• 제목/요약/키워드: CF$_4$

검색결과 1,205건 처리시간 0.034초

유리기판의 광추출 효율 향상을 위한 마스크 제작 공정 없는 플라즈마 식각 연구

  • 서동완;권오형;이우현;김지원;황기웅
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.507-507
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    • 2013
  • 유리기판으로 투과되는 빛들 중에는 내부 전반사나 wave-guided mode로 인하여 손실이 일어나 일반적으로 20%의 광추출 효율을 가진다. 이러한 문제점을 해결하기 위한 연구에는 Photonic Crystal과 같은 주기적인 나노 구조물이 있는데 이러한 구조물을 제작하기 위한 마스크 공정 과정은 대부분 복잡하거나 비싼 단점이 있다. 이에 본 발표에서는 마스크 없이 비정질소다라임 유리의 구조물 생성으로 광 추출 효율이 상승하는지 보고자 하였다. M-ICP (Magnetized-Induced Coupled Plasma)란 용량 결합형 플라즈마와 유도 결합형 플라즈마 두 가지 방식의 플라즈마를 이용한 것인데 용량 결합형 플라즈마를 이용해 이온이 sheath에 의해 가속되어 유리표면에 부딪히고 그에 따라 유리가 식각되는 물리적 식각을 이용하였다. 또한 이온의 밀도를 조절하기 위해 유도결합형 플라즈마 방식을 이용하여 식각률을 높였다. 화학적 식각을 위해서는 CF4와 O2혼합 가스를 이용해 F가 Si와 결합하여 SiF4가 되어 사라지고 탄소잔여물인 C는 O2와 반응하여 제거하였다. 그 결과, 랜덤한 분포를 가지는 미세한 구조물(stochastic sub-wavelength structure)을 유리 표면에 형성할 수 있었고, 또한 다양한 가스 종류와 압력, source power와 bias power, 그리고 시간을 바꿔가며 미세 구조물들을 관찰하였다. 실험 결과, 가시광선 파장 이하의 높이를 갖고 수 마이크로미터의 너비를 갖는 구조물이 전반사되는 빛을 효율적으로 추출하는 것을 산란되는 빛의 정도인 diffusive transmittance 가 기존 0%에서 15% 정도로 증가하는 것으로 스펙트로포토미터 측정을 통해 확인하였다. 이러한 유리 기판 위 구조물 생성방법을 OLED에 적용한다면 적은 비용으로 소자의 효율을 크게 향상 시킬 수 있을 것이다. 또한 본 처리 과정의 장점은 기존의 방법에 필요한 스퍼터링이나 RTA 처리 과정이 필요 없어 공정 단가 절감과 제조 공정의 단순화로 높은 생산성을 얻을 수 있으며 대면적화에도 유리하다.

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석영 유리의 파괴 거동에 관한 연구(II) (A Study on the Fracture Behavior of Quartz Glass(II))

  • 최성대;정선환;권현규;정영관;홍영배
    • 한국산업융합학회 논문집
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    • 제10권4호
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    • pp.213-219
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    • 2007
  • Glass-to-metal contact should be prevented in the design of any structural glass component. Because glass is extremely brittle and will fracture readily if even a small point load is applied. If the assembly includes a glass component supported by metallic structure, designers should provide a pliable interface of some kind between the two parts. But there happens high demand of glass-to metal contact in semiconductor industries due to adoption of dry cleaning process as one of the good solution to reduce running cost - carry out equipments cleaning with high corrosive and etching gas such as CF4 with keeping process temperature as the same as high service temperature. Therefore the quartz glass have to be received compression by direct contact with metal as the form of weight itself and vacuum pressure and fatigue by vibrations caused by process during the process. In this paper investigation will be carried out on fracture behavior of quartz glass contacted with metal directly under local load and fatigue given by process vibration with apparatus which can give $lox{\backslash}cal$ load and vibration through PZT ceramics to give guideline to prevent unintended fracture of quartz glass.

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지정도서제도에 관한 연구 (A Study of Reserve Book System)

  • 고성수
    • 한국도서관정보학회지
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    • 제4권
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    • pp.1-38
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    • 1977
  • This paper intend to analyze, review and point out the actual conditions of "Reserve Book System" of university libraries in Korea, then to present several proposals. I took six national universities and six private universities as researching objects and the materials were collected by questionnaires. 1) There are so many libraries which have no seperate reserve books room, while every colleges, and their departments are putting into forces the reserve book system. This makes many unresonable problems. 2) Many volumes were not adequate to the courses of each depertment and so many problems arose to set up reserve books owing to Lhe lack of library budget. 3) Insincerities of professors and librarians make no good conditions for the reserve book system. 4) For insufficiency of understanding about the reserve book system cf professors and students with university authorities, we must persuade and guide them about this system. 5) We imust evaluate about the problems of the reserve book system. I show the methods which is necessary to solve the problems of this system in the following. 1) As to methods of improving the field of menagement for running about the reserve book system, a) Establishment of the independent reserve books room. b) Gradual expansion of the reserve book system. c) Evaluation of the actual using of reserve books. 2) As to contents to improve the reserve book system, a) Improving the selection method of reserve books. b) Increasing the library budget enable to purchase more reserve books. c) Making more close connections between the curricula ard reserve books. 3) Settlment of coordinating system for carrying out reserve book system, a) We must have mutual understanding and co-operation among university authorities, faculties and libraries. b) We must have co-operation between professors and librariars.ibrariars.

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열분해성 그룹이 도입된 폴리이미드로부터 유도된 탄소분자체막의 수소 분리 특성 (Hydrogen Separation of Carbon Molecular Sieve Membranes Derived from Polyimides Having Decomposable Side Groups)

  • Young Moo Lee;Youn Kook Kim;Ji Min Lee;Ho Bum Park
    • 멤브레인
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    • 제14권2호
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    • pp.99-107
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    • 2004
  • Carbon molecular sieve (CMS) membranes were prepared by pyrolysis of polyimides having carboxylic acid groups and applied to the hydrogen separation. The polymeric membranes having carboxylic acid groups showed different steric properties as compared with polymeric membranes having other side groups ($-CH_3$ and $-CF_3$) because of the hydrogen bond between the carboxylic acid groups. However, the microporous CMS membranes were significantly affected by the decomposable side groups evidenced from the wide angle X-rat diffraction, nitrogen adsorption isotherms, and single gas permeation measurement. Furthermore, the gas separation properties of the CMS membranes were essentially affected by the pyrolysis temperature. As a result, the CMS membranes Prepared by Pyrolysis of polyimide containing carboxylic acid froups at $700^{\circ}C$ showed the $H_2$ permeability of 3,809 Baller [$1{\times}10^{-10}$ H $\textrm{cm}^$(STP)cm/$\textrm{cm}^2$.s.cmHg], $H_2$/$N_2$, selectivity of 46 and $H_2$/$CH_4$ selectivity of 130 while the CMS membranes derived from polyimide showed the H$_2$ permeability of 3,272 Barrer, $H_2$/$N_2$ selectivity of 136 and $H_2$/$CH_4$ selectivity of 177.

능동형 박막 광도파로 칼슘 이온 센서의 개발 (Development of Active thin Film Optical Waveguide $C^{2+}$ -ion Sensor)

  • 이수미;강신원
    • 전자공학회논문지SC
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    • 제37권4호
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    • pp.49-54
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    • 2000
  • 고분자 이온 감응막을 광도파로로 이용한 새로운 형태의 센서소자를 제작하여 칼슘이온의 농도 변화에 따른 그 특성을 평가하였다. 광도파로 소자는 실리카 유리기판에 기존의 반도체 사진식각법 (photolitho-graphy)을 이용하여 도파로가 형성되어질 부분을 에칭한 후 감지막을 스핀코팅법으로 코팅하여, 그 자체를 도파로로 이용한 고속 응답의 새로운 형태의 센서소자를 제작하였다. 도파로로 사용된 감지막은 칼슘이온에 대해 특이성을 가지는 변색성 이온감응물질인 ETH5294, 중성이온감응물질인 K23El, anionic site인 NaTm(CF/sub 3/)/sub 2/PB, 가소제인 DOP 및 PVC-PVAC-PVA 폴리머를 THF 용매에 녹여 스핀 코팅법으로 제작하였다. 여러 가지 변수에 따른 센서의 특성을 평가하기 위하여 도파로의 두께(즉, 감지막의 두께), 변색성 이온감응물질의 농도, 각 모드 변화에 따른 센서의 감응특성을 비교 평가하였다. 제작된 센서는 칼슘이온에 대해 1×10­6∼1M의 측정 범위를 가지며, 1×10­⁴∼1×10­¹M 영역에서 선형성을 가지며, 기존의 광학적 측정 방법인 분광분석법에 비해 높은 감도를 나타냄을 확인하였다.

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한국의 공업화건축 공법 도입활용과정 분석을 통한 3D 프린팅기술 개발 방향성 연구 (Discovering Applicable Lessons for '3D Printing R/D Project' Implementation Through Studying the Process of Adopting Overseas Industrialized Building Production Technological Knowhow in the Korean Context)

  • 이성민;이필원;조후영;이재헌
    • 한국공간구조학회논문집
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    • 제17권4호
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    • pp.59-68
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    • 2017
  • This paper aims at finding some lessons applicable to successful implementation of 'The 3D Printing R/D Project' through both examining the process of adopting overseas industrialized housing production technological knowhow by home builders during the 1970's~1980's period and thereafter until now the various efforts to adjust the technologies efficiently to the Korea's unique situation. Some meaningful lessons can be summarized as follows; I) Deep understanding of 3DP technological know-why along with its inheritance, II) Readjusting of R/D period and goals(cf. Global leader Winsun's 15 years experiment), III) Restructuring for more collaborative R/D B&E system among participating researchers IV) Fostering 3DP expert-engineers and technicians from the early stage, V) Clearing legal barriers in users' adopting 3DP methods necessary, VI) Development of appropriate building material besides concrete. Therefore, it is highly recommended that the above-mentioned 6 lessons positively accepted and applied to the Research Implementation Plan in due course, especially by KICT consortium and KAIA under the guidance of Ministry of Land, Infrastructure and Transport.

MMB시험에 의한 평직 CFRP/GFRP 적층판 혼합모드 층간분리의 실험적 평가 (The Experimental Evaluation of the Mixed Mode Delamination in Woven CFRP/GFRP Laminates under MMB Test)

  • 곽정훈;강지웅;권오헌
    • 한국안전학회지
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    • 제28권4호
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    • pp.14-18
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    • 2013
  • Blades of horizontal axis are nowadays made of composite materials. Generally, composite materials satisfy design provides lower weight and good stiffness, while laminate composites have often damages as like the delamination and cracks at the interface of laminates. The box spar and tail parts of a blade are composed of the CFRP/GFRP hybrid laminate composites. However, delamination and the interfacial crack often occur in the interface of CFRP/GFRP hybrid laminate composites under the mixed mode fracture condition, especially mode I and mode II. Therefore, there is a need for the evaluation of the mixed mode fracture behavior during the delamination of CFRP/GFRP hybrid laminates. This study shows the experimental results for the delamination fracture toughness in CFRP/GFRP hybrid laminate composites. Fracture toughness experiments and estimation are performed by using DMMB(Dissimilar mixed mode bending) specimen. The materials used in the test are a commercial woven type CFRP(Carbon fiber reinforced plastic) prepreg(CF3327) and UD type GFRP(Glass fiber reinforced plastic) prepreg(HD224A). A CFRP/GFRP hybrid laminate composite is composed by the 10 plies CFRP and GFRP prepreg for DMMB. A thickness of CFRP and GFRP layer is 2.5mm and 3.0mm, respectively. Also the fulcrum location which is a loading parameter is changed from 80 to 100mm on the specimen of length 120mm because it defines the ratio of mode I to mode II. In this study, the effects of the fulcrum location are evaluated in the viewpoint of energy release rate in mode I and mode II contribution. The results show that the delamination crack initiates at higher displacement and lower load according to the increase of the fulcrum location ratio. And the variation of the energy release rate for mode I and II contributions for the mode mixity are shown.

Changes of Hairy vetch Biomass by Different Seeding Methods and Rice Growth and Soil Physicochemical Properties by Its Incorporation in Paddy

  • Jeon, Weon-Tai;Ryu, Jin-Hee;Seong, Ki-Yeong;Kim, Min-Tae;Kang, Hang-Won;Lee, Jae-Eun;Jung, Chan-Sik;Kim, Wook-Han
    • 한국토양비료학회지
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    • 제46권4호
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    • pp.270-275
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    • 2013
  • Hairy vetch can fix nitrogen from the atmosphere as a leguminous cover crop. This research was carried out to determine optimum seeding method of hairy vetch and application effect in paddy. Field experiment was conducted at Sinheung series (fine loamy, mixed, nonacid, mesic family of Fluvaquentic Endoaquepts) from Sep. 2011 to Oct. 2012 at the National Institute of Crop Science (NICS), RDA, Suwon, Gyeonggi province, Korea. Hairy vetch used in the study was 'Cheongpyungbora', developed by National Institute of Crop Science. Seeding methods of hairy vetch consisted of Broadcasting Before Rice Harvesting (BBRH), Partial Tillage Seeding (PTS), Minimum Tillage Seeding (MTS), No Tillage Seeding (NTS), and Drill Seeding (DS). Both MTS and NTS showed the highest biomass among the seeding methods. The rice yield of MTS and NTS significantly increased compared to conventional fertilization (CF). Also soil properties including organic matter and bulk density were improved by incorporation of hairy vetch. Therefore, we suggested that MTS and NTS could be used to produce hairy vetch and rice in paddy.

간질감염(肝蛭感染) 및 구충제(驅蟲劑) DS-6 부작용(副作用)에 관(關)한 조사연구(調査硏究) (Studies on Bovine Fascioliasis with Special Reference to Infestation Rate and Side Action of DS-6 in Cattle)

  • 곽수동;정종식;조용준
    • 대한수의학회지
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    • 제23권2호
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    • pp.193-198
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    • 1983
  • A servey on bovine fascioliasis in 52,876 cattle of Euiseong, Andong, Yecheon, Wolseong areas in Gyeongbug Province was carried out by the intradermal test, and the clinical side action of the positive cattle administered with DS-6 intramuscularly was observed. In addition pathological examination of 2 cattle died with side action of DS-6 was also conducted. The results of the studies are summarized as follows; 1. The average infestation rate of bovine fascioliasis was 31.1% and regional infestation rates were 35.1% in Eiseong, 34.5% in Yecheon, 32.2% in Andong, 26.9% in Wolseong, respectively. 2. The side actions were occurred in 1.5%(115/7,667) cf cattle administered with DS-6 and the clinical observations were salivation, dyspnea, hyperamia of conjunctiva, lacrimation, perspiration, urticaria, tremor, diarrhea, staggering, convulsion, edema and abortion. 3. Within 1 hour after the injection, side actions were occurred in 61.7% of the 115 cattle while they were observed in 37.4% of the 115 catte from 1 hour to 2 hours post injection. 4. The duration of the side action was less than 2 hours in 29.5%, 2 to 10 hours in 47.0% and more than 10 hours in 23.5% of the 115 cattle. 5. Autopsy findings and histopathological observations indicate that the death of cattle is caused by anaphylactic shock.

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과배란처리(過排卵處理) 마우스에 있어서의 배란수(排卵數)의 좌우분포(左右分布)에 관한 연구(硏究) (The Distribution of Number of Ovulation between Both Ovaries in the Superovulated Mouse)

  • 전창기;이시지마 요시로
    • 농업과학연구
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    • 제4권1호
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    • pp.84-87
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    • 1977
  • PMS와 HCG로 과배란유기(過排卵誘起)한 Mouse 배란수(排卵數)의 좌우난소(左右卵巢)의 관계를 비교하였다. 그 결과 배란수(排卵數) 1197개중(個中) 좌난소(左卵巢)에서 603, 우난소(右卵巢)에서 594개(個)의 배란(排卵)이 되고 있어서 동물전체(動物全體)로 보면 반반으로 되어 있다. 개체별(個體別)로 보면 좌우(左右)의 배란수(排卵數)가 많은 24예(例) 우측(右側)의 배란수(排卵數)가 많은 것은 23예(例) 좌우동수(左右同數)의 것은 3예(例)이었다. 또 좌우(左右) 배란수간(排卵數間)에는 뚜렷한 정(正)의 상관(相關)(ri=0.504, p<0.001)이 존재(存在)하였다. 본연구(本硏究)에 사용(使用)한 Mouse의 과배란성적(過排卵成績)은 저자(著者)와 석도(石島)가 1974년(年)1월(月)~4월(月)에 동경농업대학(東京農業大學) 가축번식연구실에서 공동(共同) 실험(實驗)한 것이다. 여기에 부기(附記)하여 관계 각위(各位)에 감사한다.

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