• Journal of the Microelectronics and Packaging Society
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• v.22 no.2
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• pp.21-26
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• 2015

Mesoporous ceramic materials were applied in various fields such as adsorbent and gas sensor because of low thermal conductivity and high specific surface area properties. This structure could be divided into open-pore structure and closed-pore structure. Although closed-pore structure mesoporous ceramic materials have higher mechanical property than open-pore structure, it has a restriction on the application because the increase of specific surface area is limited. So, in this work, specific surface area of closed-pore structure $TiO_2$ was increased by anneal time. As increased annealing time, crystallization and grain growth of $TiO_2$ skeleton structured material in mesoporous structure induced a collapse and agglomeration of pores. Through this pore structural change, pore connectivity and specific surface area could be enhanced. After anneal for 24 hrs, porosity was decreased from 36.3% to 34.1%, but specific surface area was increased from $48m^2/g$ to $156m^2/g$. CO gas sensitivity was also increased by about 7.4 times due to an increase of specific surface area.

• Journal of the Korean Institute of Gas
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• v.12 no.2
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• pp.48-52
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• 2008

According to extremely industrial growth, gas facilities, equipments and chemical plants are gradually increased due to incremental demands of annual amount of gases. The safety management of gases, however, is still far from their requirements. Methane, the principal ingredient of natural gas, is inflammable and explosive and is much used in factories and houses. Therefore, these gas safety management is essential. So, we, with a program of the gas safety management, hope to develop the detection system of methane gas leak using mid-infrared ray LED and PD with $3.2\;{\mu}m$. The cryogenic cooling device is indispensible at laser but needless at LED driven on the room temperature if manufacturing optical sensor with $3.2\;{\mu}m$. It, consequently, is not only possible to implement for subminiature and portable type but also able to speedily detect methane of extremely small quantities because the $CH_4$ absorption intensity at $3.2\;{\mu}m$ is stronger than that at $1.67\;{\mu}m$. Our objective of research is to prevent gas leak accidents from occurring previously and to minimize the extent of damage from them.