• Title/Summary/Keyword: CZ

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Effects of the Repeated Oxidation-HF Etching-Alkaline Chemical Cleaning Processes on the Silicon Surface in Semiconductor Processing (반도체 공정중 연속적 산화-HF 식각-염기성 세정과정이 실리콘 기판 표면에 미치는 영향)

  • Park, Jin-Gu
    • Korean Journal of Materials Research
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    • v.5 no.4
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    • pp.397-404
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    • 1995
  • 반도체 세정공정에서 염기성 세정액(SCI, Standard cleaning 1, $NH_{4}$OH + $H_{2}$O_{2}$ + $H_{2}$O)은 공정상 발생되는 여러 오염물 중 파티클의 제거를 위해 널리 사용되고 있는데, SCI 조성중 $NH_{4}$OH양에 따라 세정 중 실리콘의 식각속도를 증가시킨다. 이 연구에서는 SCI 세정이 CZ(Czochralski)와 에피 실리콘 기판 표면에 미치는 영향을 단순세정과 연속적인 산화-HF 식각-SCI 세정공정을 통해 관찰되었다. CZ와 에피 기판을 8$0^{\circ}C$의 1 : 2 : 10과 1 : 1 : 5 SCI 용액에서 60분까지 단순 세정을 했을 때 laser particle scanner와 KLA사의 웨이퍼 검색장치로 측정된 결함의 수는 세정시간에 따라 변화를 보이지 않았다. 그러나 CZ와 에피 기판을 10분간 SCI 세정후 90$0^{\circ}C$에서 산화 HF식각공정을 4번까지 반복하였을 때 에피 기판 표면의 결함수는 감소하는 반면에 CZ기판에서는 직선적으로 증가하였다. 반복적인 산화-HF 식각-XCI 세정공정을 통해 생성된 CZ기판 표면의 결함은 크기가 0.7$\mu$m 이하의 pit과 같은 형상을 보여주었다. 이들 결함은 열처리 중 CZ 기판내와 표면에 산화 석출물들이 형성, 반복적인 HF 식각-SCI 세정공정을 통해 다른 부위에 비해 식각이 빨리 일어나 표면에 생성되는 것으로 여기어 진다.

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The electrical and optical Properties of the OELD using the Cz-TPD for cathode interface layer (음극접합층으로 Cz-TPD를 사용한 OELD의 전기적 광학적 특성)

  • Choi, W.J.;Lim, M.S.;Jeong, D.Y.;Lee, J.K.;Lim, K.J.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.04b
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    • pp.124-127
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    • 2002
  • In this study, The cathode interface layer (CIL) was investigated using aromatic diamine derivatives. Cz-TPD (4,4'-biscarbazolyl(9)-biphenyl) used in the cathode interface layers is investigated emition charcaracteristics at the green organic electroluminescent devices. TPD (N,N' -dyphenyl -N -N'-bis (3-methy phenyl)-1,1' -biphenyl-4,4' -diamine) as the hole transformer layer and $Alq_{3}:tris$ (8-hyd-roxyquinoline) aluminium) as the electron transport layer and emiting layer maded use of the organic electroluminescent device. The Organic Electroluminescent Device with Ag cathode and CIL of Cz-TPD(4,4'-biscarbazolyl(9)-biphenyl) showed good EL characteristics compare to a conventional Mg:Ag device and also an improved storage stability. [1] As the change in MgAg, Cz-TPD/Ag, Ag at the chthode, the electrical and optical charcaracteriseics were investigated.

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Somatic cell score: gene polymorphisms and other effects in Holstein and Simmental cows

  • Citek, Jindrich;Brzakova, Michaela;Hanusova, Lenka;Hanus, Oto;Vecerek, Libor;Samkova, Eva;Jozova, Eva;Hostickova, Irena;Travnicek, Jan;Klojda, Martin;Hasonova, Lucie
    • Animal Bioscience
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    • v.35 no.1
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    • pp.13-21
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    • 2022
  • Objective: The aim of the study was to evaluate the influence of gene polymorphisms and nongenetic factors on the somatic cell score (SCS) in the milk of Holstein (n = 148) and Simmental (n = 73) cows and their crosses (n = 6). Methods: The SCS was calculated by the formula SCS = log2(SCC/100,000)+3, where SCC is the somatic cell count. Polymorphisms in the casein alpha S1 (CSN1S1), beta-casein (CSN2), kappa-casein (CSN3), beta-lactoglobulin (LGB), acyl-CoA diacylglycerol transferase 1 (DGAT1), leptin (LEP), fatty acid synthase (FASN), stearoyl CoA desaturase 1 (SCD1), and 1-acylglycerol-3-phosphate O-acyltransferase 6 (AGPAT6) genes were genotyped, and association analysis to the SCS in the cow's milk was performed. Further, the impact of breed, farm, year, month of the year, lactation stage and parity on the SCS were analysed. Phenotype correlations among SCS and milk constituents were computed by Pearson correlation coefficients. Results: Only CSN2 genotypes A1/A2 were found to have significant association with the SCS (p<0.05), and alleles of CSN1S1 and DGAT1 genes (p<0.05). Other polymorphisms were not found to be significant. SCS had significant association with the combined effect of farm and year, lactation stage and month of the year. Lactation parity and breed had not significant association with SCS. The phenotypic correlation of SCS to lactose content was negative and significant, while the correlation to protein content was positive and significant. The correlations of SCS to fat, casein, nonfat solids, urea, citric acid, acetone and ketones contents were very low and not significant. Conclusion: Only CSN2 genotypes, CSN1S1 and DGAT1 alleles did show an obvious association to the SCS. The results confirmed the importance of general quality management of farms on the microbial milk quality, and effects of lactation stage and month of the year. The lactose content in milk reflects the health status of the udder.

Catalytic Behavior of Ni/CexZr1-xO2-Al2O3 Catalysts for Methane Steam Reforming: The CexZr1-xO2 Addition Effect on Water Activation (메탄 습식 개질 반응용 Ni/CexZr1-xO2-Al2O3 촉매의 반응 특성: CexZr1-xO2 첨가에 의한 물 활성화 효과)

  • Haewon Jung;Huy Nguyen-Phu;Mingyan Wang;Sang Yoon Kim;Eun Woo Shin
    • Korean Chemical Engineering Research
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    • v.61 no.3
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    • pp.479-486
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    • 2023
  • In this study, we investigated the effect of the CexZr1-xO2 (CZ) addition onto Ni/Al2O3 catalysts on the catalytic performance in methane steam reforming. In the reaction results, the CZ-added Ni/Al2O3 catalyst showed higher CH4 conversion and H2 yield under the same reaction conditions than Ni/Al2O3. From the characterization data, the two catalysts had similar support porosity and Ni dispersion, confirming that the two properties could not determine the catalytic performance. However, the oxygen vacancy over the CZ-added Ni/Al2O3 catalyst induced an efficient steam activation at low reaction temperatures, resulting in an increase in the catalytic activity and H2 yield.

Emission Properties of the OELD with Cathode Interface Layer for Cz-TPD (Cz-TPD를 음극접합층으로한 OELD의 발광특성)

  • Choi, W.J.;Cho, M.J.;Park, C.H.;Lee, J.G.;Lim, K.J.;Park, S.K.;Kim, H.H.
    • Proceedings of the KIEE Conference
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    • 2001.11a
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    • pp.109-111
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    • 2001
  • In this study, The cathode interface layer (CIL) was investigated using aromatic diamine derivatives. Cz-TPD (4,4'-biscarbazolyl (9)-biphenyl) used in the cathode interface layers is investigated emition charcaracteristics at the green organic electroluminescent devices TPD (N.N'-dyphenyl-N-N'-bis(3-methy phenyl)-1.1'-biphenyl-4.4'-diamine) as the hole transformer layer and $Alq_3$:tris (8-hydroxyquinoline) aluminium) as the electron transport layer and emiting layer maded use of the organic electroluminescent device. The Organic Electroluminescent Device with Ag, cathode and CIL of Cz-TPD(4,4'-biscarbazolyl(9)-biphenyl) showed good EL characteristics compare to a conventional Mg:Ag device and also an improved storage stability.[1] As the change in MgAg, Cz-TPD/Ag, Ag at the chthode, the electron and optical charcaracteriseics were investigated.

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The formation mechanism of grown-in defects in CZ silicon crystals based on thermal gradients measured by thermocouples near growth interfaces

  • Abe, Takao
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.4
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    • pp.402-416
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    • 1999
  • The thermal distributions near the growth interface of 150nm CZ crystals were measured by three thermocouples installed at the center, middle (half radius) and edge (10nm from surface) of the crystals. The results show that larger growth rates produced smaller thermal gradients. This contradicts the widely used heat flux balance equation. Using this fact, it is confirmed in CZ crystals that the type of point defects created is determined by the value of the thermal gradient(G) near the interface during growth, as already reported for FZ crystals. Although depending on the growth systems the effective length of the thermal gradient for defect generation are varied, we defined the effective length as 10n,\m from th interface in this experiment. If the G is roughly smaller than 20C/cm, vacancy rich CZ crystals are produced. If G is larger than 25C/cm, the species of point defects changes dramatically from vacancies to interstitials. The experimental results after detaching FZ and CZ crystals from the melt show that growth interfaces are filled with vacancies. We propose that large G produces shrunk lattice spacing and in order to relax such lattice excess interstitials are necessary. Such interstitials recombine with vacancies which were generated at the growth interface, nest occupy interstitial sites and residuals aggregate themselves to make stacking faults and dislocation loops during cooling. The shape of the growth interface is also determined by te distributions of G across the interface. That is, the small G and the large G in the center induce concave and convex interfaces to the melts, respectively.

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Optimal Design of Cz Process for Increasing a Productivity of Single Crystal Si Solar Cell Ingot (태양전지용 단결정 실리콘 잉곳 생산성 증대를 위한 초크랄스키 공정 최적 설계)

  • Lee, Eunkuk;Jung, Jae Hak
    • Korean Chemical Engineering Research
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    • v.49 no.4
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    • pp.432-437
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    • 2011
  • Recently, industry needs a new design of Czochralski(Cz) process for higher productivity with reasonable energy consumption. In this study, we carried out computational simulations for finding out a new optimal design of Cz process with variables which can be applied in real industry such as location of heater, shape of shield and crucible size. Objective process was Cz process which can be produced 8 inch diameter Si ingot for solar cell and we acquired an optimal design for higher productivity, low power consumption with stable production condition. For higher productivity we also change the crucible diameter from 22 inches to 24 inches with changing insulation thickness only because the process housing size could not be changed in industry.

동시계수 양전자 소멸 측정을 이용한 Cz-Si 구조 특성

  • Lee, Seung-Jae;Lee, Gwon-Hui;Lee, Jong-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.287-287
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    • 2011
  • 동시 계수 도플러 넓어짐 양전자 소멸 분광법으로 n, p형 Cz-Si의 시료에 양성자를 0, 4 MeV 에너지와 조사량의 변화에 의한 결함을 측정하였으며, 고체 구조 특성에 대하여 조사하였다. 양전자와 전자의 쌍소멸로 발생하는 511 keV 감마선 스펙트럼의 수리적 해석 방법인 S-변수와 W-변수를 사용하여, 구조 변화를 측정하였다. 양성자 조사에너지의 세기에 따라 결함이 증가하였으며, 양성자의 조사량의 변화에 대하여는 큰 변화가 없었다.

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Hypoglycemic effect of standardized Chrysanthemum zawadskii ethanol extract in high-fat diet/streptozotocin-induced diabetic mice and rats

  • Kim, Yang-Ji;Kim, Hyun-Kyu;Lee, Hak Sung
    • Food Science and Biotechnology
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    • v.27 no.6
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    • pp.1771-1779
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    • 2018
  • Chrysanthemum zawadskii (CZ) is a perennial herb belonging to the Asteraceae family. CZ is used medicinally to treat inflammatory and uterine diseases in Asia. CZ was extracted with 50% ethanol and CZ extract (CZE; at 125, 250, and 500 mg/kg body weight) was administered orally every day for 5 or 6 weeks to investigate the anti-diabetic effects in streptozotocin (STZ)-induced rats and STZ + high-fat diet (HFD)-fed mice. CZE significantly decreased fasting blood glucose levels in STZ- and STZ + HFD-induced diabetic models. In addition, glucose tolerance and insulin tolerance were improved in the STZ + HFD + CZE group by increasing insulin levels and decreasing hemoglobin A1c (HbA1c) levels in serum. Furthermore, CZE supplements decreased components of the serum lipid profile such as triglyceride, total cholesterol, and low-density lipoprotein cholesterol levels. These results suggest that CZE may be a potential candidate for controlling hyperglycemia.