• Title/Summary/Keyword: Carbon film

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Deposition and Characterization of $HfO_2/SiNx$ Stack-Gate Dielectrics Using MOCVD (MOCVD를 이용한 $HfO_2/SiNx$ 게이트 절연막의 증착 및 물성)

  • Lee Taeho;Oh Jaemin;Ahn Jinho
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.2 s.31
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    • pp.29-35
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    • 2004
  • Hafnium-oxide gate dielectric films deposited by a metal organic chemical vapor deposition technique on a $N_2-plasma$ treated SiNx and a hydrogen-terminated Si substrate have been investigated. In the case of $HfO_2$ film deposited on a hydrogen-terminated Si substrate, suppressed crystallization with effective carbon impurity reduction was obtained at $450^{\circ}C$. X-ray photoelectron spectroscopy indicated that the interface layer was Hf-silicate rather than phase separated Hf-silicide and silicon oxide structure. Capacitance-voltage measurements show equivalent oxide thickness of about 2.6nm for a 5.0 nm $HfO_2/Si$ single layer capacitor and of about 2.7 nm for a 5.7 nm $HfO_2/SiNx/Si$ stack capacitor. TEM shows that the interface of the stack capacitor is stable up to $900^{\circ}C$ for 30 sec.

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Electrochemical Characteristics of Hybrid Capacitor and Pulse Performance of Hybrid Capacitor / Li-ion Battery (Hybrid Capacitor의 전기화학적 특성 및 Hybrid Capacitor / Li-ion Battery의 펄스 방전 특성)

  • Lee, Sun-Young;Kim, Ick-Jun;Moon, Seong-In;Kim, Hyun-Soo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.12
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    • pp.1133-1138
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    • 2005
  • In this study, we have prepared, as the pluse power source, a commercially supplied Li-ion battery with a capacity of 700 mAh and AC resistivity of 60 md at 1 kHz and nonaqeous asymmetric hybrid capacitor composed of an activated carbon cathode and MCMB anode, and have examined the electrochemical characteristics of hybrid capacitor and the pulse performances of parallel connected hybrid capacitor/Li-ion battery source. The nonaqueous asymmetric hybrid capacitors constituted with each stack number of pairs composed of the cathode, the porous separator and the anode electrode were housed in Al-laminated film cell. The 10 stacked hybrid capacitor, which was charged and discharged at a constant current at 0.25 $mA/cm^2$ between 3 and 4.3 V, has exhibited the capacitance of 108F and the lowest equivalent series resistance was 32 $m{\Omega}$ at 1 kHz. On the other hand, the enhanced run time of Li-ion battery assisted by the hybrid capacitor was obtained with increasing of current density and pulse width in Pulse mode. The best improvement, $84\;\%$ for hybrid capacitor/Li-ion battery was obtained in the condition of a 7C-rate pulse (100 msec)/0.5C-rate standby/$10\;\%$ duty cycle.

Liquid Crystal Alignment Effects on Nitrogen-doped Diamond like Carbon Layer by Ion Beam Alignment Method

  • Han, Jeong-Min;Choi, Sung-Ho;Kim, Byoung-Yong;Han, Jin-Woo;Kim, Jong-Hwan;Kim, Young-Hwan;Hwang, Jeoung-Yeon;Lee, Sang-Keuk;Ok, Chul-Ho;Seo, Dae-Shik
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.1
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    • pp.46-50
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    • 2007
  • We have studied the nematic liquid crystal (NLC) alignment effects on a nitrogen-doped diamond-like carbon (NDLC) thin film layer with ion beam irradiation. The pretilt angle for NLC on the NDLC surface with ion beam exposure was observed below 1 degree. Also, we had the good LC alignment characteristics on the NDLC thin films with ion beam exposure of 1800 eV. In thermal stability experiments, the alignment defect of the NLC on the NDLC surface with ion beam irradiation above annealing temperature of $250^{\circ}C$ can be observed. Therefore, the good thermal stability and LC alignment for NLC by ion beam aligned NDLC thin films can be achieved.

Effects of Particle Size on Adsorption of Trihalomethane by Activated Carbon (활성탄입경(活性炭粒徑)이 Trihalomethane의 흡착(吸着)에 미치는 영향(影響))

  • Chung, Tai Hak;Choi, Sang Il
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.4 no.2
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    • pp.25-33
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    • 1984
  • The effect of particle size on adsorption of trihalomethane have been studied. Using mean particle sizes ranging from 0.73 to 2.03 mm, physical properties of carbon and trihalomethane adsorption characteristics have been investigated experimentally. With increasing particle size specific surface area and pore volume decreased, and the mean pore radius increased significantly. Large pores were dominant in large particles, while small particles were composed of small pores. Isotherm studies were conducted using static bottle point technique and the results were well described by the Freundlich isotherm equations. The adsorption capacity increased significantly with decreased particle size. Additionally micro-column tests were carried out, and the results were compared with the model simulation. From the micro-column studies it was found out that the film transfer coefficient were almost constant, and the differences in the trihalomethane removal efficiency was mainly due to the differences in the adsorption capacity of the particles of different size.

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Magnetic Properties of FePt:C Nanocomposite Film

  • Ko, Hyun-Seok;A. Perumal;Shin, Sung-Chul
    • Proceedings of the Korean Magnestics Society Conference
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    • 2003.06a
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    • pp.220-221
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    • 2003
  • Equiatomic FePt and CoPt alloy thin films have received considerable attention as possible magnetic and magneto-optic recording because of their high magnetic anisotropy energy and high coercivity. The high coercivity in these thin films is due to the presence of finely dispersed ordered FePt phase mixed with disordered FePt phase. However, a high temperature treatment, either substrate heating during deposition or post annealing, is needed to obtain the ordered L1$\_$0/ phase with high value of magneto crystalline anisotropy. Recent microstructural studies on these films suggest that the average grain size ranges from 10-50 nm and the grains are magnetically coupled between each other. On the other hand, the ultrahigh-density magnetic recording media with low media noise imposes the need of a material, which consists of magnetically isolated grains with size below 10 nm. The magnetic grain isolation can be controlled by the amount of additional non-magnetic element in the system which determines the interparticle separation and therefore the interparticle interactions. Recently, much research work has been done on various non-magnetic matrices. Preliminary studies showed that the samples prepared in B$_2$O$_3$ and Carbon matrices have shown strong perpendicular anisotropy and fine grain size down to 4nm, which suggest these nanocomposite films are very promising and may lead to the realization of a magnetic medium capable of recording densities beyond 1 Tb/in$^2$. So, in this work, the effect of Carbon doping on the magnetic properties of FePt nanoparticles were investigated.

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A Study on Performance of the Radiographic Cassettes (X선(線)필름용 카셋트의 성능(性能)에 관한 검토(檢討))

  • Choi, Jong-Hak;Jeon, Man-Jin;Huh, Joon;Kang, Se-Sik
    • Journal of radiological science and technology
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    • v.5 no.1
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    • pp.35-43
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    • 1982
  • The authors surveyed the cassettes in 10 general hospitals and compared in experimentation on performances of 6 kinds of cassettes manufactured with several materials in order to discover the present condition and performance of the cassettes being used at present. And the authors got the following results. 1. In distribution of the cassettes in use, Okamoto's(Japan), Picker's and Titan's(U.S.A.) were more than others classified by the manufacture. The rate of using high speed was 72.0%, par speed 28.0% classified by types of intensifying screens in the cassettes and the rate of the year in use for $4{\sim}5$ years was 40.0%, $6{\sim}7$ years 24.0% classified by the years in use. 2. The results of the screen-film contact test were that tile ordinary was 42.7%, the good 36.0%, and the poor 21.3%. 3. The results of the test for light leakage were that fogged area appeared on 1 side or more in 84.0% films. 4. In Aluminum equivalents of front plate, the cassettes with a front plate consisting of carbon fiber were fewest, and the ones of bakelite and aluminum were fewer in order 5. In compared results of the exposure dosage for same density of the films, the exposure of the cassettes used carbon fiber for the material on the front plate was smallest and bakelite, auminum was smaller in order.

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A study on the deposition of DLC films by magnetron PECVD (Magnetron PECVD에 의한 DLC 박막의 제작에 관한 연구)

  • Kim, Soung-Young;Lee, Jai-Sung;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1446-1449
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    • 1996
  • Thin films of diamond-like carbon(DLC) have been deposited using a magnetron plasma-enhanced chemical vapor deposition(PECVD) method with an rf(13.56 MHz) plasma of $C_{3}H_{8}$. From the Langmuir probe I-V characteristics, it can be observed that increasing the magnetic field yields an increase of the temperature($T_e$) and density($N_e$) of electron. At a magnetic field of 82 Gauss, the estimated values of $T_e$ and $N_e$ are approximately $1.5\;{\times}\;10^5$ K(13.5 eV) and $1.3\;{\times}\;10^{11}\;cm^{-3}$, respectively. Such a highly dense plasma can be attributed to the enhanced ionization caused by the cyclotron motion of electrons in the presence of a magnetic field. On the other hand, the negative dc self-bias voltage($-V_{sb}$) decreases with an increasing magnetic field, which is irrespective of gas pressure in the range of $1{\sim}7$ mTorr. This result is well explained by a theoretical model considering the variation of $T_e$. Deposition rates of DLC films increases with a magnetic field. This may be due to the increased mean free path of electrons in the magnetron plasma. Structures of DLC films are examined by using various techniques such as FTIR and Raman spectroscopy. Most of hydrocarbon bonds in DLC films prepared consist of $sp^3$ tetrahedral bonds. Increasing the rf power leads to an enhancement of cross-linking of carbon atoms in DLC films. At approximately 140 W, the maximum film density obtained is about 2.4 $g/cm^3$.

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Evaporation Heat Transfer Characteristics of CO2 R-22 and R-134a in a Horizontal Smooth Tube (수평원관 내 CO2 R-22 및 R-134a의 증발열전달 특성에 관한 실험적 연구)

  • Yun, Rin;Hwang, Jun-Hyeon;Choi, Young-Don;Kim, Yong-Chan
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.7
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    • pp.911-918
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    • 2002
  • Evaporation heat transfer coefficients of carbon dioxide($CO_2$), R-22, and R-134a in a horizontal smooth tube were measured and analyzed as a function of heat flux, mass flux, and evaporating temperature. The experiments were carried out by varying heat flux from 10 to 20 $kW/m^2$, mass flux from 170 to 340 $kg/m^2s$, and saturation temperatures of 5 and $10^{\circ}C$. It was found that the heat transfer coefficient of $CO_2$ decreased with a rise of quality due to an earlier liquid-film dryout as compared to R-22 and R-134a. Averaged heat transfer coefficients of $CO_2$ were 22-63% higher than those of R-22 and R-134a at all test conditions. The effects of mass flux and heat flux on averaged heat transfer coefficients were much greater in $CO_2$ than in R-22 and R-134a. When comparing $CO_2$ test results with the correlations in the literature, the existing models yielded large deviations at medium and high qualities. Therefore, a generalized correlation for $CO_2$evaporation heat transfer needs to be developed by including the effects of dryout phenomenon.

Controlled Growth of Large-area Mono-, Bi-, and Few-layer Graphene by Chemical Vapor Deposition on Copper Substrate

  • Kim, Yooseok;Lee, Su-il;Jung, Dae Sung;Cha, Myoung-Jun;Kim, Ji Sun;Park, Seung-Ho;Park, Chong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.380.2-380.2
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    • 2014
  • Direct synthesis of graphene using a chemical vapor deposition (CVD) has been considered a facile way to produce large-area and uniform graphene film, which is an accessible method from an application standpoint. Hence, their fundamental understanding is highly required. Unfortunately, the CVD growth mechanism of graphene on Cu remains elusive and controversial. Here, we present the effect of graphene growth parameters on the number of graphene layers were systematically studied and growth mechanism on copper substrate was proposed. Parameters that could affect the thickness of graphene growth include the pressure in the system, gas flow rate, growth pressure, growth temperature, and cooling rate. We hypothesis that the partial pressure of both the carbon sources and hydrogen gas in the growth process, which is set by the total pressure and the mole fraction of the feedstock, could be the factor that controls the thickness of the graphene. The graphene on Cu was grown by the diffusion and precipitation mode not by the surface adsorption mode, because similar results were observed in graphene/Ni system. The carbon-diffused Cu layer was also observed after graphene growth under high CH4 pressure. Our findings may facilitate both the large-area synthesis of well-controlled graphene features and wide range of applications of graphene.

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Formation of Ohmic Contact in P-Type CdTe Using Cu2 Te Electrode and Its Effect on the Photovoltaic Properties of CdTe Solar Cells (Cu2Te 배면 전극을 이용한 p-type CdTe 태양전지의 ohmic contact 형성 및 CdTe 태양전지의 광전압 특성)

  • Kim, Ki-Hwan;Yun, Jae-Ho;Lee, Doo-Youl;Ahn, Byung-Tae
    • Korean Journal of Materials Research
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    • v.12 no.12
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    • pp.918-923
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    • 2002
  • In this work, CdTe films were deposited on CdS/ITO/glass substrate by a close spaced sublimation (CSS) method. A $Cu_2$Te layer was deposited on the CdTe film by evaporating $Cu_2$Te powder. Then the samples were annealed for p+ ohmic contact. TEM and XRD analysis showed that $CdTe/Cu_2$Te interface exhibited different forms with various annealing temperature. A good p+ ohmic contact was achieved when the annealing temperature was between $180^{\circ}C$ to $200^{\circ}C$. Best cell efficiency of 12.34% was obtained when post annealing temperature was $200^{\circ}C$ for 5 min. Thermal stress test of the CdS/CdTe cells with carbon back contact showed that the $Cu_2$Te contact was stable at $50^{\circ}C$ in $N_2$ and was slowly degraded at $100^{\circ}C$ in $N_2$. In comparison to the conventional carbon contact, the $Cu_2$Te contact showed a better thermal stability.