• 제목/요약/키워드: CW laser

검색결과 290건 처리시간 0.026초

Dopant activation by using CW laser for LTPS processing

  • Kim, Ki-Hyung;Kim, Eun-Hyun;Ku, Yu-Mi;Park, Seong-Jin;Uchiike, Heiju;Kim, Chae-Ok;Jang, Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.310-313
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    • 2005
  • CW laser dopant activation (CLDA) is suggested as an alternative to conventional thermal annealing. The sheet resistance of the ion doped poly-Si after CLDA is sufficiently low compared to the value measured after thermal annealing. The surface damage due to ion doping on the poly-Si can be recovered while CW laser scan for dopant activation. Therefore, the CLDA can be applied to LTPS processing.

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연속발진 레이저로 제작한 다결정 실리콘 박막의 특성연구 (The properties of CW laser crystallized poly-Si film)

  • 김기형;김은현;박성진;구유미;김채옥;장진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집 디스플레이 광소자 분야
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    • pp.80-83
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    • 2005
  • $Nd:YVO_4$ 연속발진 레이저 (CW laser)를 이용하여 다결정실리콘 (CLC poly-Si)을 제작하였다. CLC 다결정 실리콘의 결정화 영역은 결정립 크기에 따라 SLC(Sequential Lateral Crystallization) 영역, SLG(Super Lateral Grain) 영역 및 Small Grain 영역으로 구분된다. 레이저를 중첩스캔 하여 제작한 CLC 다결정실리콘의 경우, 레이저 스캔 경계에서 단결정립이 형성됨을 SEM으로 확인하고, CLC 다결정실리콘의 결정성을 XRD와 라만 스펙트럼(Raman spectrum)을 이용하여 조사하였다.

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레이저 용접의 비드 형상에 대한 실험치와 이론 결과의 비교 (Comparison of Theoretical model with Experiment in Bead Shape of Laser Welding)

  • Kim, J.D.;Kim, J.D.
    • 한국정밀공학회지
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    • 제11권1호
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    • pp.201-210
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    • 1994
  • A theoretical heat-flow model incorporating with a constant moving CO$_{2}$ laser beam has been analyzed to predict depth and the shape of bead section during last beam welding. The laser beam is exponentially attenuated with an abosrption coefficient in the material. The solution can be expressed in terms of normalized variables. The experimental data were generated by usint CW 2 CO$_{2}$ laser with multi beam mode and CW 3 kW CO$_{2}$laser with Gaussian mode. The specimens were made as bead-on-plate welds for SM 10C, STS 304, STS 316, STS 420 and pure Nickel. The maximum possible penetration depth and the shape of beas section for given sources of laser power, travel speed and beam spot size can be prdicted with this model in a given material.

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고출력 CW Nd:YAG 레이저를 이용한 인코넬 600의 용접 특성 (Welding Characteristics of Inconel 600 using a high power CW Nd:YAG Laser)

  • 유영태;신호준;임기건
    • 한국공작기계학회논문집
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    • 제13권6호
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    • pp.119-126
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    • 2004
  • The welding characteristics of Inconel 600 Alloy using a continuous wave Nd:YAG laser are experimentally investigated. The major process parameters studied in the present laser welding experiment were the positions of focus, laser power and travel speed of laser bean We measured the fusion zone size and its shape using an optical microscope for the observation of cross-sectional area. We performed two tests regarding the tension and the micro hardness for welding quality estimation. Then we measured residual stress in welds by electronic speckle pattern interferometry(ESPI). In conclusion the optimum butt welding process parameters were 0.5mm focus position, 1.6kW laser power, 1m/min travel speed and 5.5$\ell$/min assist gas discharge.

고출력 CW Nd:YAG 레이저를 이용한 CSP1N 냉연강판 절단시 공정변수의 절단면 특성에 미치는 영향 (Influence of process Parameters on the Surface Roughness and the Striation Formation of the Cut Section for the Case of Cutting of CSP 1N Sheet using High Power CW Nd:YAG Laser)

  • 안동규;김민수;박형준;유영태
    • 한국정밀공학회지
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    • 제23권7호
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    • pp.30-38
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    • 2006
  • Laser cutting technology is one of flexible rapid manufacturing technologies with various advantageous including a high cutting speed, manufacturing of parts with a complex shape and others. The quality of the cut part and the optimum cutting conditions are highly dependent on the combination of the process parameters. The objective of this research works is to investigate the influence of process parameters, such as power of laser, cutting speed of laser and material thickness, on the surface roughness and the striation formation of the cut section for the case of cutting of CSP 1N sheet using high power Nd:YAG Laser with a continuous wave (CW). In order to find the relationship between process parameters and the surface roughness and the striation formation of the cut section, several experiments are carried out. Through the investigation of the empirical results, it has been shown that the surface roughness is highly related to the striation formation, including the frequency and angle of the striation, of the cut section. From the results of experiments, an optimum cutting speed for each cutting condition has been obtained to improve both the quality of the cut surface and the cutting efficiency.

Czochralski 방법에 의한 Nd : YAG 단결정의 육성 및 레이저 출력특성 (Growth of Nd:YAG single crystal by czochralski method and characteristics of laser generation)

  • 이상호;김한태;배소익;정수진
    • 한국광학회지
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    • 제9권3호
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    • pp.175-180
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    • 1998
  • 고체 레이저매질로 가장 널리 쓰이는 Nd:YAG 단결정을 Czochralski 방법으로 육성하였다. 자체 제작한 Czochralski 결정 육성로 및 자동 결정 적경제어 장치를 써서 유효 직경 50mm, 길이 100mm의 Nd3+ 이온농도가 0.9at%이고 <111>방향의 단결정을 육성하였다. 단결정 육성시 융액의 수직방향에 대한 온도구배가 중용한 변수인 것이 확인되었으며, 결정 직경은 자동 제어가 가능하도록 컴퓨터 프로그램을 제작하였다. 육성된 단결정을 절단, 가공, 연마, 코팅 과정을 거쳐서 레이저 발진용 Nd:YAG막대를 제작하고 흡수 스펙트럼, 형과 스펙트럼 분석을 통하여 정확한 Nd:YAG의 레이저 발진특성을 확인하였다. 자체 가공된 레이저 막대로부터 발진된 CW 레이저의 최대 출력은 70W이었고, 발진문턱값과 효율은 각각 1.3kW, 1.64%이었다.

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가공용 CW YAG 레이저 개발에 관한 연구 (Study on the Development of CW YAG Laser for Processing)

  • 김희제;이홍식;조연옥;진윤식;노영수;김영배;문덕쇠;이종수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1992년도 하계학술대회 논문집 A
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    • pp.501-502
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    • 1992
  • This paper deals with the experiment of CW YAG laser for processing. The YAG laser is spotted very small size beam compared with $CO_2$ laser having short wave-length. That is used broadly in material processing because of easy reaction to the materials, and the maintenance is very simple. The power delivery and focussing is done conventional optical components, and splitting beam is used many point stop-welding. In these studies, especial interest is nesessary to perpare for future technology. Our study aims to develop the YAG laser system and to accumulate design and construction technology. In basic experiments, we obtain the maximum output power of 50 W with the single elliptical cylinder.

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CW Nd:YAG 레이저를 이용한 SM45C와 STS304의 이종금속용접 (Dissimilar Metal Welding of SM45C and STS304 by means of CW Nd:YAG Laser)

  • 신호준;유영태;임기건;안동규
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.1369-1375
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    • 2004
  • For many years and primarily for economical reasons, Dissimilar Metal Welds have been used as transition joints in a variety of equipment and applications. But Dissimilar Metal Welds have several fabrication and metallurgical drawbacks that can often lead to in-service failures. For example, the most pronounced fabrication faults are hot cracks. Laser welding techniques have been characterised for various materials. In this paper, the laser weldability of STS304 stainless steel and SM45C at dissimilar metal welds using a continuous wave Nd:YAG laser are experimentally investigated. An experimental study was conducted to determine effects of welding parameters, on eliminating or reducing the extent welding zone formation at dissimilar metal welds and to optimize those parameters that have the most influence parameters such as focus length, power, beam speed, shielding gas, and wave length of laser were tested

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The Variation of Radiation Transmittance by the cw 1.07 ㎛ Fiber Laser and Water Aerosol Interaction

  • Koh, Hae Seog;Shin, Wan Soon;Jeon, Min Yong;Park, Byung Suh
    • Journal of the Optical Society of Korea
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    • 제16권3호
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    • pp.191-195
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    • 2012
  • Among the atmospheric effect of laser propagation, the variations of the radiation transmittance by water aerosol evaporation have quantitatively been investigated. When the aerosol was exposed by a 1.07 ${\mu}m$ cw fiber laser, the increased amount of the transmittance variation was a maximum of 19.1% and the volume concentration variation of aerosol was observed as an increasing of laser intensity. Also, significant irregularity of refractive index was not found in the heated area during the continuous laser heating.