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Sub-micron패턴 형성을 위한 축대칭 이온광학계의 성능해석

  • Lee, Jong-Hyeon;Jang, Won-Ik;Yu, Hyeong-Jun
    • ETRI Journal
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    • v.11 no.1
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    • pp.75-88
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    • 1989
  • 액체금속 이온원에서 추출된 이온빔을 웨이퍼 위에 접속하기 위한 이온광학계에 있어서 축대칭 판형 전극의 전위분포를 계산하는 해석적인 방법을 제시하였다. 이 방법은 이온궤적, 수차 및 이온빔 직경등의 광학 특성을 보다 빠르게 계산할 수 있는 computer code의 개발에 이용되었다. 계산된 광학특성은 Burghard의 결과와 잘 일치하였으며, 기존의 Orloff.lens,Kurihara lens의 aperture 직경을 변화시켜 색수차를 줄이면 이온빔의 직경이 20% 정도 감소되었다. 또한 두개의 렌즈로 이루어진 이온광학계에 대한 전산모사를 통하여 일반적으로 collimated mode가 crossovered mode에 비해 작은 빔직경을 가지며, 5KeV, 50keV의 빔에너지에서 각각 Orloff lens/Orloff-reversed lens, Kurihara lens/Orloff-reversed lens로 조합된 경우가 빔직경의 관점에서 유리함을 알 수 있었다.

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Numerical Modeling of Plasma Characteristics of ICP System with a Pulsed dc Bias (수치모델을 이용한 pulsed dc bias ICP장치의 플라즈마 특성 해석)

  • Joo, Jung-Hoon
    • Journal of the Korean institute of surface engineering
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    • v.43 no.3
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    • pp.154-158
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    • 2010
  • Numerical analysis is done to investigate the effects of pulse bias on the plasma processing characteristics like ion doping and ion nitriding by using fluid dynamic code with a 2D axi-symmetric model. For 10 mTorr of Ar plasma, -1 kV of pulse bias was simulated. Maximum sheath thickness was around 20 mm based on the electric potential profile. The peak electron temperature was about 20 eV, but did not affect the averaged plasma characteristics of the whole chamber. Maximum ion current density incident on the substrate was 200 $A/m^2$ at the center, but was decreased down to 1/10th at radius 100 mm, giving poor radial uniformity.

Monte Carlo simulations of chromium target under proton irradiation of 17.9, 22.3 MeV

  • Kara, A.;Yilmaz, A.;Yigit, M.
    • Nuclear Engineering and Technology
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    • v.53 no.10
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    • pp.3158-3163
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    • 2021
  • Chromium material is commonly used for fusion plasma facing applications because of the low neutron activation property. The Monte Carlo method is one of the useful ways to investigate the ion-target interactions. In this study, Chromium target irradiated by protons was investigated using Monte Carlo based simulation tools. In this context, the calculations of radiation damage on Chromium material irradiated with protons at 17.9 and 22.3 MeV energies were carried out using GEANT4 and SRIM codes. Besides, the cross sections for proton interaction with Chromium target were calculated by the TALYS 1.9 code using CTM + FGM, BSFGM, and GSFM level densities. As a result, GEANT4, SRIM and TALYS 1.9 codes provide a suitable tool for the predictions of radiation damage and cross cross section with proton irradiation.

A Study on the absorbed dose to water for high energy electron beams using Water equivalency of plastic phantom (고 에너지 전자선에서 물등가 고체팬톰을 이용한 물 흡수선량 측정에 관한 연구)

  • Sin, Dong-Ho;Sin, Dong-Oh;Kim, Sung-Hoon;Park, Sung-Yong;Ji, Young-Hoon;Ahn, Hee-Kyung;Kang, Jin-Oh;Hong, Seong-Eon
    • Proceedings of the Korean Society of Medical Physics Conference
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    • 2004.11a
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    • pp.166-169
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    • 2004
  • In the International Code of Practice for dosimetry TRS-398 published by International Atomic Energy Agency(IAEA), water equivalency plastic phantom may be used under certain circumstances for electron beam dosimetry for beam quality E0${\leq}$ 10 MeV. In this study, Palstic Water$^{TM}$ and Virtual Water$^{TM}$ were evaluated in order to determine fluence scaling factor hpl. Plastic phantom was evaluated for five electron energy from 6 MeV to 20 MeV. From the measured data of Palstic Water$^{TM}$, the fluence scaling factor hpl was found to be average 0.9964 and Virtual Water$^{TM}$ fluence scaling factor was 1.0156.

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Design of a 2.5V 10-bit 300MSPS CMOS D/A Converter (2.5V 10-bit 300MSPS 고성능 CMOS D/A 변환기의 설계)

  • Kwon, Dae-Hoon;Song, Min-Kyu
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.39 no.7
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    • pp.57-65
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    • 2002
  • In this paper, a 2.5V 10-bit 300MSPS CMOS D/A Converter is described. The architecture of the D/A Converter is based on a current steering 8+2 segmented type, which reduces non-linearity error and other secondary effects. In order to achieve a high performance D/A Converter, a novel current cell with a low spurious deglitchnig circuit and a novel inverse thermomeer decoder are proposed. To verify the performance, it is integrated with $0.25{\mu}m$ CMOS 1-poly 5-metal technology. The effective chip area is $1.56mm^2$ and power consumption is about 84mW at 2.5V power supply. The simulation and experimental results show that the glitch energy is 0.9pVsec at fs=100MHz, 15pVsec at fs=300MHz in worst case, respectively. Further, both of INL and DNL are within ${\pm}$1.5LSB, and the SFDR is about 45dB when sampling, frequency, is 300MHz and output frequency is 1MHz.

A comprehensive evaluation of Mg-Ni based alloys radiation shielding features for nuclear protection applications

  • M.I. Sayyed;K.A. Mahmoud;Faras Q. Mohammed;Kawa M. Kaky
    • Nuclear Engineering and Technology
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    • v.56 no.5
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    • pp.1830-1835
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    • 2024
  • The current study aims to study the impacts of the substitution of magnesium with nickel concentrations on physical and γ-ray shielding capacity of magnesium alloys. The density of the magnesium alloys under study is varied from 3.677 g/cm3 to 5.652 g/cm3, with raising the nickel content from 26.7 wt% to 54.8 wt% and reducing the magnesium concentration from 72.6 wt% to 44.2 wt%, respectively. Additionally, the examination of the γ-ray shielding capacity using the Monte Carlo simulation code shows that the substitution of magnesium by nickel content in the magnesium alloys was associated with an enhancement in the γ-ray shielding capacity, where the linear attenuation coefficient for the studied alloys was enhanced by 53.22 %, 52.45 %, and 52.52 % at γ-ray energies of 0.662 MeV, 1.252 MeV, and 1.408 MeV, respectively, with raising the nickel concentration from 26.7 wt% to 54.8 wt%. Simultaneously, the half-value thickness for magnesium alloys was reduced from 2.47 cm to 1.62 cm (at gamma ray energy of 0.662 MeV), from 3.39 cm to 2.22 cm (at gamma ray energy of 1.252 MeV), and from 3.60 cm to 2.36 cm (at gamma ray energy of 1.408 MeV), raising the nickel concentration from 26.7 wt % to 54.8 wt%, respectively. The study shows that the substitution of magnesium for nickel greatly enhanced the radiation shielding capacity of the magnesium alloys.

Investigation of Planar Optical Waveguide Formed by MeV $He^{+}$ Ion-Implantation into NaEr(WO$_4$)$_2$ Crystal

  • Feng Chen;Wang, Xue-Lin;Wang, Ke-Ming;Cheng, Zhen-Xiang;Chen, Huan-Chu;Shen, Ding-Yu
    • Journal of Korean Vacuum Science & Technology
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    • v.6 no.2
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    • pp.97-100
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    • 2002
  • NaEr(WO$_4$)$_2$ is a new laser material. The planar optical waveguide was formed in NaEr(WO$_4$)$_2$ crystal by 2.6 MeV He$^{+}$ ion implantation at doses of 1.0-1.5 $\times$ 10$^{16}$ ions/cm$^2$ at room temperature. The effective refractive indices of the dark modes were measured using the prism coupling method. foul n modes and five TM modes were observed in the waveguide. The refractive index profiles were analyzed using the reflectivity calculation method (RCM). The influence of heat treatment at moderate temperature on the refractive index profiles of the waveguide was also investigated. We used the TRIM'98 (Transport of ton in Matter) code to simulate the damage profile in the NaEr(WO$_4$) crystal by 2.6 MeV He$^{+}$ion implantation which is helpful for a better understanding of the waveguide formation.ion.

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Stress Analysis of C.V. Joint Rubber Boots by Finite Element Method and Application to Design Modification (유한요소법을 이용한 등속 조인트 고무 부트의 변형해석 및 설계변경에의 응용)

  • Kim, S. H.;Lee, H. W.;Huh, H.;Lee, J. H.;Oh, S. T.
    • Transactions of the Korean Society of Automotive Engineers
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    • v.6 no.3
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    • pp.123-137
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    • 1998
  • The finite deformation with self contact problem of C. V. joint boots is analysed by using the implicit finite element code ABAQUS/Standard. It is shown that analysis results have a good agreement with experimental ones to the degree of maximum rotation angle. As an application of design modification, the effects of thickness change of the rounded part of boot model on the bending and the contact situation of deformed geometry are investigated. In this paper, the effect of the design modification in the end on the leakage is examined using 2-D finite element simulation. To solve the leakage problem of grease, the length of the small end is enlarged. From this study, it is confirmed that we can save the cost and time by applying FEM techniques to analyze and design the boot model.

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Electrical Characteristics Analysis of LED Lamps using Internal Converter for Road and Street Lighting (컨버터 내장형 LED 가로등 및 보안등의 전기적 특성 분석)

  • Kim, Hyang-Kon;Gil, Hyoung-Jun;Choi, Hyo-Sang
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.59 no.2
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    • pp.238-244
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    • 2010
  • In this paper, we studied electrical characteristics of internal converter type of LED lamps for road and street lighting. We surveyed electro-technical regulations and KS(Korean industrial standards) about LED luminairs. Waveforms of voltage and current, thermal distributions, insulation resistances between live parts and exposed conductive parts, and flame test of cover of LED lamps were experimented and analyzed. In regulations, insulation resistance between live conductors and exposed conductive parts should be greater than $0.2M{\Omega}$ in case nominal voltage of wiring is 220V. In KS codes, the value of insulation resistance should be greater than $2M{\Omega}$ while applying DC 500V or DC 100V. In the result of this study, waveforms of primary voltage and current were distorted. There was difference in waveforms of secondary voltage and current according to composition of converter. Mostly, insulation resistances were measured high more than regulation and code value but some measured points were measured badly($0.0M{\Omega}$). Cover of LED lamps was ignited easily. We expect that the results of this study would be helpful for revision of regulations and national codes for the electrical safety of LED road and street lighting.

Absolute Dimensions of Fifteen High Mass Main Sequence Eclipsing Binaries

  • Surina, Farung;Kang, Young-Woon
    • Bulletin of the Korean Space Science Society
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    • 2008.10a
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    • pp.23.2-23.2
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    • 2008
  • We presented the accurate absolute dimensions and distances of fifteen main sequence eclipsing binaries. The photometric and spectroscopic solutions of the binary systems were determined by analyzing light curves and radial velocity curves collected from the literature using the Wilson-Devinney computer code. The fifteen double-line spectroscopic binaries consist of nine detached systems; QX Car, AH Cep, CW Cep, ZZ Cep, XY Cet, RX Her, V451 Oph, VV Pyx and V760 Sco, six semi-detached systems; LY Aur, IU Aur, AO Cas, DM Per, V Pup and HU Tau. The temperatures of the binary systems were determined from their colors using the color-temperature calibrations. Then the temperature of each component star were determined using the temperature ratio which was adjusted from the light curves. We estimated the possible Z values and ages for the detached systems by adopting the Y2 (Yonsei-Yale) stellar evolutionary tracks. The derived distances are in good agreement of the Hipparcos distances whose error of parallax is within 10 %. Finally these well-investigated systems will be used as the standard eclipsing binaries.

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