• Journal of Sensor Science and Technology
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• v.26 no.1
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• pp.24-27
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• 2017

In this study, I developed a simple and low cost process-printing a silver, carbon, dielectric, adhesive layer on PET films using screen printing technology and bonding the two films face-to-face-to fabricate a low price capacitive pressure-mapping sensor. Both electrodes forming the pressure measuring capacitor are arranged between the two PET films similar to a sandwich. Therefore, the sensor has the advantage of minimizing the influence of external noise. In this study, a $10{\times}10$ capacitance-type pressure-mapping sensor was fabricated and its characteristics were analyzed.

• Journal of the Semiconductor & Display Technology
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• v.16 no.4
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• pp.63-67
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• 2017

In this study, We developed a simple and low cost capacitive pressure mapping sensor and microcontroller-base lock-in amplifier array. We developed capacitive type pressure mapping sensor by forming the electrode and adhesives on plastic films using only the printing process, and the finishing the process by bonding the two films. Lock-in amplifier array was based on a general purpose microcontroller and had only a charge amplifier as analog circuits. In this study, a $10{\times}10$ capacitive type pressure mapping sensor and lock-in amplifier array was fabricated and its characteristics were analyzed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.12
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• pp.2590-2597
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• 2002

A new torque measuring apparatus adopting the basic principle of a capacitive type sensor is proposed in this article. Two plate electrodes are working as a capacitive sensor, whose capacitance varies as torque is applied. One end of each plate is connected to the torque carrying shaft. Output characteristics of the torque sensor were theoretically analyzed and its validity was investigated through experiment. Calculations and calibration experiments show that the output is nonlinear, that is, the sensitivity is very high at low torque but decreases as torque increases. The sensitivity of the proposed system is about 100 times roughly higher than that of a conventional 4-strain gauge type torque sensor.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.655-662
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• 2007

This paper presents a disk-type capacitive sensor for simultaneous measurement of five-dimensional motions of a target. The sensor can be manufactured with a printed circuit board (PCB) such that the sensor can be integrated with its electronics in a single PCB board, whereby the manufacturing costs is considerably reduced. The sensor is optimally designed through an error analysis of possible mechanical errors. Furthermore, the sensor can correct the horizontal motion measurement errors due to the sensor installation tilting error. A proto-type PCB sensor, electronics and a test rig were built, and the effectiveness of the developed sensor was proved through experiments.

• Journal of Sensor Science and Technology
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• v.14 no.4
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• pp.219-224
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• 2005

In this paper, a contact-type linear encoder-like capacitive displacement sensor (CLECDS) is proposed. It is based on the linear encoder capacitive displacement sensor that consists of two substrates with a series of conducting grating in identical size and it is used as a contact sensor of which the two substrates assembled faced to each other after coated with thin dielectric film. It was confirmed that the prototype of this sensor has resolution of about 126nm and measuring range of 20 mm in the test.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.9
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• pp.2082-2088
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• 1995

In this paper, we designed and fabricated the magnetic bearings and built-in type cylindrical capacitive transducers for improving the vibration characteristics of rotating shaft. The eddy current and magnetic field from the electromagnet of the bearing don't affect the measuring signal of the capacitive type transducers so that it is possible to locate the capacitive sensor plates around the magnetic bearing poles and can improve the spillover problem which is induced by the noncollocation of the sensors and actuators. According to the sensitivity calibration schemes using a X-Y table, the cylindrical capacitive transducers have a good linearities in the .+-.70.mu.m range from the geometric center of the sensor plates. The measured results also show high displacement sensitivities of the sensors. According to the performance test of the magnetic bearing which is controlled by the analog PD controllers, we found that the built-in capacitive transducer system successfully measures the journal displacement in the magnetic field and therefore the magnetic bearing system supports the rotating shaft up to 12,000 rpm.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2087-2089
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• 2004

Capacitive pressure sensor는 Piezo type sensor에 비해 온도의 영향이 적어 공업계측, 전기용품 등 그 용도가 다양하여 폭넓게 사용되어지고 있지만, 측정값의 비선형성이 존재하여 측정값에 대한 신뢰도가 떨어지는 단점이 있다. 본 연구에서는 기존 capacitive pressure sensor의 비선형적 output을 개선하기 위한 방법으로 touch mode capacitive pressure sensor를 제안하였다. 또한, 실제 Device제작에 앞서 FEM 해석을 수행하였다. 2mm X 2mm 크기의 diaphragm, $25{\mu}m$의 두께, $20{\mu}m$의 gap을 갖는 Sensor를 Simulation하였으며 설계 변수를 추출하여 각각의 설계변수에 대한 해석을 실시하였다. 그 결과 15.2psi${\sim}$31psi의 영역에서 8.58pF${\sim}$54.31pF의 capacitance가 선형적으로 나타나는 sensor임을 확인하였다.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2015.05a
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• pp.509-512
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• 2015

In this paper, several capacitive sensors for measuring the position of the piston in hydraulic cylinder was studied and designed. The inductive LVDT sensor has been widely used to measure the position of the piston because of its high accuracy, but this type of sensor is very expensive and has difficulty in use because of its complexity. To overcome these disadvantages, we studied the optimized non-contact capacitive sensors and designed several capacitive sensors for accurate measuring the location of piston in hydraulic cylinder. The proposed capacitive sensor has the possibility of practical use for hydraulic cylinder through experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1117-1118
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.841-842
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• 2011