• Journal of the Korean Crystal Growth and Crystal Technology
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• v.14 no.6
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• pp.236-243
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• 2004

The oxide etching process was characterized in a magnetically enhanced reactive ion etching (MERIE) reactor with a $CHF_3CF_4$ gas chemistry. A statistical experimental design plus one center point was used to characterize relationships between process factors and etch response. The etch response modeled are etch rate, etch selectivity to TiN and uniformity. Etching uniformity was improved with increasing $CF_4$ flow ratio, increasing source power, and increasing pressure depending on source power. Characterization of via etching in $CHF_3CF_4$ MERIE using neural networks was successfully executed giving to highly valuable information about etching mechanism and optimum etching condition. It was found that etching uniformity was closely related to surface polymerization, DC bias, TiN and uniformity.

• Proceedings of the KSME Conference
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• 2001.06e
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• pp.235-240
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• 2001

The CHFG (Critical Heat Flux in Gap) test results have been evaluated to quantify the critical power in hemispherical narrow gaps and a new correlation has been developed. The CHFG test results have shown that increases in the gap thickness and pressure lead to an increase in critical power. The pressure effect on the critical power was found to be much milder than predictions by CHF correlations of other researches. From the CHFG test results, a new correlation on critical power in the hemispherical gap has been developed using the non-dimensional parameters as follows: $$\frac{qCHF}{{\rho}g^hfg}{\cdot}4\sqrt{\frac{{\rho}_g^2}{g{\sigma}{\Delta}{\rho}}=\frac{0.1042}{1+0.1375({\rho}g/{\rho}l)^{0.21}(D/s)}$$ The developed correlation has been expanded to apply the spherical geometry using the Siemens/KWU's correlation.

• Journal of the Korean Institute of Telematics and Electronics S
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• v.34S no.2
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• pp.94-103
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• 1997

The WCHF-FSJTC (wavelet circular harmonic function frequency selective joint transform correlator) using th wavelet transformed CHF as the reference image in FSJTC is proposed for rotation invariant pattern recognition. Since the wavelet transform has the property of feature extraction, the proposed system can have the better DC (discrimination cpability) and the higher SNR(signal to noise ratio) compared with the conventional CHF-CJTC(circular harmonic function conventional joint transform correlator). And since the structure of the proposed system is FSJTC which can eliminate auto-correlation and cross-correlation between input images, it can eliminate false alarm caused by the overlapping among correlation peaks. The used wavelet functio is the morlet function, which is proper for the reference image used in this paper. the optimal dialation parameter and oscillation frequency of the wavelet function are also achieved with varying the parameters of the wavelet function. The computer simulation shows that the proposed system has the best performance when the dilation parameter is 0.8 and the oscillation frequency is 0.48.

• Proceedings of the Korean Nuclear Society Conference
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• 1997.05a
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• pp.374-379
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• 1997

The thermal margin of CANDU-6 reactor is estimated by the CCP, which is dependent on fuel channel hydraulics and the CHF of fuel bundle. This paper intents to describe the characteristics of CCP behavior for the CANDU-6 channel in which CANFLEX-NU fuel bundles are assumed to be loaded. Also, it includes the thermal margin evaluation of the CANDU-6 channel loaded with a mixed CANFLEX-NU and 37-element fuel bundles as a simulation of the partial loading of CANFLEX-NU fuel bundle in the CANDU-6 reactor. For the mixed fuel channels, the effects of axial flux distribution(AFD) on CCP were investigated by using the AFD tilted in the downstream. The CCP of CANFLEX-NU fuel bundle was found to be improved by the CHF enhancement, despite of the slight flow decrease, in case of both full and partial loading, compared with those of a standard 37-element fuel bundle.

• Journal of Advanced Marine Engineering and Technology
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• v.13 no.4
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• pp.40-53
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• 1989

Boiling heat transfer phenomena is widely applied to BWR and electrical heating system because of its high heat transfer coefficient. In these systems, steady state heat transfer is dependent on nucleate boiling. When the heat generating rate is sharply increased or the cooling capacity of coolant is sharply decreased, sharp wall temperature rise is occurred under the critical heat flux(CHF) condition. This paper presents the simple wall temperature fluctuation model of transition mechanism in the repeating process of overheating and quenching, when coalescent bubble passes relatively slowly on the wall and simultaneously the transition from nucleate boiling to film boiling is carried at especially onset of the CHF state. The values calculated by the present model are resulted comparatively good with the measured.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.22 no.2
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• pp.392-400
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• 1997

In this paper we porposed WCHF-fSDF filter to obtain a roration and scale-invariant correlation output. WCHF-fSDF filter is synthesized by each single CHF exttracted from scale-changed and wavelet tranformed imagesfor a refereence image as tranining images. The wavelet transform is defined as the correlation of an input image with a wavelet function. Therefore two 4f optical correlation systems are needed for pattern recognition using wavelet transform. We here include the wavelet function for the input image in the process of the proposed filter design and substitute the two 4f optical correlation system with a single 4f optical correlation system. The Performances of the proposed filter are compared with conventional CHF-SDF, POCHF-SDF filters through the computer simulation. The results of computer simulation show that the proposed filter has the rotation and scale-invariant correlation output and it has better performances than thoseof the conventioanl filters.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1054-1060
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• 1998

Previous counter-current flow limitation (CCFL) and critical heat flux (CHF) studies included investigations on the inlet entrance, inclined channel and gap effects for the most part. In this study, the local CHF correlation was presented to be used in the numerical analysis for the 3 dimensional hemispherical geometry. Also, first-principle analyses were performed to determine the maximum heat removal capability from the debris through the gap that may be formed during a core melt accident. The maximum heat removal capability by gap cooling can be applied in quantitatively assessing the severe accident management measures.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.183-187
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• 2007

The magnetron reactive ion etching (RIE) characteristics of polycrystalline (poly) 3C-SiC grown on $SiO_2$/Si substrate by APCVD were investigated. Poly 3C-SiC was etched by $CHF_3$ gas, which can form a polymer as a function of side wall protective layers, with additive $O_2$ and Ar gases. Especially, it was performed in magnetron RIE, which can etch SiC at lower ion energy than a commercial RIE system. Stable etching was achieved at 70 W and the poly 3C-SiC was undamaged. The etch rate could be controlled from $20\;{\AA}/min$ to $400\;{\AA}/min$ by the manipulation of gas flow rates, chamber pressure, RF power, and electrode gap. The best vertical structure was improved by the addition of 40 % $O_2$ and 16 % Ar with the $CHF_3$ reactive gas. Therefore, poly 3C-SiC etched by magnetron RIE can expect to be applied to M/NEMS applications.

• Journal of Magnetics
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• v.15 no.3
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• pp.132-137
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• 2010

Plasma etching of $SiO_2$ contact holes was statistically analyzed by a fractional factorial experimental design. The analysis revealed the dependence of the etch rate and DC self-bias voltage on the input factors of the magnetically enhanced reactive ion etching reactor, including gas pressure, magnetic field, and the gas flow rates of $CHF_3$, $CF_4$, and Ar. Empirical models of the DC self-bias voltage and etch rate were obtained. The DC self-bias voltage was found to be determined mainly by the operating pressure and the magnetic field, and the etch rate was related mainly to the pressure and the flow rates of Ar and $CHF_3$.

• Journal of Advanced Marine Engineering and Technology
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• v.18 no.3
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• pp.26-33
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• 1994

A new reliable method to prediet the axial vapor fraction distribution from the measured probability density of the liquid bulk temperature is suggested in this paper. And also the actual quality of the subcooled boiling flow is easily calculated from the liquid bulk temperature. When the heat generating rate is reached to the CHF value, the sharp wall temperature increasing by the wall temperature fluctuation is occurred under the CHF condition. This paper presents the simple wall temperature fluctuation model of transition boiling by the repeating process of overheating and quenching, when the coalescent bubble passes slowly near the wall. Experiments for the subcooled R-113 flow are carride-out in the range of(0.9399~4.461)${\times}10^6$kg/$m^2$hr mass velocity and 10~3$0^{\circ}C$ intel subcooling condition.