• Title/Summary/Keyword: Carbon Nano Material

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Boron concentration effect of tungsten - Boron - carbon - nitride thin film for diffusion barrier (Tungsten(W)- Boron(B) - Carbon(C) - Nitride(N) 확산방지막의 Boron 불순물에 의한 열확산 특성 연구)

  • Kim, Soo-In;Lee, Chang-Woo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.87-88
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    • 2007
  • 반도체 소자가 초고집적화 되어감에 따라 반도체 공정에서 선폭은 줄어들고 박막은 다층화 되어가고 있다. 이와 같은 제조 공정 하에서는 Si 기판과 금속 박막간의 확산이 커다란 문제로 부각되어 왔다. 특히 Cu는 높은 확산성에 의하여 Si 기판과 접합에서 많은 확산에 의한 문제가 발생하게 되며, 또한 선폭이 줄어듦에 따라 고열이 발생하여 실리콘으로 spiking이 발생하게 된다. 이러한 확산을 방지하기 위하여 이 논문에서는 Tungsten - Carbon - Nitrogen (W-C-N)에 Boron (B)을 첨가하였고, Boron 타겟 power을 조절하여 다양한 조성을 가지는 W-B-C-N 확산방지막을 제작하여 각 조성에 따른 증착률을 조서하였고 $1000^{\circ}C$까지 열처리하여 그 비저항을 측정하여 각 특성을 확인하였다.

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Influence of Hydrogen and Oxygen Plasma Treatment on the Structural Properties of Carbon Nanotubes (수소 및 산소 플라즈마 처리에 따른 탄소나노튜브의 구조적 특성 변화)

  • Lee, Jae-Hyeong;Nah, Chang-Woon;Park, Dae-Hee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.11
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    • pp.943-947
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    • 2007
  • The effect of hydrogen and oxygen plasma treatments on the structural properties of carbon nanotube(CNT) has been systematically investigated. As the plasma power was increased, nano particles were appeared at the surface of CNTs. At high plasma power(300 Watt), the structure of CNT was changed from nanotube type to nano particles. However, in case of hydrogen plasma treatment, there was no change in microstructure of CNT. From the Raman analysis, the crystallinity of CNT was deteriorated by the plasma treatment, regardless of gas types.

Effects of Constituents in CNT Pastes on the Field Emission Characteristics of Carbon Nanotubes

  • Kim, Suk-Hwan;Lee, Dong-Gu
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.3
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    • pp.245-249
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    • 2011
  • Carbon nanotubes (CNTs) have been significantly used for the field emitters for display applications. However, the lifetime of CNT emitters which are formed by screen printing technique is not guaranteed yet, because the constituents in CNT paste affect the lifetime of CNTs. The CNT pastes for screen printing are normally composed of organic vehicles (nitro cellulose, ethyl cellulose, etc) and additives (glass frits, indium tin oxide (ITO), etc) with CNTs. In this study, the effects of constituents in CNT pastes on the lifetime and emission characteristics of CNTs were investigated by thermal and electrical analysis. Use of glass frits worsened the lifetime and electron emission of CNTs. However, an addition of ITO to CNT paste rather improved the lifetime of CNTs. Degradation of CNTs was small when nitro cellulose was used in CNT paste as an organic vehicle.

Performance Evaluation of Cement Composites Mixed with Multi-Wall Carbon Nanotube and Nanosilica (다중벽 탄소나노튜브와 나노실리카를 혼입한 시멘트 복합체의 성능 평가)

  • Kim, Seong Woo;Son, Jeong Jin;Kim, Ji-Hyun;Chung, Chul-Woo
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2023.05a
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    • pp.185-186
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    • 2023
  • Recently, a lot of nano-scale material technology development and research have been conducted in construction fields to improve the compressive strength and durability of cement-based Composites. There are some studies that have confirmed the properties and application effects of cement-based complex using each nanomaterial, but development and research using both materials are relatively limited. This study sought to confirm the effect of multi-wall carbon nanotubes (MWCNT) and nanosilica, which are representative construction nanomaterials, on the compressive strength, voids, and microstructure formation of cement. The purpose was to produce a cement composite by changing the mixing rate of the two nanomaterials, and to find the optimal mixing amount considering its mechanical and rheological properties.

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Developing Artificial Neurons Using Carbon Nanotubes Smart Composites (탄소나노튜브 스마트 복합소재를 이용한 인공뉴런 개발 연구)

  • Kang, In-Pil;Baek, Woon-Kyung;Choi, Gyeong-Rak;Jung, Joo-Young
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.136-141
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    • 2007
  • This paper introduces an artificial neuron which is a nano composite continuous sensor. The continuous nano sensor is fabricated as a thin and narrow polymer film sensor that is made of carbon nanotubes composites with a PMMA or a silicone matrix. The sensor can be embedded onto a structure like a neuron in a human body and it can detect deteriorations of the structure. The electrochemical impedance and dynamic strain response of the neuron change due to deterioration of the structure where the sensor is located. A network of the long nano sensor can form a structural neural system to provide large area coverage and an assurance of the operational health of a structure without the need for actuators and complex wave propagation analyses that are used with other methods. The artificial neuron is expected to effectively detect damage in large complex structures including composite helicopter blades and composite aircraft and vehicles.

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스프레이 법으로 제작된 MWCNT 투명전도막의 특성

  • Jang, Gyeong-Uk
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.244-244
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    • 2009
  • Carbon nanotubes (CNTs) have excellent electrical, chemical stability, mechanical and thermal properties. In this paper, networks of Multi-walled carbon nanotube (MWCNT) materials were investigated as transparent electrode. Sensor films were fabricated by air spray method using the multi-walled CNTs solution on glass substrates. The film that was sprayed with the MWCNT dispersion for 60 sec, was 300nm thick. And the electric resistivity and the light transmittance rate are $2{\times}10^2{\Omega}cm$ and 60%, respectively.

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Structural Heal th Monitoring Based On Carbon Nanotube Composite Sensors (나노 센서를 이용한 구조물 건전성 감시 기법)

  • Kang, In-Pil;Lee, Jong-Won;Choi, Yeon-Sun;Schu1z Mark J.
    • Proceedings of the Earthquake Engineering Society of Korea Conference
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    • 2006.03a
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    • pp.613-619
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    • 2006
  • This paper introduces a new structural health monitoring using a nano sensor. The sensor is made of nano smart composite material based on carbon nanotubes. The nano sensor is fabricated as a thin and narrow polymer film sensor that is bonded or deposited onto a structure. The electrochemical impedance and dynamic strain response of the neuron change due to deterioration of the structure where the sensor is located. A network of the long nano sensorcan form a structural neural system to provide large area coverage and an assurance of the operational health of a structure without the need for actuators and complex wave propagation analyses that are used with other methods.

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The Electrical Characteristics of the Antistatic Wafer Carrier (대전 방지용 웨이퍼 캐리어의 전기적 특성)

  • Chea, Jong-Yun;Yoon, Jong-Kuk;Kang, Ok-Gu;Ryu, Bong-Jo;Koo, Kyung-Wan
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.63 no.2
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    • pp.319-324
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    • 2014
  • The wafer carrier is made of PP, PC, PE resin which have excellent heat and chemical resistance and electrical properties. However, particle generation has become a problem due to static electricity generated in the carrier. Some conductive material such as carbon black (CB) and carbon fiber (CF) are added for the purpose of anti-static, however, additional for motility and particle contamination problems due to high carbon content occurs. In this paper, the electrical characteristics and workability are observed and compared by adding low Carbon Nono Tube(CNT) to each PP, PC and PE resin to solve the problem.

Platinum and carbon nano tube addition in carbon black counter electrode for dye-sensitized solar cells

  • Lee, Su Young;Kim, Sang Ho
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.05a
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    • pp.229-230
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    • 2012
  • Platinum (Pt) has been commonly used as a counter electrode material in dye-sensitized solar cells, because it has high catalytic activity and electric conductivity as well as chemical inertness with iodide electrolyte. However, Pt is too expensive to be commercialized. Therefore, in the present study, carbon black counter electrode with Pt and carbon nano tube (CNT) was investigated. The power conversion efficiency with Pt added carbon black electrode was lower than hat of pure Pt electrode which was 6.47 %. By adding 3 wt% Pt to the carbon black counter electrode, the power conversion efficiency was maximized at 5.88 %. On them, additional adding of 1 wt % CNT, the power conversion efficiency (${\eta}$)wasincreasedupto6.21%. The reason of power conversion efficiency improvement with a proper amount of Pt and CNT was examined by comparing the impedance properties measured using EIS.

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Electrochemical Characteristics of Si/PC/CNF/PC Composite for Anode Material of Lithium ion Battery (이차전지 음극활물질 Si/PC/CNF/PC 복합 소재의 전기화학적 특성)

  • Jeon, Do-Man;Na, Byung-Ki;Rhee, Young-Woo
    • Korean Chemical Engineering Research
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    • v.56 no.6
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    • pp.798-803
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    • 2018
  • In order to use Si as an anode material for lithium-ion battery, the particle size was controlled to less than $0.5{\mu}m$ and carbon was coated on the surface with the thickness less than 10 nm. The carbon fiber was grown on the Si surface with 50~150 wt%, and the carbon coating was carried out once again. The Si composite material was mixed with dissimilar metals to increase the conductivity, and graphite was mixed to improve cyclic life characteristics. The physical and electrochemical characteristics of composite materials were measured with XRD, SEM, TEM and coin cell. The discharge capacity of Si/PC/CNF/PC was lower than that of Si/PC (Pyrolytic Carbon)/CNF (Carbon Nano Fiber). However, the cyclic life of Si/PC/CNF/PC was higher. Initial discharge capacity of 1512 mA h g-1 at 0.2 C rate and initial efficiency of 78% were shown. It also showed a capacity retention of 94% in 10 cycles.