• 한국전기전자재료학회논문지
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• 제29권5호
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• pp.312-316
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• 2016

In this study, we fabricated $NO_x$ gas sensor by using multi-walled carbon nanotubes(MWCNT)/zinc oxide(ZnO) composite film. Carbon nanotubes (CNTs) have good electronic, chemical-stability, and sensitivity characteristics. And zinc oxide (ZnO) is a wide band gap and large exciton binding energy semiconductor. In particular, gas sensors require characteristics such as high speed, sensitivity, and selectivity. The fabricated gas sensor was used to detect $NO_x$ gas for different values of the $NO_x$ gas concentrations. The gas sensor that absorbed$NO_x$ gas molecules showed a increasing in resistance. The sensitivity of the gas sensor was increased by increasing the gas concentrations. Additionally, while changing the temperature inside the chamber for the MWCNT/ZnO composite film gas sensor, we obtained the sensitivity. And the comparison analysis to ZnO film gas sensor for detecting $NO_x$ gas. From the experiment result, we confirmed improvement of $NO_x$ gas detection characteristics using the MWCNT/ZnO composite film.

• 공업화학
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• 제21권5호
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• pp.495-499
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• 2010

본 연구에서는 대량 생산 가능한 센서 전극의 생화학 센서 전극 개발을 위하여 탄소나노튜브(carbon nanotube, CNT)를 복합재료화 공정에 의하여 필름과 나노웹 형태의 벌크 재료로 제작한 후, 이들 전극의 넓은 표면적과 뛰어난 화학적 흡착성을 이용하여 화학적 검출 대상에 노출이 되었을 때 이들로 인한 센싱 특성을 연구하였다. CNT 기반 벌크 전극으로 제작하기 위하여 Nafion을 기저재료로 하는 필름과 PAN 기반의 나노 파이버를 전기방사법에 의하여 제작을 한 후 이들 전극의 화학적 영향에 의한 전기적인 특성 변화 실험을 위하여 버퍼 용액의 정전용량에 대한 전기적 임피던스 요소 값인 저항과 정전용량의 변화를 LCR 계측기로 측정하였다. 생화학센서용 전극으로서 CNT벌크전극의 임피던스 변화 형태가 복합소재 전극의 기저재료에 따라 달리 나타났으며 일정량의 버퍼용액 투여 후에는 변화가 없는 포화 상태의 응답을 보였으며 특히, 정전용량이 저항에 비하여 상대적으로 급격하게 큰 변화를 보여 높은 감도 특성을 지니고 있음이 조사되었다. 이들의 전기적인 특성변화는 버퍼 용액의 화학적 성분들이 전극에 흡수 된 후에 CNT에 흡착이 되어 이들의 전기적인 특성을 변화 시키는 것으로 추론된다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.483-485
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• 2007

The active-matrix field emission display (AMFED) was fabricated by integrating carbon nanotube emitters on a-Si thin-film transistors. Also, the tapered macro-gate was adopted for high immunity to a high anode voltage and strong electron beam focusing. The fabricated AMFED was successfully driven with a low voltage of below 15 V.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2007년도 제33회 하계학술대회 초록집
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• pp.76-76
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• 2007

• Structural Monitoring and Maintenance
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• 제9권3호
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• pp.259-270
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• 2022

This study explores the use of the recently developed "strain-sensing smart skin" (S⁴) method for noncontact strain measurements on cement-based samples. S⁴ sensors are single-wall carbon nanotubes dilutely embedded in thin polymer films. Strains transmitted to the nanotubes cause systematic shifts in their near-infrared fluorescence spectra, which are analyzed to deduce local strain values. It is found that with cement-based materials, this method is hampered by spectral interference from structured near-infrared cement luminescence. However, application of an opaque blocking layer between the specimen surface and the nanotube sensing film enables interference-free strain measurements. Tests were performed on cement, mortar, and concrete specimens with such modified S⁴ coatings. When specimens were subjected to uniaxial compressive stress, the spectral peak separations varied linearly and predictably with induced strain. These results demonstrate that S⁴ is a promising emerging technology for measuring strains down to ca. 30 𝜇𝜀 in concrete structures.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 2000년도 Proceedings of 2000 International Nano Crystals/Ceramics Forum and International Symposium on Intermaterials
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• pp.87-125
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• 2000

A new paradigm of crystal growth was suggested in a charged cluster model, where charged clusters of nanometer size are suspended in the gas phase in most thin film processes and are a major flux for thin film growth. The existence of these hypothetical clusters was experimentally confirmed in the diamond and silicon CVD processes as well as in gold and tungsten evaporation. These results imply new insights as to the low pressure diamond synthesis without hydrogen, epitaxial growth, selective deposition and fabrication of quantum dots, nanometer-sized powders and nanowires or nanotubes. Based on this concept, we produced such quantum dot structures of carbon, silicon, gold and tungsten. Charged clusters land preferably on conducting substrates over on insulating substrates, resulting in selective deposition. if the behavior of selective deposition is properly controlled, charged clusters can make highly anisotropic growth, leading to nanowires or nanotubes.

• 센서학회지
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• 제22권5호
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• pp.346-351
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• 2013

We developed a one-step method for fabrication of addressable suspended SWNT films and demonstrate excellent detection performance of paraoxon based on OPH-immobilized SWNT films for environmental monitoring. For dispersed SWNT suspension, COOH-SWNT was prepared by the oxidation of carbon nanotubes using acid treatment and sonication. Suspended SWNT-film was fabricated between cantilever electrodes by dielectrophoretic force and surface tension of the water meniscus. After that, OPH were immobilized on suspended SWNT-films by nonspecific binding for enzymatic hydrolysis of paraoxon. The electrical properties of the SWNT films were measured in real time at room temperature. Structurally suspended SWNT films from substrate surface made possible rapid and highly sensitive detection of target molecules with increased convectional and diffusional fluxes of the molecules and with a large binding surface area. SWNT film FET resulted in a real-time, label-free, and electrical detection of paraoxon to the concentration of ca. $10{\mu}m$ with a step-wise rapid response time of several seconds.

• 한국전기전자재료학회논문지
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• 제23권10호
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• pp.782-787
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• 2010

Recently the solution-based thin film technology has often been treated in the field of device fabrication owing to easy process and convenience for the development of various semiconductor devices and sensors. We deposited on glass substrate single-walled carbon nanotubes (SWNTs)/silane hybrid thin films by multiple spray-coating which is one of solution-based processes, and examined their electrical response for humidity. Generally silane binders which are often mixed in carbon nanotube (CNT) solution to adhere CNTs to substrate well form easily each own functionalized group on the surface of CNTs after they are hardened by way of the hydrolysis reaction. In this work, we investigated how silane binders (TEOS (tetraethoxy silane), MTMS (methyltrimethoxysilane) and VTMS (vinyltrimethoxysilane)) in CNT thin films make effect to their electrical response on humidity. As the result, we found that the resistance in the samples using TEOS was changed dramatically while it was almost invariant in the samples using MTMS and VTMS for increasing humidity.

• 한국전기전자재료학회논문지
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• 제22권12호
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• pp.1089-1094
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• 2009

Carbon nanotubes (CNTs) have excellent electrical, chemical stability, mechanical and thermal properties. In this paper, networks of Multi-walled carbon nanotube (MWCNT) materials were investigated as resistive gas sensors for ethanol ($C_2H_5OH$) detection. Sensor films were fabricated by air spray method for the multi-walled CNTs solution on glass substrates. Sensors were characterized by resistance measurements in the sensing system, in order to find the optimum detection properties for the ethanol gas molecular. The film that was sprayed with the MWCNT dispersion for 60 see, was 300 nm thick. And the electric resistivity is $2{\times}10^{-2}\;{\Omega\cdot}cm$. Also, the sensitivity and the linearity of MWVNT sensor for ethanol gas are 0.389 %/sec and 17.541 %/FS, respectively. The MWCNT film was excellent in the response for the ethanol gas molecules and its reaction speed was very fast, which could be using as ethanol gas sensor. The conductance of the fabricated sensors decreases when the sensors are exposed to ethanol gas.

• 한국전기전자재료학회논문지
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• 제24권4호
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• pp.290-296
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• 2011

Carbon nanotubes (CNTs) have excellent electrical, chemical stability, mechanical and thermal properties. In this paper, networks of Multi-walled carbon nanotube (MWCNT) materials were investigated as a resistive gas sensors for the $H_2$ gas detection. Sensor films were fabricated by the air spray method using the multi-walled CNTs dispersion solution on the glass substrates cured with plasma and nitrocellulose. Sensors were characterized by the resistance measurements in the self-fabricated oven in order to find the optimum detection properties for the hydrogen gas molecular. The sensitivity and the linearity of the MWVNT sensors using the glass substrate cured with plasma for the $H_2$ gas concentration of 0.06~0.6 ppm are 0.013~0.097%/sec and 0.131~0.959%FS, respectively. The MWCNT film was excellent in the response for the hydrogen gas moleculars and its reaction speed was very fast, which could be using as hydrogen gas sensor. The resistance of the fabricated sensors decreases when the sensors are exposed to $H_2$ gas.