• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.203-207
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• 2009

Copper is known as a replacement for aluminum wire which is used for semiconductor. Because specific resistance of Cu ($1.67{\mu}{\Omega}$-cm) is lower than that of Al ($2.66{\mu}{\Omega}$-cm), Cu reduce RC delay time. Although melting point of Cu($1085^{\circ}C$) is higher than melting point of Al, Cu have characteristic to easily react with Silicon(Si) in low temperature, and it isn't good at adhesive strength with Si. For above these reason, research of diffusion barrier to prevent reaction between Cu and Si and to raise adhesive strength is steadily advanced. Our study group have researched on W-C-N (tungsten-carbon-nitrogen) Diffusion barrier for preventing diffusion of Cu through semiconductor. By recent studies, It's reported that W-C-N diffusion barrier can even precent Cu and Si diffusing effectively at high temperature. In this treatise, we vaporized different proportion of N into diffusion barrier to research Cu's Electromigration based on the results and studied surface hardness in the heat process using nano scale indentation system. We gain that diffusion barrier containing nitrogen is more stable for Cu's electromigration and has stronger surface hardness in heat treatment process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1535-1536
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• 2013

• Clean Technology
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• v.26 no.2
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• pp.122-130
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• 2020

The isotherm, kinetic, and thermodynamic parameters of reactive blue 4 adsorbed by activated carbon were investigated for activated carbon dose, pH, initial concentration, contact time, and temperature data. The adsorption of the RB 4 dye by activated carbon showed a concave shape in which the percentage of adsorption increased in both directions starting from pH 7. The isothermal adsorption data were applied to Langmuir, Freundlich, and Temkin isotherms. Both Freundlich and Langmuir isothermal adsorption models fit well. From determined Freundlich separation factor (1/n = 0.125 ~ 0.232) and Langmuir separation factor (R_L = 1.53 ~ 1.59), adsorption of RB 4 by activated carbon could be employed as an effective treatment method. The constant related to the adsorption heat (B_T = 2.147 ~ 2.562 J mol^-1) of Temkin showed that this process was physical adsorption. From kinetic experiments, the adsorption process followed the pseudo second order model with good agreement. The results of the intraparticle diffusion model showed that the inclination of the first straight line representing the surface diffusion was smaller than that of the second straight line representing the intraparticle pore diffusion. Therefore, it was confirmed that intraparticle pore diffusion is the rate-controlling step. The negative Gibbs free energy change (ΔG = -3.262 ~ -7.581 kJ mol^-1) and the positive enthalpy change (ΔH = 61.08 kJ mol^-1) indicated the spontaneous and endothermic nature of the adsorption process, proving this process to be spontaneous and endothermic.

• Polymer(Korea)
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• v.24 no.1
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• pp.105-112
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• 2000

Using a commercial epoxy/carbon fiber composite prepreg (DMS 2224) as a model system, the cure kinetics of vitrifying thermoset system were analyzed by isothermal and dynamic-heating experiments. Focusing on the processing condition of high performance composite systems, a phenomenological kinetic model was developed by using differential scanning calorimetry (DSC) and reaction kinetics theories. The model system exhibited a limited degree of cure as a function of isothermal temperature seemingly due to the diffusion-controlled reaction rates. The diffusion-controlled cure reaction was incorporated in the development of the kinetic model, and the model parameters were determined from isothermal experiments. The first order reaction was confirmed from the characteristic shape of isothermal cure thermograms, and the activation energy wes 78.43 kJ/mol. Finally, the proposed model was used to predict a complex autoclave thermal condition, which was composed of several isothermal and dynamic-heating stages.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.3 no.1
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• pp.73-79
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• 1983

Activated carbon has been widely used in water and wastewater treatment for removal of trace organics. The objective of this study was to define adsorption characteristics of trihalomethane(THM) on granular activated carbon(GAC) surfaces by laboratory experiments. Synthetic samples were prepared by adding chloroform into distilled and deionized water. The experiments conducted were a batch run and isotherm studies with five different temperature-pH levels. Adsorption of THM on GAC at an equilibrium condition was well described by the Freundlich isotherm equation. Lower temperature favored the adsorption, but the effect of pH was negligible. Utilizing the results of a batch run and the isotherm results, three parameters, mass transfer coefficient, pore diffusion coefficient, and surface diffusion coefficient, were evaluated by comparing with simulation results of an adsorption model. The results also showed that the pore diffusion was much greater than the surface diffusion.

• Journal of the Korean Vacuum Society
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• v.16 no.5
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• pp.348-352
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• 2007

In submicron processes, the feature size of ULSI devices is critical, and it is necessary both to reduce the RC time delay for device speed performance and to enable higher current densities without electromigration. In case of contacts between semiconductor and metal in semiconductor devices, it may be very unstable during the thermal annealing process. To prevent these problems, we deposited tungsten carbon nitride (W-C-N) ternary compound thin film as a diffusion barrier for preventing the interdiffusion between metal and semiconductor. The thickness of W-C-N thin film is $1,000{\AA}$ and the process pressure is 7mTorr during the deposition of thin film. In this work we studied the interface effects W-C-N diffusion barrier using the XRD and 4-point probe.

• Journal of the Korean Electrochemical Society
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• v.10 no.4
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• pp.270-278
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• 2007

PEMFC electrodes with various gas diffusion layers (GDL) were characterized to find out the effect of GDL on fuel cell performance. The physical properties of GDL such as electric conductivity, porosity, air permeability, water flux, PTFE content, etc had close relationship each other and affected on the variation of the cell performance. It was observed that the micro-porous layer (MPL) on carbon paper or cloth changed the physical properties of GDL and changed the cell performance. The variation of cell performance as a function of the physical properties of GDL showed different behaviors according to the amount of current density.

• Journal of the Korea institute for structural maintenance and inspection
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• v.14 no.2
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• pp.89-96
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• 2010

This study presented the analytical evaluation model effective in the concrete structure repaired with a patching material. The model considered the effect of the repair material on carbon dioxide penetration into the repaired concrete as evaluating the remaining service life of the CO2-deteriorated concrete structure after repair. The diffusion profiles of carbon dioxide as well as the carbonated concrete were effectively able to be modelled with analytical method based on Fick's 1st diffusion law. The evaluation of the model equation showed the good result and rational process quantitatively and numerically to evaluate the remaining service life of the repaired concrete structure after repair.

• Tribology and Lubricants
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• v.13 no.2
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• pp.96-104
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• 1997

This paper was focused on the wear characteristics of ion-nitrided metal and with ion-nitride processing, which is basically concerned with the effects of carbon content in workpiece and added carbon content gas atmosphere on the best wear performance. Increased carbon content in workpiece increases compound layer thickness, but decreases diffusion layer thickness. On the other hand, a small optimal amount of carbon content in gas atmosphere increase compound layer thickness as well as diffusion layer thickness and hardness. Wear tests show that the compound layer of ion-nitrided metal reduces wear rate when the applied wear load is small. However, as the load becomes large, the existence of compound layer tends to increase wear rate. Compressive residual stress at the compound layer is the largest at the compound layer, and decreases as the depth from the surface increases. It is found in the analysis that under small applied load, the critical depth where voids and cracks may be created and propagated is located at the compound layer, so that the adhesive wear is created and the existence of compound layer reduces the amount of wear. When the load becomes large, the critical depth is located below the compound layer and delamination, which may explained by surface deformation, crack nucleation and propagation, is created and the existence of compound layer increases wear rate. For the compound layer, at added carbon contents of 0 percent and 0.5 at. percent, the $\varepsilon$ monophase is predominant. But at 0.7 at. percent added carbon, the $\varepsilon$ monophase formation tends to be severely inhibited and r' and $Fe_3C$ polyphase formation becomes dominant. This increased hard $\varepsilon$ phase layer was observed to be more beneficial in reducing friction and wear.

• Journal of the Korean Society of Safety
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• v.17 no.1
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• pp.54-60
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• 2002

To obtain the breakthrough characteristics for the design of fixed bed adsorption plant, adsorption experiment on granular activated carbon was performed with tharonil in the fixed bed. The pore diffusivity and surface diffusivity of tharonil estimated by the concentration-time curve and adsorption isotherm were $D_s=2.825{\times}10^{-9}cm^2/s,\;D_p=1.26{\times}10^{-5}cm^2/s$, respectively. From comparison of the pore diffusivity and surface diffusivity, it was found that surface diffusion was controlling step for intrapaticle diffusion. The breakthrough curve predicted by constant pattern-linear driving force model were shown to agree with the experimental results. The surface diffusivity and film mass transfer coefficient had no effect on the theoretical breakthrough curve but the adsorption isotherm had fairly influence on it. Appearance time of breakthrough curve is faster with the increase flow rate and inflow concentration of liquid. The utility of granular activated carbon is enhanced with the increase of bed height and with the decrease of inflow rate.