the CVD growth mechanism of graphene on Cu remains elusive and controversial. Here, we present the effect of graphene growth parameters on the number of graphene layers were systematically studied and growth mechanism on copper substrate was proposed. Parameters that could affect the thickness of graphene growth include the pressure in the system, gas flow rate, growth pressure, growth temperature, and cooling rate. We hypothesis that the partial pressure of both the carbon sources and hydrogen gas in the growth process, which is set by the total pressure and the mole fraction of the feedstock, could be the factor that controls the thickness of the graphene. The graphene on Cu was grown by the diffusion and precipitation mode not by the surface adsorption mode, because similar results were observed in graphene/Ni system. The carbon-diffused Cu layer was also observed after graphene growth under high CH4 pressure. Our findings may facilitate both the large-area synthesis of well-controlled graphene features and wide range of applications of graphene.

• 한국재료학회지
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• 제12권12호
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• pp.918-923
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• 2002

In this work, CdTe films were deposited on CdS/ITO/glass substrate by a close spaced sublimation (CSS) method. A $Cu_2$Te layer was deposited on the CdTe film by evaporating $Cu_2$Te powder. Then the samples were annealed for p+ ohmic contact. TEM and XRD analysis showed that $CdTe/Cu_2$Te interface exhibited different forms with various annealing temperature. A good p+ ohmic contact was achieved when the annealing temperature was between $180^{\circ}C$ to $200^{\circ}C$. Best cell efficiency of 12.34% was obtained when post annealing temperature was $200^{\circ}C$ for 5 min. Thermal stress test of the CdS/CdTe cells with carbon back contact showed that the $Cu_2$Te contact was stable at $50^{\circ}C$ in $N_2$ and was slowly degraded at $100^{\circ}C$ in $N_2$. In comparison to the conventional carbon contact, the $Cu_2$Te contact showed a better thermal stability.