• 전기학회논문지P
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• 제55권1호
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• pp.26-30
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• 2006

For the purpose of developing capacitive humidity sensor having interdigital electrodes, interdigital electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thickness. For the development of ASIC, switched capacitor signal processing circuits for capacitive humidity sensor were designed and simulated by Cadence using $0.25{\mu}m$ CMOS process parameters. The signal processing circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control. The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is $0.4%R.H./^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of $3%R.H.{\sim}98%R.H.$. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigital electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권3호
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• pp.144-148
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• 2001

For the purpose of developing capacitive humidity sensor having interdigit electrodes, interdigit electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thichness. For the development of ASIC, switched capacitor signal conditioning circuits for capacitive humidity sensor were designed and simulated by cadence using 0.25um CMOS process parameters. The signal conditioning circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is 0.4%R.H./$^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of 3%R.H. ${\sim}$ 98%R.H.. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigit electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc..

• 한국전기전자재료학회논문지
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• 제24권3호
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• pp.224-228
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• 2011

This research, integratable capacitive relative humidity sensor was produced using polyimide on glass substrate. Also, at the time of upper electrode formation, upper electrode grain size was affected by giving changes to sputtering condition. Through this analyzing electrical characteristics affect from capacitive relative humidity sensor was possible. Capacitance of capacitive relative humidity sensor was 330 pF, linearity of 0.6%FS and it showed less than 3% of low hysterisis. Specially, hysterisis was affected more from interface than interstitial. Also was affected by the grain size which is one of the formation condition of upper electrode.

• 한국자기학회지
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• 제5권5호
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• pp.786-789
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• 1995

With a newly designed capacitive torque sensor a multipurpose magnetometer for measuring basic magnetic characteristics such as hyteresis loops, magnetic anisotropy and magnetostriction was built. In order to calibrate the capacitive torque sensor, we measured the output voltages of the sensor by applying the torques due to the electromagnetic and gravitational forces. Experimental results of the several calibration method for the capacitive torque sensor showed good agreement within 3 %.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.655-662
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• 2007

This paper presents a disk-type capacitive sensor for simultaneous measurement of five-dimensional motions of a target. The sensor can be manufactured with a printed circuit board (PCB) such that the sensor can be integrated with its electronics in a single PCB board, whereby the manufacturing costs is considerably reduced. The sensor is optimally designed through an error analysis of possible mechanical errors. Furthermore, the sensor can correct the horizontal motion measurement errors due to the sensor installation tilting error. A proto-type PCB sensor, electronics and a test rig were built, and the effectiveness of the developed sensor was proved through experiments.

• 대한기계학회논문집
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• 제19권9호
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• pp.2082-2088
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• 1995

In this paper, we designed and fabricated the magnetic bearings and built-in type cylindrical capacitive transducers for improving the vibration characteristics of rotating shaft. The eddy current and magnetic field from the electromagnet of the bearing don't affect the measuring signal of the capacitive type transducers so that it is possible to locate the capacitive sensor plates around the magnetic bearing poles and can improve the spillover problem which is induced by the noncollocation of the sensors and actuators. According to the sensitivity calibration schemes using a X-Y table, the cylindrical capacitive transducers have a good linearities in the .+-.70.mu.m range from the geometric center of the sensor plates. The measured results also show high displacement sensitivities of the sensors. According to the performance test of the magnetic bearing which is controlled by the analog PD controllers, we found that the built-in capacitive transducer system successfully measures the journal displacement in the magnetic field and therefore the magnetic bearing system supports the rotating shaft up to 12,000 rpm.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.900-903
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• 2002

Partial discharges(PD) in air, corona discharges, deteriorate the insulation strength. So, it is necessary to detect PD at an early stage before the system failure and extensive damage to the equipment. PD emit signals which can be detected by applying an capacitive electric field diagnosis. In this paper, We measured signals by capacitive electric field sensor and analyzed FFT from PD, and then compared conventional electric PD detecting method to capacitive electric field diagnosis by $\Psi-q-n$, $\Psi-v-n$, $\Psi-n$, $\Psi-q$ distributions.

• 센서학회지
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• 제19권4호
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• pp.271-277
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• 2010

Intravenous(IV) drip therapy is extensively used for all kinds of treatments. It works by delivering medicine directly into the vein. When the medicine has been fully dispensed, a dangerous situation occurs since air in the IV drip bag could enter the patient's vein, which is hazardous to the patient’s safety. In this paper, using capacitive sensors to detect the residual quantity of a plastic IV drip pack is proposed. A simulation model of this technology was shown by a finite elements analysis(FEA) program to find out its feasibility and analyze the proper geometrical dimension of a capacitive sensor. According to the FEA simulation, 3 kinds of capacitive sensors were attached to the bottom surface of the plastic IV drip bag to detect the residual quantity in the experiment. Experimental data showed an agreement with the FEA simulation model estimation and confirmed that the sensor works.

• 전기학회논문지
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• 제57권5호
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• pp.858-865
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• 2008

In this paper, Capacitive Telemetry RF Sensor System using Recursive Least Square (RLS) algorithm was proposed. General Telemetry RF Sensor System means that it should be "wireless", "implantable" and "batterless". Conventional Telemetry RF Sensor System adopts Integrated Circuit type, but there are many defects like complexity of structure and the limitation of large power consumption in some cases. In order to overcome these disadvantages, Telemetry RF Sensor System based on inductive coupling principle was proposed in this paper. Proposed Telemetry RF Sensor System is very simple because it consists of R, L and C and measures the changes of environment like pressure and humidity in the type of capacitive value. This system adopted RLS algorithm for estimation of this capacitive parameter. For the purpose of applying RLS algorithm, proposed system was mathematically modelled with phasor method and was quasi-linearized. As two parameters such as phase and amplitude of output voltage for estimation were needed, Phase Difference Detector and Amplitude Detector were proposed respectively which were implemented using TMS320C2812 made by Texas Instrument. Finally, It is verified that the capacitance of proposed telemetry RF Sensor System using RLS algorithm can be estimated efficiently under noisy environment.

• 조명전기설비학회논문지
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• 제23권8호
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• pp.80-85
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• 2009

본 논문에서는 저항과 클록 주파수 변동에 의한 문제를 효과적으로 감소시킬 수 있는 풀 디지털 정전용량 방식의 터치키를 제안한다. 제안된 방식은 측정하고자 하는 정전용량 두 개와 두 정전용량 사이의 저항으로 구성되어 있으며, 각 정전용량과 저항의 지연을 각각 측정한 후 두 지연의 비를 구한다. 양자화 오차를 무시할 경우 두 지연의 비는 측정하고자 하는 두 정전용량의 비로 표시되어 저항 값과 클럭 주파수와 무관하다. 실험결과에서도 제안된 방법이 저항과 클록주파수에 의한 변동을 효과적으로 줄일 있음을 보였으며, 제안된 방법의 정전용량 해상도가 1.04[pF]여서 터치키로 사용될 수 있음을 보였다.